초록 ▼

An apparatus analyzes liquid samples automatically and continuously by mixing certain reagents within a common arrangement of membrane pumps, mixing chambers and connecting conduits formed in a silicon wafer and evaluating the reaction results with the help of suitable sensors on the silicon wafer,

An apparatus analyzes liquid samples automatically and continuously by mixing certain reagents within a common arrangement of membrane pumps, mixing chambers and connecting conduits formed in a silicon wafer and evaluating the reaction results with the help of suitable sensors on the silicon wafer, the silicon wafer being of 100 orientation and the structure thereof having been formed by anisotropic etching. Immediately before and after the pump chamber of trapezoidal cross section, there are conduits of a v-shaped or trapezoidal cross section which have a nonlinear flow resistance.

대표청구항 ▼

1. An apparatus for mixing liquid reagents thereby to cause a reaction in which the reagents react chemically and for analyzing, by means of a sensor, a sample of liquid resulting from the reaction, comprising:a substrate having a micropump including an inlet conduit and an outlet conduit etched in

1. An apparatus for mixing liquid reagents thereby to cause a reaction in which the reagents react chemically and for analyzing, by means of a sensor, a sample of liquid resulting from the reaction, comprising:a substrate having a micropump including an inlet conduit and an outlet conduit etched in the substrate and a pumping chamber etched in the substrate and connected to the inlet conduit and the outlet conduit, the pumping chamber having a volume which expands and contracts during a complete pump cycle; said substrate having a mixing chamber etched thereon and connected to said outlet conduit; said inlet conduit having an effective flow cross section different from that of said outlet conduit such that over the complete pump cycle net fluid flow is from the inlet conduit and out the outlet conduit; and a covering layer covering said substrate to seal said pumping chamber, said inlet conduit, said outlet conduit and said mixing chamber; wherein said pumping chamber contracts and expands such that a flow in the inlet conduit is laminar entering said pumping chamber and turbulent exiting said pumping chamber and a flow in the outlet conduit is laminar both entering and exiting said pumping chamber.