초록 ▼

A MEMS pumping device driven by electrostatic forces comprises a substrate having at least one substrate electrode disposed thereon. Affixed to the substrate is a moveable membrane that generally overlies the at least one substrate electrode. The moveable membrane comprises at least one electrode el

A MEMS pumping device driven by electrostatic forces comprises a substrate having at least one substrate electrode disposed thereon. Affixed to the substrate is a moveable membrane that generally overlies the at least one substrate electrode. The moveable membrane comprises at least one electrode element and a biasing element. The moveable membrane includes a fixed portion attached to the substrate and a distal portion extending from the fixed portion and being moveable with respect to the substrate electrode. A dielectric element is disposed between the at least one substrate electrode and the at least one electrode element of the moveable membrane to provide for electrical isolation. In operation, a voltage differential is established between the at least one substrate electrode and the at least one electrode element which displaces the moveable membrane relative to the substrate to thereby controllably distribute matter residing between the substrate and the distal portion of the moveable membrane. In a further embodiment the MEMS pumping devices comprise more that two moveable membranes that are configured so as to maximize flow in a desired direction. Additional embodiments include more than one electrode element disposed within the moveable membrane that are capable of individual and sequential biasing to improve overall net flow in the desired flow direction.

대표청구항 ▼

1. A MEMS (Micro Electro Mechanical System) electrostatic pump device, comprising:a substrate; a plurality of individually addressable substrate electrodes disposed upon said substrate; a first moveable membrane generally overlying said plurality of individually addressable substrate electrodes, the

1. A MEMS (Micro Electro Mechanical System) electrostatic pump device, comprising:a substrate; a plurality of individually addressable substrate electrodes disposed upon said substrate; a first moveable membrane generally overlying said plurality of individually addressable substrate electrodes, the first moveable membrane comprising at least one electrode element and a biasing element, wherein the first moveable membrane includes a fixed portion attached to said substrate and a distal portion extending from the fixed portion, the distal portion being moveable with respect to said plurality of individually addressable substrate electrodes; and a dielectric element disposed between said plurality of individually addressable substrate electrodes and said at least one electrode element of said first moveable membrane, wherein a voltage differential established between said plurality of individually addressable substrate electrodes and said at least one electrode element moves said first moveable membrane relative to said substrate to thereby controllably distribute matter residing between the substrate and the distal portion of said first moveable membrane.