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A pump and methods for compressing a fluid are provided that comprise a pump head comprising a flexible metal diaphragm attached to a rigid compression chamber. Fluid compression is provided within the rigid compression chamber when the flexible diaphragm is mechanically oscillated back and forth by

A pump and methods for compressing a fluid are provided that comprise a pump head comprising a flexible metal diaphragm attached to a rigid compression chamber. Fluid compression is provided within the rigid compression chamber when the flexible diaphragm is mechanically oscillated back and forth by a linear motor operated at a drive frequency that is at or below the mechanical resonance of the moving parts, mechanical springs and gas springs. Tuned ports and valves allow low-pressure fluid to enter and high-pressure fluid to exit the compression chamber in response to the cyclic compressions. The linear resonance pump provides high frequency operation, small diaphragm displacements, and high compression ratios for gases.

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A pump and methods for compressing a fluid are provided that comprise a pump head comprising a flexible metal diaphragm attached to a rigid compression chamber. Fluid compression is provided within the rigid compression chamber when the flexible diaphragm is mechanically oscillated back and forth by

A pump and methods for compressing a fluid are provided that comprise a pump head comprising a flexible metal diaphragm attached to a rigid compression chamber. Fluid compression is provided within the rigid compression chamber when the flexible diaphragm is mechanically oscillated back and forth by a linear motor operated at a drive frequency that is at or below the mechanical resonance of the moving parts, mechanical springs and gas springs. Tuned ports and valves allow low-pressure fluid to enter and high-pressure fluid to exit the compression chamber in response to the cyclic compressions. The linear resonance pump provides high frequency operation, small diaphragm displacements, and high compression ratios for gases. ectively at portions of the wire adjacent to the lamp unit so that the bent portions are engaged respectively with predetermined positioning projections formed on a fastening stand for positioning the wire to a wire connection portion of the wire connection terminal. moving the water solution from the chamber via the drain; introducing a hexane solution into the bath chamber concurrently with removing the water solution so that the substrate is immersed in liquid at substantially all times, wherein the hexane solution facilitates a subsequent drying process; and removing the hexane solution via the drain in order to dry the substrate. 16. The method of claim 15, wherein the developer solution is removed at a rate about equal to the rate the water flows into the bath chamber. 17. The method of claim 15, wherein the water solution is more dense than the hexane solution thereby allowing the water solution to settle in a bottom portion of the bath chamber. 18. The method of claim 15, wherein the hexane solution substantially covers the substrate surface. 19. The method of claim 15, wherein the first rinsing solution is removed at a rate about equal to the rate the hexane solution flows into the bath chamber. 20. An apparatus for rinsing a substrate during development to mitigate pattern collapse comprises: means for providing the substrate having a resist pattern irradiated thereon into a bath chamber; means for exposing the substrate to a developer solution; means for removing the developer solution from the chamber via a drain; means for introducing a first rinsing solution into the bath chamber concurrently with removing the developer solution so that the substrate is immersed in liquid at substantially all times; means for removing the first rinsing solution from the chamber via the drain; means for introducing a hexane solution into the bath chamber concurrently with removing the first rinsing solution so that the substrate is immersed in liquid at substantially all times; and means for removing the hexane solution via the drain in order to dry the substrate. se hole is open on the outer circumferential surface of the eccentric portion. These grease injection holes are arranged so as to be axially separated on both sides from a central portion C of the eccentric portion by L/4 when L is an length of the eccentric portion. nd pressure source to apply a second pressure to the pressure chamber. 6. The calorimeter of claim 1, further comprising a heat monitoring system that determines differences between the amount of heat absorbed or released by the sample cell and by the reference cell. 7. The calorimeter of claim 6, wherein the heat monitoring system comprises a temperature sensor that monitors a temperature differential between the sample cell and the reference cell. 8. The calorimeter of claim 7, wherein the temperature sensor monitors the temperature differential that arises in response to a change in the pressure applied by the pressure system. 9. The calorimeter of claim 1, wherein the sample cell comprises a vessel shaped to contain a liquid. 10. The calorimeter of claim 9, wherein the pressure system applies the variable pressure to a liquid holding portion of the sample cell. 11. The calorimeter of claim 9, wherein the reference cell also comprises a vessel shaped to contain a liquid, and the sample cell vessel and the reference cell vessel are substantially identical in mass and volume. 12. The calorimeter of claim 11, wherein the reference cell vessel contains a liquid, and the sample cell contains a solution comprising the liquid and a test substance. 13. The calorimeter of claim 12, wherein the test substance comprises a biopolymer. 14. The calorimeter of claim 1, further comprising an electrical control system electrically coupled to the pressure controller. 15. The calorimeter of claim 14, wherein the electrical control system comprises a computer program disposed on a computer-readable medium, for automating operation of the microcalorimeter, the computer program including instructions for causing a processor to cause the pressure controller to periodically change the pressure applied by the pressure system. 16. The calorimeter of claim 14, further comprising a heating assembly thermally coupled to the sample and reference cells and electrically coupled to the control system. 