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An apparatus for liquid delivery of a chemical vapour deposition CVD installation comprises an inlet head equipped with at least one injector having an inlet for delivery of liquid precursors or precursors in solution. A vector gas injection circuit is rendered active simultaneously with injection o

An apparatus for liquid delivery of a chemical vapour deposition CVD installation comprises an inlet head equipped with at least one injector having an inlet for delivery of liquid precursors or precursors in solution. A vector gas injection circuit is rendered active simultaneously with injection of the liquid, the vector gas being directed to the vicinity of the injector after being heated. Each injector is cooled individually by water or coolant flow. The evaporation chamber comprises heating resistances for the change of liquid/vapor state of the precursors, and deviation means arranged so that the distance covered by the droplets and vapours of the precursors is greater than the distance in a straight line between the nozzle of the injector and the outlet tube.

대표청구항 ▼

An apparatus for liquid delivery of a chemical vapour deposition CVD installation comprises an inlet head equipped with at least one injector having an inlet for delivery of liquid precursors or precursors in solution. A vector gas injection circuit is rendered active simultaneously with injection o

An apparatus for liquid delivery of a chemical vapour deposition CVD installation comprises an inlet head equipped with at least one injector having an inlet for delivery of liquid precursors or precursors in solution. A vector gas injection circuit is rendered active simultaneously with injection of the liquid, the vector gas being directed to the vicinity of the injector after being heated. Each injector is cooled individually by water or coolant flow. The evaporation chamber comprises heating resistances for the change of liquid/vapor state of the precursors, and deviation means arranged so that the distance covered by the droplets and vapours of the precursors is greater than the distance in a straight line between the nozzle of the injector and the outlet tube. r roller. 5. The apparatus of claim 2 wherein one of the supports is a transfer roll, the apparatus including a manifold for supplying laminate to the applicator roll, wherein each roller coater further includes: at least one applicator head having an inlet connected to the manifold for receiving laminate, a longitudinal outlet, and a recessed surface closely receiving the outer peripheral surface of the transfer roll, the inlet communicating laminate to the outlet for application of laminate to the transfer roll, the longitudinal outlet being defined in the recessed surface and extending substantially across the axial length of the transfer roll for applying laminate to the transfer roll, wherein the transfer roll contacts the applicator roll along a laminate transfer line parallel with the predetermined axis for application of laminate to the applicator roll. 6. The apparatus of claim 5, further comprising: a control valve having a pressurized input of laminate and at least two different positions corresponding to different output flows; a manifold connecting the output flow of the control valve to the at least one head; and means for modulating the valve between the at least two different positions to set an application rate of the controlled amount of laminate, the modulating means being controllable to change the application rate. 7. The apparatus of claim 2 wherein the laminate is a lubrication suitable for lubrication of a press machine, the apparatus being situated upstream of the press machine lubricating the metal strip prior to reaching the press machine. 8. An apparatus for coating metal strip with laminate, the metal strip adapted to be fed through the apparatus, comprising: a support frame; top and bottom roller coaters carried on the support frame, adapted to pinch the metal strip therebetween in an engaged position, each of the roller coaters including: an applicator roll contacting the metal strip at a first contact point while in the engaged position, the applicator roll adapted to receive and apply laminate, the applicator roll adapted to driven about a predetermined axis of rotation by the metal strip while in the engaged position; a pair of supports engaging the applicator roll in the engaged position at second and third contact points, the first, second and third contact points being located at different angular positions about the predetermined axis to carry the applicator roll therebetween; and top and bottom support carriages for the top and bottom roller coaters, the support rolls being secured to the carriages, the applicator rolls not being physically connected to the respective top and bottom support carriages. 9. The apparatus of claim 8, further comprising: at least one top and at least one bottom pneumatic cylinders supported by the support frame and connected to the top and bottom carriages, respectively, each pneumatic cylinder including a housing defining a control chamber and a piston actuator slidably disposed in the control chamber dividing the control chamber into upper and lower pressure compartments; a first conduit fluidically connecting the upper and lower compartments of the top and bottom cylinders, respectively; a second conduit fluidically connecting the lower and upper compartments of the top and bottom cylinders, respectively; and a pneumatic control having a pressurized input, the pneumatic control being operatively connected to the to top and bottom cylinders being operable to selectively move the roller coaters towards or away from each other, the top and bottom carriages being movable both upwards and downwards in unison via pneumatic flow through the first and second conduits when the pneumatic control is not operating the cylinders. 10. An apparatus for coating metal strip with laminate, the metal strip adapted to be fed through the apparatus, comprising: a support frame; top and bottom roller coaters carried on the support frame, adapted