IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0536801
(2000-03-28)
|
우선권정보 |
JP-0026210 (1996-01-19); JP-0026037 (1996-01-20); JP-0032874 (1996-01-26); JP-0032875 (1996-01-26); JP-0032981 (1996-01-27); JP-0058334 (1996-02-20); JP-0088759 (1996-03-17); JP-0335152 (1996-11-29) |
발명자
/ 주소 |
- Yamazaki, Shunpei
- Teramoto, Satoshi
- Koyama, Jun
- Ogata, Yasushi
- Hayakawa, Masahiko
- Osame, Mitsuaki
- Ohtani, Hisashi
- Hamatani, Toshiji
|
출원인 / 주소 |
- Semiconductor Energy Laboratory Co., Ltd.
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
20 인용 특허 :
176 |
초록
▼
A novel and very useful method for forming a crystal silicon film by introducing a metal element which promotes crystallization of silicon to an amorphous silicon film and for eliminating or reducing the metal element existing within the crystal silicon film thus obtained is provided. The method for
A novel and very useful method for forming a crystal silicon film by introducing a metal element which promotes crystallization of silicon to an amorphous silicon film and for eliminating or reducing the metal element existing within the crystal silicon film thus obtained is provided. The method for fabricating a semiconductor device comprises steps of intentionally introducing the metal element which promotes crystallization of silicon to the amorphous silicon film and crystallizing the amorphous silicon film by a first heat treatment to obtain the crystal silicon film; eliminating or reducing the metal element existing within the crystal silicon film by implementing a second heat treatment within an oxidizing atmosphere; eliminating a thermal oxide film formed in the previous step; and forming another thermal oxide film on the surface of the region from which the thermal oxide film has been eliminated by implementing another thermal oxidation.
대표청구항
▼
A novel and very useful method for forming a crystal silicon film by introducing a metal element which promotes crystallization of silicon to an amorphous silicon film and for eliminating or reducing the metal element existing within the crystal silicon film thus obtained is provided. The method for
A novel and very useful method for forming a crystal silicon film by introducing a metal element which promotes crystallization of silicon to an amorphous silicon film and for eliminating or reducing the metal element existing within the crystal silicon film thus obtained is provided. The method for fabricating a semiconductor device comprises steps of intentionally introducing the metal element which promotes crystallization of silicon to the amorphous silicon film and crystallizing the amorphous silicon film by a first heat treatment to obtain the crystal silicon film; eliminating or reducing the metal element existing within the crystal silicon film by implementing a second heat treatment within an oxidizing atmosphere; eliminating a thermal oxide film formed in the previous step; and forming another thermal oxide film on the surface of the region from which the thermal oxide film has been eliminated by implementing another thermal oxidation. ce by Raschel-locking. 8. A wide-meshed lattice for providing reinforcement for bitumen-bonded layers comprising: two sets of parallel, load-bearing threads, wherein one set of threads extends in a longitudinal direction of the lattice and an other set of threads extends perpendicularly to the longitudinal direction of the lattice and the threads are made of synthetic fibers and are Raschel-locked onto a fleece by Raschel-locking threads, with the Raschel-locking threads surrounding the longitudinally extending threads and securing the transversely extending threads, wherein the synthetic fibers enhance bonding to bitumen or a bonding substance and the fleece has a weight of less than 50 g/m2. 9. A composite lattice assembly for reinforcing bituminous layers comprising: a fleece member; a first set of lattice threads arranged on the fleece member; a second set of lattice threads are least partially crossing over the first set; and a plurality of Raschal threads securing the lattice threads of at least one of the first asn second sets to the fleece member; and a plurality of openings formed on the fleece member, wherein the fleece member is coated with a bonding substance that enhances bonding to bitumen and permits air to pass through the plurality of openings. 10. The lattice according to claim 9, wherein the fleece member and the threads are provided with an adhesive coating that enhances bonding to bitumen. 11. The lattice according to claim 10, wherein the openings extend through the adhesive coating. 12. The lattice according to claim 9, wherein the fleece member has a weight of between 10 and 50 g/m3. 13. The lattice according to claim 10, wherein the adhesive coating is activated by heat. 14. The lattice according to claim 9, wherein at least one of the sets of lattice threads is made of a material that enhances bonding to bitumen. 15. The lattice according to claim 14, wherein the material bitumen is selected from the group consisting of polymerisate fibers and polycondesante fibers. 16. The lattice according to claim 9, wherein the fleece member having the openings is permeable to air. 17. A wide-meshed, textile lattice to provide reinforcement for bitumen-bonded layers, in particular of a road surfacing, which comprises two sets of parallel, load-bearing threads, wherein one set of threads extends in a longitudinal direction of the lattice and the other set of threads extends transversely to the longitudinal direction of the lattice and the threads are of glass fibers or, and wherein the lattice is coated with a bonding substance to bitumen or the crossing threads are made from material with an affinity for bitumen, and wherein the crossing threads are raschel-locked onto a fleece, that has a weight of 10 to 100 g/m2,wherein the fleece is treated and coated with the bonding substance that enhances bonding bitumen, wherein the fleece has openings in the bonding substance in order to be permeable to air. 18. A wide-meshed, textile lattice to provide reinforcement for bitumen-bonded layers, which comprises two sets of parallel, load-bearing threads, wherein one set of threads extends in the longitudinal direction of the lattice and the other set of threads extends transversely to the longitudinal direction of the lattice and the threads are of glass fibres or synthetic fibres, and wherein the lattice is coated with a bonding substance having an affinity to bitumen or the crossing threads are made from material that enhances bonding to bitumen, and wherein the crossing threads are raschel-locked onto a fleece, and wherein a thin fleece with a weight of 10 to 50 g/m2is used, which provides firm keying action between coarse grains of a surfacing mixture laid on top of the lattice and coarse grains of a surfacing mixture underneath the lattice. 98). DuPont Brochure for Lycra.RTM. XA.RTM. CDXA Technology--Cross Directional Stretch Product, (Apr. 1998). "Instruction Manual for Handle-O-Meter" Model No. 211-300, Serial No. 46493, Thwing-Albert Instrument Company, TWX 710-670-1763. "Standard Test Method for Tensile Strength and Elongation of Pressure-Sensitive Tapes", Designation: D 3759/D 3759M-96, pp. 439-444. "Standard Test Method for Tensile Strength and Elongation of Pressure-Sensitive Tapes", Designation: D 3759-83, pp. 662-671. "Standard Test Method for Tensile Strength and Elongation of Pressure-Sensitive Tapes", Designation: D 3759-96, pp. 463-468. "Standard Test Method for Stiffness of Nonwoven Fabrics Using the Cantilever Test", Standard Test: IST 90.1 (95), pp. 77-78. "Standard Test Method for Stiffness of Nonwoven Fabrics Using the Gurley Tester", Standard Test: IST 90.2, (95), pp. 79-80. "Standard Test Method for Handle-O-Meter Stiffness of Nonwoven Fabrics", Standard Test: IST 90.3 (95), pp. 81 82. "Composite Beathable Membranes", Joel Martz, Laivan Corporation, Nonwoven Industry, Apr. 1998, pp. 92 & 93. "Superfine Thermoplastic Fibers", Industrial Engineering Chemistry, Wente, Van A., vol. 48, pp. 1342, et seq. Report No. 4364 of the Navel Research Laboratories, published May 25, 1954, entitled "Manufacture of Superfine Organic Fibers", Wente Van A., Boone C.D., and Fluharty, E.L.
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