초록

A coil for inductively coupling RF energy to a plasma in a substrate processing chamber has adjacent spaced and overlapping ends to improve uniformity of processing of the substrate.

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A coil for inductively coupling RF energy to a plasma in a substrate processing chamber has adjacent spaced and overlapping ends to improve uniformity of processing of the substrate. ond coupler includes spaced bushings on opposite sides of the circumferential groove and the rearward clamp of the dr

A coil for inductively coupling RF energy to a plasma in a substrate processing chamber has adjacent spaced and overlapping ends to improve uniformity of processing of the substrate. ond coupler includes spaced bushings on opposite sides of the circumferential groove and the rearward clamp of the drive mechanism includes an opening which receives the circumferential groove of the second coupler therein when the drive mechanism is pivoted to engage the second coupler. 14. The surgical instrument of claim 2 in which the handle assembly further includes a stationary trigger spaced from the movable trigger. 15. The surgical instrument of claim 14 in which the stationary trigger is disposed forward of the movable trigger. 16. The surgical instrument of claim 1 in which the switching mechanism includes at least a first button. 17. The surgical instrument of claim 16 in which the switching mechanism further includes a rocking member pivotable between a first position which urges the drive mechanism to engage the first actuator and a second position which urges the drive mechanism to engage the second actuator. 18. The surgical instrument of claim 17 in which the rocking member includes a first locking member which engages the first actuator when the drive mechanism is engaged with the second actuator and a second locking member which engages the second actuator when the drive mechanism is engage with the first actuator. 19. The surgical instrument of claim 17 in which the rocking member includes an arm and the switching mechanism further includes a first spring disposed between the first button and the arm of the rocking member to urge the arm in a first direction when the first button is depressed. 20. The surgical instrument of claim 19 in which the first button includes a pawl oriented to drive the arm of the rocking member in a second direction when the first button moves from a depressed position to an outward position. 21. The surgical instrument of claim 20 in which the switching mechanism further includes a second spring which biases the first button in the outward position to urge the arm of the rocking member in the second direction when the first button is released. 22. The surgical instrument of claim 21 in which the switching mechanism further includes a catch which holds the first button in the depressed position and a second button which, when depressed, releases the catch and the first button. 23. The surgical instrument of claim 22 in which the second button is biased outward. 24. The surgical instrument of claim 1 in which the switching mechanism further includes a lock-out subsystem configured to engage the first actuator when the drive mechanism engages the second actuator and to engage the second actuator when the drive mechanism engages the first actuator. 25. The surgical instrument of claim 1 further including a voltage supply lead electrically connected to one of the first and second movable members for coagulating tissue. 26. The surgical instrument of claim 25 in which there is a voltage supply lead attached to the first actuator and insulation surrounding the first actuator. 27. The surgical instrument of claim 26 in which there is a second voltage supply lead attached to the second actuator. 28. The surgical instrument of claim 1 in which the switching mechanism includes: a pivotable rocker assembly including a depending arm and forward and rearward shelves which alternately engage the drive mechanism; and an actuator coupled to the depending arm of the rocker assembly. 29. The surgical instrument of claim 28 in which the actuator is a button including a spring which is disposed to push on the arm of the rocker assembly when the button is depressed, the button further including a pawl biased to pull the arm of the rocker assembly when the button is released. 30. The surgical instrument of claim 28 in which the pivotable rocker assembly further includes forward and rearward stops disposed to engage whichever actuator is not engaged by the drive mechanism. 31. A multi-function laparoscopic instrument comprising: an end effector assembly including at least first and second movab le jaws; a first actuator coupled to the first movable jaw; a second actuator coupled to the second movable jaw; a drive mechanism engageable with the first and second actuators; and switching means having a first position which orients the drive mechanism to engage the first actuator and a second position which orients the drive mechanism to engage the second actuator for alternatively operating the first and second movable jaws. 32. The laparoscopic instrument of claim 31 in which the first and second movable jaws have a neutral position and the switching means is configured to force the drive mechanism to engage the first or second actuator only when the movable jaws are in the neutral position. 33. The laparoscopic instrument of claim 31 in which the drive mechanism is pivotable forward to engage the first actuator and pivotable rearward to engage the second actuator, and in which the switching means includes a rocker member pivotable in one direction to urge the drive mechanism to pivot forward and pivotable in another direction to urge the drive mechanism to pivot rearward. 34. The laparoscopic instrument of claim 33 in which the rocker member includes an arm and the switching means further includes a first button and a compliant member between the first button and the arm to bias the arm of the rocker in a first direction independent of the position of the drive mechanism when the first button is depressed. 35. The laparoscopic instrument of claim 34 in which the switching means further includes a pawl attached to the first button and a second compliant member disposed to bias the arm of the rocker in a second direction independent of the position of the drive mechanism when the first button is released. 36. A switchable actuator assembly comprising: a first actuator; a second actuator; a forward coupler attached to the proximal end of the first actuator and having a passage which receives the second actuator therethrough; a rearward coupler on the proximal end of the second actuator; a pivotable drive mechanism disposed over the forward and rearward couplers; and a switching mechanism engageable with the pivotable drive mechanism for pivoting the drive mechanism rearward to engage the rearward coupler and forward to engage the forward coupler, the switching mechanism including a rocker member pivotable in a first direction to urge the drive mechanism to pivot rearward and pivotable in a second direction to urge the drive mechanism to pivot forward, the switching mechanism further including an actuator compliantly coupled to the rocking member and operable independent of the position of the first and second actuators. 37. The assembly of claim 36 in which the rocker member includes a forward shelf which urges the drive mechanism to pivot rearward and a rearward shelf which urges the drive mechanism to pivot forward. 38. The assembly of claim 37 in which the rocker member includes a forward locking member which holds the forward coupler stationary when the drive mechanism is engaged with the rearward coupler and a rearward locking member which holds the rearward coupler stationary when the drive mechanism is engaged with the forward coupler. 39. The assembly of claim 38 in which the rocker member includes an arm. 40. The assembly of claim 39 further including a first spring extending between the first actuator and the arm to urge the arm rearward when the actuator is in a first position. 41. The assembly of claim 39 in which the actuator further includes a pawl which urges the arm forward when the actuator is in a second position. 42. The assembly of claim 41 further including a second spring which biases the actuator in the second position. 43. The assembly of claim 40 in which the actuator is a first button and the first position is depressed. 44. The assembly of claim 41 in which the actuator is a first button and the second position is released. 45. The assembly of claim 43 in which the switching mech