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A resist composition contains a base resin, a photoacid generator, and a solvent. The photoacid generator is a sulfonium salt of formula (1). R1is a monovalent cyclic or bridgedring C3-20,hydrocarbon group, R2is hydroxyl, nitro, halogen, or a straight, branched or cyclic monovalent C1-15hydrocarbon

A resist composition contains a base resin, a photoacid generator, and a solvent. The photoacid generator is a sulfonium salt of formula (1). R1is a monovalent cyclic or bridgedring C3-20,hydrocarbon group, R2is hydroxyl, nitro, halogen, or a straight, branched or cyclic monovalent C1-15hydrocarbon group which may contain O, N, S or halogen atom, K-is a non-nucleophilic counter ion, x is equal to 1 or 2, and y is an integer of 0-3. The resist composition is sensitive to ArF excimer laser light, has good sensitivity and resolution, and forms a thick film which is advantageous in etching.

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A resist composition contains a base resin, a photoacid generator, and a solvent. The photoacid generator is a sulfonium salt of formula (1). R1is a monovalent cyclic or bridgedring C3-20,hydrocarbon group, R2is hydroxyl, nitro, halogen, or a straight, branched or cyclic monovalent C1-15hydrocarbon

A resist composition contains a base resin, a photoacid generator, and a solvent. The photoacid generator is a sulfonium salt of formula (1). R1is a monovalent cyclic or bridgedring C3-20,hydrocarbon group, R2is hydroxyl, nitro, halogen, or a straight, branched or cyclic monovalent C1-15hydrocarbon group which may contain O, N, S or halogen atom, K-is a non-nucleophilic counter ion, x is equal to 1 or 2, and y is an integer of 0-3. The resist composition is sensitive to ArF excimer laser light, has good sensitivity and resolution, and forms a thick film which is advantageous in etching. member is an aluminum mandrel having an outer diameter of 162.5 mm; said compliant layer formed on the core member being made of a polyurethane which has a finished outer diameter of 182 mm, a Young's modulus of 3.5 MPa±1.0 MPa and a Poisson's ratio of 0.49±0.01; and, said stiffening layer being in the form of a 0.005 inch thick seamless nickel belt having an inner diameter of 181.54 mm; said barrier layer being made of a polyamide resin coated on the stiffening layer, the barrier layer having a thickness greater than 1 micrometer; said charge-generatinglayer coated on the barrier layer comprising a 75:25 titanyl phthalocyanine/titanyl fluorophthalocyanine co-crystal dispersion having a thickness in a range 0.5-1.0 micrometer; and said a charge-transport layer coated on the charge-generatinglayer comprising 2 parts by weight of tri-tolylamine, 2 parts by weight of 1,1-bis(4-di-p-tolylaminophenyl) methane, 1 part by weight of poly, and 5 parts by weight of a polycarbonate, the charge-transport layer having a thickness in a range 12-35 micrometers. 5. The roller of claim 1, wherein the sleeve member further comprises: a stiffening layer, said stiffening layer being in the form of a thick seamless nickel belt; a barrier layer coated on the stiffening layer, said barrier layer being made of a polyamide resin coated on the stiffening layer; and a charge-generatinglayer coated on the barrier layer, and a charge transport layer coated on the charge-generatinglayer. 6. The roller of claim 5, further comprising: a charge-transport layer coated on said charge-generatinglayer; and a thin hard wear resistant layer covering said charge-transport layer. 7. The roller of claim 1, wherein said rigid cylindrical core member is an aluminum mandrel and said compliant layer formed on said core is made of a polyurethane. 8. The roller of claim 1, wherein said sleeve member further comprises: an indicia located on an outer surface of the sleeve member; wherein the indicia on said an outer surface of the sleeve member are provided to indicate a parameter relative to the inner sleeve member that can be read, sensed or detected by an indicia detector, either visually, mechanically, optically, magnetically, or by means of a radio frequency. 9. The roller of claim 1, wherein the sleeve member further comprises: a compliant layer formed on said sleeve member; a thin electrode layer coated on the compliant layer; a barrier layer coated on the electrode layer; a charge-generatinglayer coated on the barrier layer; and a charge-transport layer coated on the charge-generatinglayer. 10. The roller of claim 1, wherein the sleeve member further comprises a thin, hard, wear resistant layer covering the charge-transport layer. 11. The roller of claim 1, wherein said compliant layer formed on said core has a protective layer covering the compliant layer. by combining R5with R6,and R7and R10also represent a hydrogen atom, a halogen atom, a substituted or unsubstituted alkyl group, or a substituted or unsubstituted aryl group; and the electrophotographic photosensitive member in every 1 cm2area has an electrostatic capacity (C) of 130 pF or more, wherein the maximum height (RmaxD) of a surface roughness of the support portion, the average roughness (Rz) of 10 points, the arithmetic average roughness (Ra), and the irregularity average interval (Sm) satisfy the following conditions: 1.2 μm≤RmaxD≤5.0 μm, 1.2 μm≤Rz≤3.0 μm, 0.15 μm≤Ra≤0.5 μm, and 30 μm0.3 μm, and 30 μmα. 8. An electrophotographic photosensitive member according to claim 1, wherein said hydroxygallium phthalocyanine is hydroxygallium phthalocyanine having a peak strongly durable against the Bragg angles (2θ±0.2°) of 7.4° and 28.2° in characteristic X-ray diffraction of CuKα. 9. A process cartridge comprising an electrophotographic photosensitive member and at least one of electric charging means, developing means, and cleaning means, all of which are integrally supported together and are attachable to or detachable from an electrophotographic apparatus, said electrophotographic photosensitive member comprising a support portion, a charge generation layer, and a charge transport layer, wherein said charge generation layer contains a phthalocyanine compound; the phthalocyanine compound is selected from the group consisting of oxytitanium phthalocyanine and hydroxygallium phthalocyanine; wherein said charge transport layer has a thickness which is at least 9 μm but not larger than 18 μm,; the charge transport layer contains polyarylate resin having repeated constitutive units represented by the following formula (1): wherein X1represents a carbon atom or a single bond when X1represents a single bond and R5and R6are not present, R1to R4represent a hydrogen atom, a halogen atom, a substituted or unsubstituted alykl group, or a substituted or unsubstituted aryl group, R5and R6represent a hydrogen atom, a halogen atom, a substituted or unsubstituted alkyl group, or a substituted or unsubstituted aryl group, or an alyklidene group formed by combining R5and R6,and R7to R10also represent a hydrogen atom, a halogen atom, a substituted or unsubstituted alykl group, or a substituted or unsubstituted aryl group; and wherein the electrophotographic photosensitive member in every 1 cm2ar