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The invention relates to a fluid connector for sealing an interface between first and second fluid passages in a plasma processing apparatus. The fluid connector includes a first end member having a first geometry. The first geometry is arranged to substantially seal a first mating region of the fir

The invention relates to a fluid connector for sealing an interface between first and second fluid passages in a plasma processing apparatus. The fluid connector includes a first end member having a first geometry. The first geometry is arranged to substantially seal a first mating region of the first fluid passage. The fluid connector further includes a second end member having a second geometry. The second geometry is arranged to substantially seal a second mating region of the second fluid passage and the second geometry is configured differently than the first geometry. The fluid connector additionally includes an opening that extends through the first end member and the second end member through which a fluid may pass for use by the, semiconductor processing apparatus so as to fluidly couple the first fluid passage to the second fluid passage.

대표청구항 ▼

The invention relates to a fluid connector for sealing an interface between first and second fluid passages in a plasma processing apparatus. The fluid connector includes a first end member having a first geometry. The first geometry is arranged to substantially seal a first mating region of the fir

The invention relates to a fluid connector for sealing an interface between first and second fluid passages in a plasma processing apparatus. The fluid connector includes a first end member having a first geometry. The first geometry is arranged to substantially seal a first mating region of the first fluid passage. The fluid connector further includes a second end member having a second geometry. The second geometry is arranged to substantially seal a second mating region of the second fluid passage and the second geometry is configured differently than the first geometry. The fluid connector additionally includes an opening that extends through the first end member and the second end member through which a fluid may pass for use by the, semiconductor processing apparatus so as to fluidly couple the first fluid passage to the second fluid passage. apparatus comprises: an elastic device for pushing the removable transmission device away from the transmission mechanism so that the transmission mechanism is disconnected. 10. The ADF capable of releasing jammed documents as claimed in claim 9, wherein the transmission mechanism further comprises an adjacent device adjacent to the removable transmission device and the disconnecting apparatus further comprises: a connecting rod having a first end connected to the removable transmission device and a second end connected to the adjacent device so that the removable transmission device can move backwards and forwards. 11. The ADF capable of releasing jammed documents as claimed in claim 9, wherein the removable transmission device is a removable gear. 12. The ADF capable of releasing jammed documents as claimed in claim 11, wherein the removable gear comprises a central hole and a shaft, the central hole is larger than a cross section of the shaft, the shaft of the removable gear is fixed at the ADF and penetrates through the central hole to support the removable gear, and when the removable gear is in the away status, the removable gear is pushed away from the transmission mechanism along the central hole and the transmission mechanism is disconnected by the elastic apparatus. 13. The ADF capable of releasing jammed documents as claimed in claim 11, wherein the ADF comprises a slot for disposing a shaft of the removable gear, and when the removable gear is in the away status, the removable gear is pushed away from the transmission mechanism along the slot and the transmission mechanism is disconnected by the elastic apparatus. 14. The ADF capable of releasing jammed documents as claimed in claim 8, wherein the disconnecting apparatus comprises: an electromagnetic switch, wherein the electromagnetic switch attracts the removable device away from the transmission mechanism to disconnect the transmission mechanism when the removable device is in the away status; and wherein the electromagnetic switch pushes the removable device back to be connected with adjacent devices of the transmission mechanism and to reconnect the transmission mechanism while the removable device is in the working status. ; 2140800, GB; 2169265, GB; 2179260, GB; 2222566, GB; 2223001, GB; 2235627, GB; 2246555, GB; 2247680, GB; 532984, IT; 175993, SE; 29202, TW; 126840, TW; 115096, TW; WO82/003925, WO; WO84/004404, WO; WO90/013327, WO; WO90/013328, WO; WO92/005824, WO