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Hollow cathode array for plasma generation 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01J-007/24
출원번호 US-0856753 (2001-05-21)
국제출원번호 PCT/US99/28841 (1999-12-06)
국제공개번호 WO00/34979 (2000-06-15)
발명자 / 주소
  • Chen, Jyh-Hong Eric
  • Lin, Tyau-Jeen
출원인 / 주소
  • E. I. du Pont de Nemours and Company
인용정보 피인용 횟수 : 36  인용 특허 : 8

초록 ▼

A cathode assembly is described for use in the creation of a discharge plasma. The cathode comprises a plurality of electrically conductive hollow plasma generating cells in a cylindrically-shaped array, the cells being electrically connected to each other. The plasma generated can be used to modify

대표청구항 ▼

A cathode assembly is described for use in the creation of a discharge plasma. The cathode comprises a plurality of electrically conductive hollow plasma generating cells in a cylindrically-shaped array, the cells being electrically connected to each other. The plasma generated can be used to modify

이 특허에 인용된 특허 (8)

  1. Nagashima Kazufumi,JPX ; Shima Hideaki,JPX, Apparatus for and method of manufacturing plastic container coated with carbon film.
    상세보기
  2. Brown Robert W. (Ivanhoe AUX) Coopes Ian H. (Camberwell AUX) Fusca Joseph (Macleod West AUX) Gifkins Kenneth J. (Victoria AUX) Irvin John A. (Applecross AUX), Apparatus for plasma treatment of continuous material.
    상세보기
  3. Schoenbach Karl H. (Norfolk VA) Byszewski Wojciech W. (Boston MA) Peterkin Frank E. (Norfolk VA) Dharamsi Amin N. (Virginia Beach VA), Discharge device having cathode with micro hollow array.
    상세보기
  4. Jansen Frank (Walnut Creek CA) Krommenhoek Steven K. (Madison NJ) Belkind Abraham I. (North Plainfield NJ) Orban ; Jr. Zoltan (Franklin Park NJ), Hollow cathode array and method of cleaning sheet stock therewith.
    상세보기
  5. Bumble Bruce (Croton-on-Hudson NY) Cuomo Jerome J. (Lake Lincolndale NY) Logan Joseph S. (Poughkeepsie NY) Rossnagel Steven M. (White Plains NY), Hollow cathode enhanced plasma for high rate reactive ion etching and deposition.
    상세보기
  6. Gorin Georges J. (Emeryville CA) Hoog Josef T. (Novato CA), Plasma reactor apparatus.
    상세보기
  7. Mackowski Jean M. (Villeurbanne FRX), Process for depositing a thin layer of a material on the wall of a hollow body.
    상세보기
  8. Mundt Randall S. ; Kerr David R. ; Lenz Eric Howard, Topology induced plasma enhancement for etched uniformity improvement.
    상세보기

이 특허를 인용한 특허 (36)

  1. Hudson, Eric; Fischer, Andreas, Apparatuses, systems and methods for rapid cleaning of plasma confinement rings with minimal erosion of other chamber parts.
    상세보기
  2. Hudson, Eric; Fischer, Andreas, Apparatuses, systems and methods for rapid cleaning of plasma confinement rings with minimal erosion of other chamber parts.
    상세보기
  3. DeVries, Hindrik Willem; Bouwstra, Jan Bastiaan; Aldea, Eugen; Van De Sanden, Mauritius Cornelius Maria, Arrangement, method and electrode for generating a plasma.
    상세보기
  4. Rueger, Neal; Kramer, Stephen J., Assemblies for plasma-enhanced treatment of substrates.
    상세보기
  5. Suslov, Nikolay, Cathode assembly and method for pulsed plasma generation.
    상세보기
  6. Bainbridge, David W., Composite materials made from pretreated, adhesive coated beads.
    상세보기
  7. Denpoh, Kazuki; Ventzek, Peter L G; Xu, Lin; Chen, Lee, Hollow cathode device and method for using the device to control the uniformity of a plasma process.
    상세보기
  8. Denpoh, Kazuki; Ventzek, Peter L G; Xu, Lin; Chen, Lee, Hollow cathode device and method for using the device to control the uniformity of a plasma process.
    상세보기
  9. Chambers, John; Maschwitz, Peter, Hollow cathode ion source.
    상세보기
  10. Chambers, John; Maschwitz, Peter, Method of producing plasma by multiple-phase alternating or pulsed electrical current.
    상세보기
  11. Rueger, Neal R.; Kramer, Stephen J., Methods of forming plasma-generating structures; methods of plasma-assisted etching, and methods of plasma-assisted deposition.
    상세보기
  12. Suslov, Nikolay, Methods of sealing vessels using plasma.
    상세보기
  13. Sawyer,Daniel C.; Bowman,Lewis A.; Colonna,Renald W; Comperatore,Corey D, Multi-layered sports playing field with a water draining, padding layer.
    상세보기
  14. Chambers, John; Maschwitz, Peter, Plasma device driven by multiple-phase alternating or pulsed electrical current.
    상세보기
  15. Koshimizu, Chishio; Denpoh, Kazuki, Plasma processing apparatus having hollow electrode on periphery and plasma control method.
    상세보기
  16. Maschwitz, Peter, Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition.
    상세보기
  17. Maschwitz, Peter, Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition.
    상세보기
  18. Maschwitz, Peter, Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition.
    상세보기
  19. Maschwitz, Peter, Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition.
    상세보기
  20. Maschwitz, Peter, Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition.
    상세보기
  21. Nam, Sang Ki; Cho, Tae Seung; Godet, Ludovic; Nemani, Srinivas D., Plasma uniformity control by arrays of unit cell plasmas.
    상세보기
  22. Suslov, Nikolay, Plasma-generating device having a plasma chamber.
    상세보기
  23. Suslov, Nikolay, Plasma-generating device having a throttling portion.
    상세보기
  24. Suslov, Nikolay; Rubiner, Igor, Plasma-generating device, plasma surgical device and use of a plasma surgical device.
    상세보기
  25. Suslov, Nikolay; Rubiner, Igor, Plasma-generating device, plasma surgical device and use of a plasma surgical device.
    상세보기
  26. Suslov, Nikolay, Plasma-generating device, plasma surgical device and use of plasma surgical device.
    상세보기
  27. Suslov, Nikolay, Plasma-generating device, plasma surgical device, use of a plasma-generating device and method of generating a plasma.
    상세보기
  28. Rueger, Neal R.; Kramer, Stephen J., Plasma-generating structures and display devices.
    상세보기
  29. Rueger, Neal R.; Kramer, Stephen J., Plasma-generating structures, display devices, and methods of forming plasma-generating structures.
    상세보기
  30. Suslov, Nikolay, Pulsed plasma device and method for generating pulsed plasma.
    상세보기
  31. Suslov, Nikolay, Pulsed plasma device and method for generating pulsed plasma.
    상세보기
  32. Drouin, Jr., Donald V.; Schwimley, Scott Lee, Systems and methods for alleviating aircraft loads with plasma actuators.
    상세보기
  33. Miles, Richard B.; Macheret, Sergey O.; Shneider, Mikhail; Likhanskii, Alexandre; Silkey, Joseph Steven, Systems and methods for controlling flows with electrical pulses.
    상세보기
  34. Silkey, Joseph S.; Smereczniak, Philip, Systems and methods for controlling flows with pulsed discharges.
    상세보기
  35. Silkey, Joseph S.; Smereczniak, Philip, Systems and methods for controlling flows with pulsed discharges.
    상세보기
  36. Suslov, Nikolay, Volumetrically oscillating plasma flows.
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