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[미국특허] Electrical contactor especially wafer level contactor using fluid pressure 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01R-004/60
출원번호 US-0376759 (1999-08-17)
발명자 / 주소
  • Benjamin N. Eldridge
출원인 / 주소
  • FormFactor, Inc.
대리인 / 주소
    N. Kenneth Burraston
인용정보 피인용 횟수 : 96  인용 특허 : 26

초록

An electrical interconnect assembly and methods for making an electrical interconnect assembly. In one embodiment, an interconnect assembly includes a flexible wiring layer having a plurality of first contact elements and a fluid containing structure which is coupled to the flexible wiring layer. Th

대표청구항

1. An interconnect assembly comprising:a flexible substrate including a plurality of first electrical contacts, a semiconductor device disposed in proximity to said flexible substrate and having a plurality of second electrical contacts, a fluid chamber, and a pump in fluid communication with said f

이 특허에 인용된 특허 (26) 인용/피인용 타임라인 분석

  1. D\Souza Daniel B. (Santa Clara County CA), Active probe card.
  2. Cherry Robert S. (Redondo Beach CA), Active probe card for high resolution/low noise wafer level testing.
  3. Littlebury Hugh W. (Chandler AZ) Simmons Marion I. (Tempe AZ), Apparatus and method for burning in integrated circuit wafers.
  4. Okubo Masao (Tokyo JPX) Yoshimitsu Yasuro (Tokyo JPX), Complex probe card for testing a semiconductor wafer.
  5. Khandros Igor Y. ; Eldridge Benjamin N. ; Mathieu Gaetan L. ; Dozier Thomas H. ; Smith William D., Contact carriers (tiles) for populating larger substrates with spring contacts.
  6. Mendenhall David W. (Greenville RI) Goff Jay T. (Cranston RI), Flex dot wafer probe.
  7. Khandros Igor Y. ; Mathieu Gaetan L., Flexible contact structure with an electrically conductive shell.
  8. Leedy Glenn J. (1061 E. Mountain Dr. Santa Barbara CA 93108), Flexible tester surface for testing integrated circuits.
  9. Knight Alan D. (Newark Valley NY) Petrozello James R. (Endicott NY), Fluid pressure actuated electrical connector.
  10. Ardezzone Frank J. (Santa Clara CA), High density probe-head with isolated and shielded transmission lines.
  11. Kwon On-Kyong (Plano TX) Hashimoto Masashi (Garland TX) Malhi Satwinder (Garland TX), High performance test head and method of making.
  12. Lee Shaw Wei (10410 Miller Ave. Cupertino CA 95014), Known good die test apparatus and method.
  13. Crumly William R. (Anaheim CA), Membrane connector with stretch induced micro scrub.
  14. Lum Thomas F. (Austin TX) Wenzel James F. (Austin TX), Method for probing a semiconductor wafer.
  15. Leedy Glenn J. (1061 E. Mountain Dr. Santa Barbara CA 93108), Method of making a flexible tester surface for testing integrated circuits.
  16. Eldridge Benjamin N. ; Grube Gary W. ; Khandros Igor Y. ; Mathieu Gaetan L., Method of planarizing tips of probe elements of a probe card assembly.
  17. Eldridge Benjamin N. ; Grube Gary W. ; Khandros Igor Y. ; Mathieu Gaetan L., Method of testing semiconductor.
  18. Swapp Mavin (Mesa AZ), Micromachined semiconductor probe card.
  19. Driller Hubert (Schmitten DEX) Mang Paul (Schmitten DEX), Printed circuit board testing device with foil adapter.
  20. Higgins H. Dan ; Pandey Rajiv ; Armendariz Norman J. ; Bates R. Dennis, Probe card assembly for high density integrated circuits.
  21. Okubo Kazumasa (Kanagawa JPX) Okubo Masao (Nishinomiya JPX) Yoshimitsu Yasuro (Takatsuki JPX) Sugaya Kiyoshi (Amagasaki JPX), Probe card in which contact pressure and relative position of each probe end are correctly maintained.
  22. Sano Kunio (Nakakoma-gun JPX), Probe device.
  23. Thompson Patrick F. ; Williams William M. ; Lindsey Scott E. ; Vasquez Barbara, Semiconductor wafer contact system and method for contacting a semiconductor wafer.
  24. James Marc Leas ; Robert William Koss ; Jody John Van Horn ; George Frederick Walker ; Charles Hampton Perry ; David Lewis Gardell ; Steve Leo Dingle ; Ronald Prilik, Semiconductor wafer test and burn-in.
  25. Brown Candice H. (San Jose CA), Test fixture capable of electrically testing an integrated circuit die having a planar array of contacts.
  26. Khandros Igor Y. ; Pedersen David V., Wafer-level burn-in and test.

