$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Substrate transport apparatus with multiple arms on a common axis of rotation 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B66C-023/00
출원번호 US-0223508 (1998-12-30)
발명자 / 주소
  • Christopher A. Hofmeister
출원인 / 주소
  • Brooks Automation Inc.
대리인 / 주소
    Perman & Green, LLP
인용정보 피인용 횟수 : 63  인용 특허 : 16

초록 ▼

A substrate transport apparatus having a drive section, two independently movable arm assemblies connected to the drive section on a common axis of rotation, and substrate holders connected to the arm assemblies. The drive section includes three coaxial drive shafts with a pulley connected to one of

대표청구항 ▼

1. A substrate transport apparatus comprising:a drive section; two independently movable arm assemblies connected to the drive section on a common axis of rotation; and substrate holders connected to the arm assemblies on respective first and second substrate holder axes, wherein said substrate hold

이 특허에 인용된 특허 (16)

  1. Eastman Richard H. (Needham MA) Davis ; Jr. James C. (Carlisle MA), Articulated arm transfer device.
    상세보기
  2. Hofmeister Christopher, Articulated arm transfer device.
    상세보기
  3. Hofmeister Christopher, Articulated arm transfer device.
    상세보기
  4. Bacchi Paul ; Filipski Paul S., Continuously rotatable multiple link robot arm mechanism.
    상세보기
  5. Fyler Donald C. (Cambridge MA), Control arm assembly.
    상세보기
  6. Bacchi Paul ; Filipski Paul S., Dual end effector, multiple link robot arm system with corner reacharound and extended reach capabilities.
    상세보기
  7. Kroeker Tony ; Mooring Ben, Dual plane robot.
    상세보기
  8. Uehara Akira (Kanagawa JPX) Hijikata Isamu (Kanagawa JPX) Minato Mitsuaki (Kanagawa JPX), Object handling devices.
    상세보기
  9. Maher Joseph A. (South Hamilton MA) Vowles E. John (Goffstown NH) Napoli Joseph D. (Winham NH) Zafiropoulo Arthur W. (Manchester MA) Miller Mark W. (Burlington MA), Quad processor.
    상세보기
  10. Caveney Robert T. ; Hofmeister Christopher A., Robot handling apparatus.
    상세보기
  11. Genov Genco ; Todorov Alexander, Robot having multiple degrees of freedom in an isolated environment.
    상세보기
  12. Bacchi Paul ; Filipski Paul S., Single and dual end effector, multiple link robot arm systems having triaxial drive motors.
    상세보기
  13. Davis ; Jr. James C. (Carlisle MA) Hofmeister Christopher A. (Hampstead NH), Substrate transport apparatus with dual substrate holders.
    상세보기
  14. Ogawa Hironori,JPX ; Yoda Hirokazu,JPX, Two-armed transfer robot.
    상세보기
  15. Bacchi Paul ; Filipski Paul S., Unitary specimen prealigner and continuously rotatable multiple link robot arm mechanism.
    상세보기
  16. Turner Norman L. (Mountain View CA) White John M. (Hayward CA), Vacuum processing apparatus having improved throughput.
    상세보기

이 특허를 인용한 특허 (63)

