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A vacuum bearing structure comprises a combination of a planar gas bearing with a differentially-pumped vacuum seal. The bearing surface and the vacuum seal surfaces are formed of a porous material divided into a first outer region through which bearing gas can percolate to provide support and an in

A vacuum bearing structure comprises a combination of a planar gas bearing with a differentially-pumped vacuum seal. The bearing surface and the vacuum seal surfaces are formed of a porous material divided into a first outer region through which bearing gas can percolate to provide support and an inner second region providing the vacuum seal. An exhaust groove separates the two regions so that bearing gas can flow to atmosphere. The resulting structure can operate at a lower fly height to reduce loading on the differentially-pumped vacuum seal. The structure is particularly useful for motion feedthroughs into vacuum processes such as ion implantation.

대표청구항 ▼

A vacuum bearing structure comprises a combination of a planar gas bearing with a differentially-pumped vacuum seal. The bearing surface and the vacuum seal surfaces are formed of a porous material divided into a first outer region through which bearing gas can percolate to provide support and an in

A vacuum bearing structure comprises a combination of a planar gas bearing with a differentially-pumped vacuum seal. The bearing surface and the vacuum seal surfaces are formed of a porous material divided into a first outer region through which bearing gas can percolate to provide support and an inner second region providing the vacuum seal. An exhaust groove separates the two regions so that bearing gas can flow to atmosphere. The resulting structure can operate at a lower fly height to reduce loading on the differentially-pumped vacuum seal. The structure is particularly useful for motion feedthroughs into vacuum processes such as ion implantation. al. "Reproductive and Developmental Toxicity Studies Of (±)-9-fluoro-6,7-dihydro-8- . . . Administration" Iyakuhin Kenkyu vol. 21, No. 4 (1990) pp. 647-662. Abstract: Matsuzawa, A. et al. "Reproductive and Developmental Toxicity Studies Of (±)-9-fluoro- . . . Administration" Iyakuhin Kenkyu vol. 21, No. 4 (1990) pp. 663-670. Abstract: Hashimoto, K. et al. "Acute Toxicity Study of the Synthetic Antibacterial Topical Agent (±)-9-fluoro-6,7- . . . Acid (OPC-7251)" Iyakuhin Kenkyu vol. 21, No. 4 (1990) pp. 670-677. Abstract: Furukawa, M. et al. "Primary Skin Irritation, Four-Week Cumulative Skin Irritation, . . . 1% OPC-7251 Cream" Iyakuhin Kenkyu vol. 21, No. 5 (1990) pp. 989-997. Abstract: Kojima, K. et al. "Thirteen-Week Subcutaneous Toxicity and Four-Week Recover Tests . . . (OPC-7251) in Rats" Iyakuhin Kenkyu vol. 21, No. 5 (1990) pp. 1034-1052. Abstract: Nakagiri, N. et al. "Contact Sensitivity, Photocontact Sensitivity And Antigenicity Tests . . . Antibacterial Agent" Iyakuhin Kenkyu vol. 21, No. 6 (1990) pp. 1144-1155. Abstract: Aoki, M. et al. "Thirteen-Week Percutaneous Toxicity And Four-Week Recovery Tests . . . (OPC-7251) in Dogs" Iyakuhin Kenkyu vol. 21, No. 6 (1990) pp. 1177-1202. Abstract: Matsuzawa, A. et al. "Reproductive And Developmental Toxicity Studies of . . . Administration" Iyakuhin Kenkyu vol. 22, No. 1 (1990) pp. 61-76. Abstract: Kurokawa, I. et al. "Clinical And Bacteriologic Evaluation of OPC-7251 in Patients With Acne: . . . Cream Base" J. Am. Acad. Dermatol. vol. 25, No. 4 (1991) pp 674-681. Abstract: Bojar, R. A. et al. "Analysis of Resistance In The Cutaneous Microflora During Treatment Of Acne- . . . Erythromycin" J. of Investigative Dermatology vol. 103, No