초록 ▼

A workpiece loading interface is included within a workpiece processing system which processes workpieces, typically wafers, in a vacuum. The workpiece loading interface includes two separate chambers. Each chamber may be separately pumped down. Thus, while a first cassette of wafers, from a first c

A workpiece loading interface is included within a workpiece processing system which processes workpieces, typically wafers, in a vacuum. The workpiece loading interface includes two separate chambers. Each chamber may be separately pumped down. Thus, while a first cassette of wafers, from a first chamber is being accessed, a second cassette of wafers may be loaded in the second chamber and the second chamber pumped down. Each chamber is designed to minimize intrusion to a clean room. Thus a door to each chamber has a mechanism which, when opening the door, first moves the door slightly away from an opening in the chamber and then the door is moved down parallel to the chamber. After the door is opened, a cassette of wafers is lowered through the opening in a motion much like a drawbridge. The cassette may be pivoted within the chamber when the position from which wafers are accessed from the cassette differs from the position from which the cassette is lowered out of the chamber.

대표청구항 ▼

1. In a workpiece processing system comprising multiple vacuum processing chambers coupled to a central chamber, a method for loading workpieces into the central chamber, comprising the steps of:providing dual workpiece load/unload chambers coupled to the central chamber, each having an opening for

1. In a workpiece processing system comprising multiple vacuum processing chambers coupled to a central chamber, a method for loading workpieces into the central chamber, comprising the steps of:providing dual workpiece load/unload chambers coupled to the central chamber, each having an opening for receiving workpieces held in a cassette and for forwarding the cassette of workpieces to the central chamber of the workpiece processing chamber for further transfer to one of the multiple vacuum chambers for processing: providing a cassette support pivotally mounted within each of said load/unload chambers; pivoting each cassette support to a first pivot position; operating each cassette support to raise and lower a cassette of workpieces into and out of the opening of the respective load/unload chamber when in the first pivot position of the cassette support about a horizontal axis, and thereafter pivoting each cassette to a second pivot position to position the cassette for forwarding of the workpieces to the central chamber from the second pivot position of the cassette support wherein pivoting occurs about a substantially vertical axis.