  1. Lenz, Eric H., Airflow management for low particulate count in a process tool.
    상세보기
  2. Lenz, Eric H., Airflow management for low particulate count in a process tool.
    상세보기
  3. Krupyshev, Alexander G.; Drew, Mitchell, Compact processing apparatus.
    상세보기
  4. Yokoyama, Akihiro, Concentric multi-axis actuator.
    상세보기
  5. Kremerman, Izya, Dual arm robot.
    상세보기
  6. Kremerman, Izya, Dual arm robot.
    상세보기
  7. Kremerman, Izya, Dual arm robot.
    상세보기
  8. Pietrantonio, Antonio F.; Chesna, Anthony; Elmali, Hakan; Gilchrist, Ulysses, Dual scara arm.
    상세보기
  9. Pietrantonio, Antonio F.; Chesna, Anthony; Elmali, Hakan; Gilchrist, Ulysses, Dual scara arm.
    상세보기
  10. Pietrantonio, Antonio F.; Chesna, Anthony; Elmoli, Hakan; Gilchrist, Ulysses, Dual scara arm.
    상세보기
  11. Lero,Christophe; Astegno,Pierre; Gaudon,Alain, FOUP door transfer system.
    상세보기
  12. Lenz, Eric H., High throughput cleaner chamber.
    상세보기
  13. Tatemichi, Junichi; Onoda, Masatoshi; Orihira, Kohichi, Ion implanter.
    상세보기
  14. Meulen, Peter van der, Linear semiconductor processing facilities.
    상세보기
  15. van der Meulen, Peter, Linear semiconductor processing facilities.
    상세보기
  16. Mitchell, Robert J. C.; Relleen, Keith D.; Ruffell, John, Method and apparatus for processing wafers.
    상세보기
  17. Cox, Damon Keith; Freeman, Marvin L.; Schaller, Jason M.; Hudgens, Jeffrey C.; Brodine, Jeffrey A., Methods and apparatus for extending the reach of a dual scara robot linkage.
    상세보기
  18. van der Meulen, Peter, Mid-entry load lock for semiconductor handling system.
    상세보기
  19. van der Meulen,Peter, Mid-entry load lock for semiconductor handling system.
    상세보기
  20. Kremerman, Izya, Motor modules, multi-axis motor drive assemblies, multi-axis robot apparatus, and electronic device manufacturing systems and methods.
    상세보기
  21. Moura, Jairo; Krishnasamy, Jay; Hosek, Martin, Motor stator with lift capability and reduced cogging characteristics.
    상세보기
  22. Hudgens, Jeffrey C.; Kremerman, Izya; Brodine, Jeffrey A.; Cox, Damon Keith, Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing.
    상세보기
  23. Hudgens, Jeffrey C., Multi-axis vacuum motor assembly.
    상세보기
  24. Hosek, Martin; Hofmeister, Christopher; Zettler, John F.; Krupyshev, Alexander; Syssoev, Sergei; Majczak, Krzystof, Multiple dimension position sensor.
    상세보기
  25. Yin, Bing; Moura, Jairo T.; Tsang, Vincent; Gawlik, Aaron; Spiker, Nathan, On the fly automatic wafer centering method and apparatus.
    상세보기
  26. Hosek, Martin; Moura, Jairo Terra; Hofmeister, Christopher, Reduced-complexity self-bearing brushless DC motor.
    상세보기
  27. Lenz, Eric H., Reduction of particle contamination produced by moving mechanisms in a process tool.
    상세보기
  28. Gilchrist, Ulysses; Hosek, Martin; Moura, Jairo Terra; Krishnasamy, Jay; Hofmeister, Christopher, Robot drive with magnetic spindle bearings.
    상세보기
  29. Hosek, Martin, Robot system with independent arms.
    상세보기
  30. Kremerman, Izya; Hudgens, Jeffrey C.; Cox, Damon Keith, Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm.
    상세보기
  31. Hudgens, Jeffrey C.; Kremerman, Izya, Robot systems, apparatus, and methods having independently rotatable waists.
    상세보기
  32. Kim,Ki Sang, Semiconductor fabrication apparatus having FOUP index in apparatus installation area.
    상세보기
  33. van der Meulen, Peter, Semiconductor manufacturing systems.
    상세보기
  34. Takizawa, Masahiro; Suwada, Masaei; Wada, Takashi, Semiconductor substrate transfer apparatus and semiconductor substrate processing apparatus equipped with the same.
