초록 ▼

The present invention provides an apparatus for etching a substrate, comprising: a container; a substrate support disposed in the container; a rotation actuator attached to the substrate support; and a fluid delivery assembly disposed in the container to deliver an etchant to a peripheral portion of

The present invention provides an apparatus for etching a substrate, comprising: a container; a substrate support disposed in the container; a rotation actuator attached to the substrate support; and a fluid delivery assembly disposed in the container to deliver an etchant to a peripheral portion of a substrate disposed on the substrate support. Preferably, the substrate support comprises a vacuum chuck and the fluid delivery assembly comprises one or more nozzles. The invention also provide a method for etching a substrate, comprising: rotating a substrate positioned on a rotatable substrate support; and delivering an etchant to a peripheral portion of the substrate. Preferably, the substrate is rotated at between about 100 rpm and about 1000 rpm, and the etchant is delivered in a direction that is substantially tangent to the peripheral portion of the substrate at an incident angle between about 0 degrees and about 45 degrees from a surface of substrate.

대표청구항 ▼

The present invention provides an apparatus for etching a substrate, comprising: a container; a substrate support disposed in the container; a rotation actuator attached to the substrate support; and a fluid delivery assembly disposed in the container to deliver an etchant to a peripheral portion of

The present invention provides an apparatus for etching a substrate, comprising: a container; a substrate support disposed in the container; a rotation actuator attached to the substrate support; and a fluid delivery assembly disposed in the container to deliver an etchant to a peripheral portion of a substrate disposed on the substrate support. Preferably, the substrate support comprises a vacuum chuck and the fluid delivery assembly comprises one or more nozzles. The invention also provide a method for etching a substrate, comprising: rotating a substrate positioned on a rotatable substrate support; and delivering an etchant to a peripheral portion of the substrate. Preferably, the substrate is rotated at between about 100 rpm and about 1000 rpm, and the etchant is delivered in a direction that is substantially tangent to the peripheral portion of the substrate at an incident angle between about 0 degrees and about 45 degrees from a surface of substrate. unication with the interface outlet and with the breathing control connector of the plug, serves to exhaust exhaled pressurized gas from the patient airway when open and retaining pressurized gas in the patient airway when closed, in response to open and close signals communicated by the automatic ventilator via the breathing control connector of the plug. and wherein said cam base includes an array of indicia on said cam base for selective incremental registry with a perimeter portion of said module at plural incremental positions of said module on said cam base, and means for selectively securing said module to said cam base at each of said incremental positions. 22. The bow set forth in claim 21 comprising a plurality of said modules adjustably replaceable on said cam base for adjusting draw length of said bow, and wherein said modules are constructed such that said array of indicia on said cam base selectively incrementally registers with a perimeter portion of each said module at plural incremental positions of each said module on said cam base. 23. The bow set forth in claim 17 further comprising an axle rotatably mounting said power cam to said end of said other limb, wherein said axle is affixed to said power cam and said other bow limb includes bearing means rotatably mounting said axle to said other limb. 24. The bow set forth in claim 17 wherein said control wheel has an axis of rotation on said one limb, and wherein said control wheel has a control groove for receiving said control cable segment and a bowstring let-out groove for receiving said bowstring cable segment, both of said grooves on said control wheel being circular, concentric with said axis and of differing radii from said axis. 25. The bow set forth in claim 17 wherein said control wheel has an axis of rotation on said one limb and a single peripheral groove that is circular and concentr