17. The calorimeter of claim 16, wherein the electrical control system comprises a computer program, disposed on a computer-readable medium, for automating operation of the microcalorimeter, the computer program including instructions for causing a processor to: cause the heating assembly to change the temperature of the sample and reference cells at a rate specified by a user; and cause the pressure controller to periodically change the pressure applied by the pressure system. 18. The calorimeter of claim 17, further comprising a temperature sensor that monitors a temperature differential between the sample cell and the reference cell, wherein the electrical control system is electrically coupled to the temperature sensor, and the computer program further includes instructions for causing the processor to store in a computer readable memory information sufficient to determine temperature differentials between the sample and reference cells that arise in response to each change in the pressure applied by the pressure system. 19. The calorimeter of claim 18, wherein the information sufficient to determine temperature differentials is selected from the group consisting of actual temperature differentials between the sample and reference cells, and differential power applied to the sample cell versus the reference cell in order to maintain the-sample and reference cells at substantially equal temperatures. 20. A calorimeter comprising: a sample cell; a reference cell; and a pressure system in continuous communication with both the sample cell and the reference cell, the pressure system being configured to apply a pressure to both the sample cell and the reference cell, said pressure system comprising a pressure controller that is configured to vary over a predetermined range the pressure applied by the pressure system to both the sample cell and the reference cell. 21. The calorimeter of claim 20, further comprising a heat monitoring system that det ermines the differential heat effect between the sample cell and the reference cell in response to a change in the pressure applied by the pressure system. 22. A method of performing calorimetry comprising: providing a calorimeter comprising a reference cell and a sample cell, the reference cell containing a liquid, and the sample cell containing a solution comprising the liquid and a test substance; changing the pressure above the solution in the sample cell and above the liquid in the reference cell; and determining a differential heat effect between the sample cell and the reference cell in response to the change in the pressure applied by the pressure system. 23. The method of claim 22, wherein the changing of the pressure includes applying a pressure perturbation to both the sample cell and the reference cell. 24. The method of claim 22, wherein the determining a differential heat effect includes measuring a difference between the temperature of the sample cell and the temperature of the reference cell. st one light source is located outside said room. 3. An illumination system according to claim 1 comprising at least two light sources emitting light with differing spectral distributions, wherein said means for controlling the color rendering index of the light output comprises means for controlling the relative amounts of light from said at least two lighting sources reaching said at least one lighting head. 4. An illumination system according to claim 3 wherein said at least two light sources comprise an incandescent source, having an output extending across the visible spectrum, and a light emitting diode source having its maximum emission in the red portion of the visible spectrum. 5. An illumination system according to claim 1 further including means for controlling the intensity of the light output from said at least one lighting head. 6. An illumination system according to claim 5 wherein said means for controlling the intensity of the light output comprises at least one variable aperture. 7. An illumination system according to claim 3 further comprising means for mixing and homogenizing the output from said at least two light sources to produce a substantially uniform light output. 8. An illumination system according to claim 7 wherein said means for mixing and homogenizing comprises a multi-mode light pipe of polygonal cross-section. 9. An illumination system according to claim 7 further comprising at least one variable aperture arranged to control said substantially uniform light output from said mixing and homogenizing means. 10. An illumination system arranged to mix the output from two separate light sources, said system comprising: first and second light sources; a first fiber bundle having an input end arranged to receive light emitted by the first light source; a second fiber bundle having an input end arranged to receive light emitted by the second light source wherein the output ends of the fibers forming the first and second fiber bundles form a single fiber bundle arranged to transmit light from both the first and second light sources; and an optical homogenizer having an input end arranged to receive light from said single fiber bundle and an output end which delivers a substantially uniform light output. 11. An illumination system according to claim 10 wherein said first and second light sources have different spectral distributions. 12. An illumination system according to claim 11 wherein the first and second light sources comprise an incandescent source, having an output extending across the visible spectrum, and a light emitting diode source having its maximum emission in the red portion of the visible spectrum. 13. An illumination system according to claim 10 wherein the output ends of the fibers forming the first and second fiber bundles are substantially intermingled in the single fiber bundle, whereby partial homogenization of the light from the first and second light sources is effected before the light enters the optical homogenizer. 14. An illumination system according to claim 10 wherein the optical homogenizer comprises a multi-mode light pipe. 15. An illumination system according to claim 14 wherein the multi-mode light pipe is of circular cross-section. 16. An illumination system according to claim 14 wherein the multi-mode light pipe is of polygonal cross-section. 17. An illumination system according to claim 10 further comprising sampling means for sampling the light output produced by the optical homogenizer. 18. An illumination system according to claim 17 wherein said first and second light sources have different spectral distributions and wherein said sampling means comprises a first sampling device which samples the entire light output of the optical homogenizer and a second sampling device arranged to be more sensitive to one of the first and second light sources than to the other. 19. An illumination system according to claim 10 further comprising control means for control