초록 ▼

Abrasive components and clear fluids are separated from an aqueous chemical mechanical slurry used for planarization of semiconductor materials, to permit the reuse of the clear liquid effluent in non-process applications as well as for gray water for irrigation, process cooling water, or as make-up

Abrasive components and clear fluids are separated from an aqueous chemical mechanical slurry used for planarization of semiconductor materials, to permit the reuse of the clear liquid effluent in non-process applications as well as for gray water for irrigation, process cooling water, or as make-up water for a reverse osmosis system, or safe disposal in the industrial waste stream, as desired. A solids detection device determines the concentration of abrasive solids in the aqueous waste effluent stream, and a diverter valve receives and diverts the entire aqueous waste effluent stream to at least one reuse water collection tank when the abrasive solids concentration is below a desired threshold, and diverts the entire aqueous waste effluent stream to at least one concentrate water collection tank when the abrasive solids concentration is greater than or equal to the threshold. With the additional use of ion exchange, the resulting water stream can be reused in high purity water applications.

대표청구항 ▼

1. A method for the recovery of water from an aqueous slurry waste stream from chemical mechanical planarization of semiconductor wafers, the aqueous waste stream containing abrasive materials on an irregular basis, and for the removal of the abrasive materials from the aqueous slurry waste stream,

1. A method for the recovery of water from an aqueous slurry waste stream from chemical mechanical planarization of semiconductor wafers, the aqueous waste stream containing abrasive materials on an irregular basis, and for the removal of the abrasive materials from the aqueous slurry waste stream, comprising the steps of:introducing an effluent stream of the aqueous slurry waste stream into a particle detection device for detection of a solids concentration of abrasive particles in the aqueous slurry waste stream; and diverting the entire effluent stream as collected water to at least one reuse water collection tank when the solids concentration is below a desired threshold, and diverting the entire effluent stream as concentrate water to a concentrate water collection tank when the solids concentration is greater than or equal to the desired threshold.