    상세보기
  35. Shirai, Hidenobu, Semiconductor transfer and manufacturing apparatus.
    상세보기
  36. van der Meulen, Peter; Kiley, Christopher C; Pannese, Patrick D.; Ritter, Raymond S.; Schaefer, Thomas A., Semiconductor wafer handling and transport.
    상세보기
  37. van der Meulen, Peter; Kiley, Christopher C; Pannese, Patrick D.; Ritter, Raymond S.; Schaefer, Thomas A., Semiconductor wafer handling and transport.
    상세보기
  38. van der Meulen, Peter; Kiley, Christopher C.; Pannese, Patrick D.; Ritter, Raymond S.; Schaefer, Thomas A., Semiconductor wafer handling transport.
    상세보기
  39. Lee, Hyun Wook, Spin scrubber apparatus.
    상세보기
  40. Zhang, Bo; Liu, Pinkuan; Zhu, Xiaobo; Li, Yujie, Static vacuum shafting device for integrated rotary transformer.
    상세보기
  41. Lenz, Eric H., Substrate load and unload mechanisms for high throughput.
    상세보기
  42. Caveney, Robert T.; Krishnasamy, Jayaraman; Gilchrist, Ulysses; Drew, Mitchell; Moura, Jairo T., Substrate processing apparatus.
    상세보기
  43. Gilchrist, Ulysses; Caveney, Robert T.; Krishnasamy, Jayaraman; Drew, Mitchell; Moura, Jairo T., Substrate processing apparatus.
    상세보기
  44. Gilchrist, Ulysses; Caveney, Robert T.; Krishnasamy, Jayaraman; Drew, Mitchell; Moura, Jairo T., Substrate processing apparatus.
    상세보기
  45. Krupyshev, Alexander G.; Hofmeister, Christopher, Substrate processing apparatus with motors integral to chamber walls.
    상세보기
  46. Furuichi, Masatoshi; Kimura, Yoshiki, Substrate transfer system and substrate processing system.
    상세보기
  47. Furuichi, Masatoshi; Kimura, Yoshiki, Substrate transfer system and substrate processing system.
    상세보기
  48. Furuichi, Masatoshi; Kimura, Yoshiki, Substrate transfer system, substrate processing system, and substrate transfer robot.
    상세보기
  49. Furuichi, Masatoshi; Kimura, Yoshiki, Substrate transfer system, substrate processing system, and substrate transfer robot.
    상세보기
  50. Furuichi, Masatoshi; Kimura, Yoshiki, Substrate transfer system, substrate processing system, and substrate transfer robot.
    상세보기
  51. Gilchrist, Ulysses; Hofmeister, Christopher, Substrate transport apparatus.
    상세보기
  52. Hofmeister, Christopher; Krupyshev, Alexander G.; Majczak, Krysztof A.; Hosek, Martin; Krishnasamy, Jay, Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism.
    상세보기
  53. Kremerman, Izya; Hudgens, Jeffrey C., Systems, apparatus and methods for transporting substrates.
    상세보기
  54. Kremerman, Izya; Hudgens, Jeffrey C., Systems, apparatus and methods for transporting substrates in electronic device manufacturing.
    상세보기
  55. Tabrizi, Farzad; Barker, David, Transfer mechanism with multiple wafer handling capability.
    상세보기
  56. Tabrizi, Farzad; Barker, David, Transfer mechanism with multiple wafer handling capability.
    상세보기
  57. Ogawa,Hironori; Uno,Sakiko, Transfer robot.
    상세보기
  58. Minami, Hirofumi; Ago, Kenji; Kawaguchi, Takafumi; Koike, Toshio; Yuyama, Junpei, Transport apparatus, control method for the same, and vacuum processing system.
    상세보기
  59. Saeki, Hiroaki; Ishizawa, Shigeru; Shindo, Takehiro; Hiroki, Tsutomu; Machiyama, Wataru, Transportation apparatus and drive mechanism.
    상세보기
  60. Hosek, Martin, Vacuum robot adapted to grip and transport a substrate and method thereof with passive bias.
    상세보기
  61. Hosek, Martin, Wafer transport system.
    상세보기
  62. Hosek, Martin, Wafer transport system.
    상세보기
  63. Hosek, Martin, Wafer transport system.
    상세보기

관련 콘텐츠

섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로