초록 ▼

A piezoelectric vacuum pump that includes a diaphragm comprising an upper diaphragm member and a lower diaphragm member. The diaphragm members preferably comprise thin metal sheets that are plated with a noble metal, such as gold, silver, or platinum, and are mated together so as to form a hermetic

A piezoelectric vacuum pump that includes a diaphragm comprising an upper diaphragm member and a lower diaphragm member. The diaphragm members preferably comprise thin metal sheets that are plated with a noble metal, such as gold, silver, or platinum, and are mated together so as to form a hermetic seal along the length of the diaphragm. The piezoelectric vacuum pump further includes a plurality of piezoelectric bimorph elements that are mounted to the upper surface of the upper diaphragm member. When the piezoelectric bimorph elements are electrically activated, they cause a localized portion of the upper diaphragm member to flex, thereby creating a change in volume in a portion of the diaphragm proximate to that piezoelectric bimorph element. The apparatus further includes a sequencing circuit that provides a patterned switching sequence to control electrical activation of selected piezoelectric bimorph elements such that a volume of gas is drawn into an input port, moved through the diaphragm, and exhausted out of an output port.

대표청구항 ▼

1. A piezoelectric vacuum pump comprising:a base comprising a fiberglass board a diaphragm having an upper diaphragm member comprising a thin metal sheet plated with a noble metal on at least a lower surface thereof and a lower diaphragm member comprising a layer of copper on which a layer of a nobl

1. A piezoelectric vacuum pump comprising:a base comprising a fiberglass board a diaphragm having an upper diaphragm member comprising a thin metal sheet plated with a noble metal on at least a lower surface thereof and a lower diaphragm member comprising a layer of copper on which a layer of a noble metal is deposited and including an input port and an output port; a plurality of piezoelectric bimorph elements, mounted to an upper surface of the upper diaphragm member, each of said piezoelectric bimorph elements causing a portion of the upper diaphragm member to flex when electrically activated, thereby creating an change in volume in a portion of the diaphragm proximate to that piezoelectric bimorph element; and a sequencing circuit, to provide a patterned switching sequence that may be used to control electrical activation of selected piezoelectric bimorph elements such that a volume of gas is drawn into the input port, moved through the diaphragm, and exhausted out of the output port.