이 특허를 인용한 특허 (96) 인용/피인용 타임라인 분석

  1. Strid, Eric; Gleason, K. Reed, Active wafer probe.
  2. Strid,Eric; Gleason,K. Reed, Active wafer probe.
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  5. Kellar,Scot A.; Kim,Sarah E.; List,R. Scott, Barrier structure against corrosion and contamination in three-dimensional (3-D) wafer-to-wafer vertical stack.
  6. Strid, Eric; Campbell, Richard, Calibration structures for differential signal probing.
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  8. Rumiantsev, Andrej; Kanev, Stojan; Scott, Steffen; Stoll, Karsten, Chuck for supporting and retaining a test substrate and a calibration substrate.
  9. Kellar, Scot A.; Kim, Sarah E.; List, R. Scott, Dielectric recess for wafer-to-wafer and die-to-die metal bonding and method of fabricating the same.
  10. Campbell, Richard; Strid, Eric W.; Andrews, Mike, Differential signal probe with integral balun.
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  15. Eldridge, Benjamin N., Electrical contactor, especially wafer level contactor, using fluid pressure.
  16. Eldridge, Benjamin N., Electrical contactor, especially wafer level contactor, using fluid pressure.
  17. Eldridge,Benjamin N., Electrical contactor, especially wafer level contactor, using fluid pressure.
  18. Eldridge,Benjamin N., Electrical contactor, especially wafer level contactor, using fluid pressure.
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  22. Cheng, Chun-Wen; Peng, Jung-Huei; Liu, Yi-Shao; Lai, Fei-Lung; Tsai, Shang-Ying, Fluid deposition appartus and method.
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  28. Tervo,Paul A.; Cowan,Clarence E., Low-current pogo probe card.
  29. Schwindt,Randy J., Low-current probe card.
  30. Gleason, K. Reed; Bayne, Michael A.; Smith, Kenneth; Lesher, Timothy; Koxxy, Martin, Membrane probing method using improved contact.
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  41. Gleason,K. Reed; Smith,Kenneth R.; Bayne,Mike, Membrane probing system with local contact scrub.
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  45. Gleason, Reed; Bayne, Michael A.; Smith, Kenneth, Method of constructing a membrane probe.
  46. Smith, Kenneth R., Method of replacing an existing contact of a wafer probing assembly.
  47. Fredericksen, Ross Thomas; Gilliland, Don Alan, Method of using bonding pad as a gasket for electronic subassemblies.
  48. Staines,David; Kloster,Grant M.; Ramanathan,Shriram, Method to fill the gap between coupled wafers.
  49. Strid,Eric; Campbell,Richard, On-wafer test structures for differential signals.
  50. Tervo,Paul A.; Cowan,Clarence E., POGO probe card for low current measurements.
  51. Yano, Kazuya; Hayashi, Eiji; Nagasaka, Munetoshi, Probe apparatus and wafer mounting table for probe apparatus.
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  53. Miller, Charles A., Probe card cooling assembly with direct cooling of active electronic components.
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  68. Smith, Kenneth R., Replaceable coupon for a probing apparatus.
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  88. Kellar, Scot A.; Kim, Sarah E.; List, R. Scott, Wafer bonding using a flexible bladder press and thinned wafers for three-dimensional (3D) wafer-to-wafer vertical stack integration, and application thereof.
  89. Kellar,Scot A.; Kim,Sarah E.; List,R. Scott, Wafer bonding using a flexible bladder press for three dimensional (3D) vertical stack integration.
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