초록 ▼

A linear robot includes a slide and an end effector arm connected to the slide. The end effector arm includes an end effector. During use, vacuum is selectively supplied to the end effector, with selectively grabs and releases substrates. The slide is supported on a hanger. An air bearing between th

A linear robot includes a slide and an end effector arm connected to the slide. The end effector arm includes an end effector. During use, vacuum is selectively supplied to the end effector, with selectively grabs and releases substrates. The slide is supported on a hanger. An air bearing between the slide and the hanger allows the slide and end effector arm including any substrates held by the end effector to freely move along the hanger. The entire periphery of an air bearing surface of the slide is lined by a collector, which is coupled to a vacuum source. Pressurized gas from the air bearing region between the slide and the hanger is captured by the collector. Thus, any particulates entrained with the pressurized gas are captured and do not contaminate the substrates.

대표청구항 ▼

1. A structure comprising:a slide having a base comprising a first surface, a vacuum coupler trench and a pressurized gas coupler trench being in said first surface; and a hanger comprising a first vacuum channel and a first pressurized gas channel, said first vacuum channel extending to a first ape

1. A structure comprising:a slide having a base comprising a first surface, a vacuum coupler trench and a pressurized gas coupler trench being in said first surface; and a hanger comprising a first vacuum channel and a first pressurized gas channel, said first vacuum channel extending to a first aperture aligned with said vacuum coupler trench, said first pressurized gas channel extending to a second aperture aligned with said pressurized gas coupler trench.