초록 ▼

An infrared photodetector comprising of a photoabsorption layer formed on a substrate comprising of a multiquantum well structure, and a diffraction pattern formed over the photoabsorption layer. The diffraction pattern has recesses whose planar shape contains curves. Accordingly, the infrared photo

An infrared photodetector comprising of a photoabsorption layer formed on a substrate comprising of a multiquantum well structure, and a diffraction pattern formed over the photoabsorption layer. The diffraction pattern has recesses whose planar shape contains curves. Accordingly, the infrared photodetector can be formed by the fewer patterning steps and can detect the infrared radiation efficiently.

대표청구항 ▼

1. An infrared photodetector comprising:a photoabsorption layer formed on a substrate, said photoabsorption layer having a multiquantum-well structure; and a diffraction pattern formed on the photoabsorption layer to have recesses planar shape of each of which contains curved shapes and sectional sh

1. An infrared photodetector comprising:a photoabsorption layer formed on a substrate, said photoabsorption layer having a multiquantum-well structure; and a diffraction pattern formed on the photoabsorption layer to have recesses planar shape of each of which contains curved shapes and sectional shape of each of which has a single step shape, wherein the diffraction pattern is in contact with a reflecting film to constitute an integral member, and incident light is introduced from outside of the substrate and passes through the substrate and the photoabsorption layer to the reflecting film in a direction perpendicular to a surface of the photoabsorption layer.