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Apparatus and method for temperature control of IC device during test 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01R-031/02
출원번호 US-0616895 (2000-07-14)
발명자 / 주소
  • DiBattista, Larry
  • Malinoski, Mark
  • Shitara, Tomoya
출원인 / 주소
  • Delta Design, Inc.
대리인 / 주소
    Foley & Lardner
인용정보 피인용 횟수 : 70  인용 특허 : 15

초록 ▼

An apparatus for controlling the temperature, during testing, of IC devices formed on a wafer includes a chuck for locating the devices during testing and multiple temperature control devices arranged on the chuck to correspond with the arrangement of the devices being tested on the wafer. The chuck

대표청구항 ▼

An apparatus for controlling the temperature, during testing, of IC devices formed on a wafer includes a chuck for locating the devices during testing and multiple temperature control devices arranged on the chuck to correspond with the arrangement of the devices being tested on the wafer. The chuck

이 특허에 인용된 특허 (15)

  1. Lipp Robert J. (15881 Rose Ave. Los Gatos CA 95030), Apparatus for heating and controlling temperature in an integrated circuit chip.
    상세보기
  2. Mark F. Malinoski ; Thomas P. Jones ; Brian Annis ; Jonathan E. Turner, Apparatus, method and system of liquid-based, wide range, fast response temperature control of electronic device.
    상세보기
  3. Hashinaga Tatsuya (Yokohama JPX) Nishiguchi Masanori (Yokohama JPX), Burn-in apparatus and method which individually controls the temperature of a plurality of semiconductor devices.
    상세보기
  4. Jones Elmer R. (North Reading MA), Burn-in module.
    상세보기
  5. Fu Deng-Yuan (Sunnyvale CA), Computer-implemented method and system for precise temperature control of a device under test.
    상세보기
  6. Lewis David A. (Carmel NY) Narayan Chandrasekhar (Hopewell Junction NY), Device to monitor and control the temperature of electronic chips to enhance reliability.
    상세보기
  7. Miyata Eiji (Fuchu JPX) Sugiyama Masahiko (Nirasaki JPX) Kohno Masahiko (Yamanashi JPX) Hatta Masataka (Yamanashi JPX), Electric probing-test machine having a cooling system.
    상세보기
  8. Kiyokawa Toshiyuki (Kitakatsushika JPX) Hayama Hisao (Gyoda JPX), IC test equipment.
    상세보기
  9. Taraci Richard (Phoenix AZ) Taraci Brian (Laguna Niguel CA) Gorgenyi Imre (Scottsdale AZ), Method and apparatus for maintaining electrically operating device temperatures.
    상세보기
  10. Kreiger Walter C. (Underhill VT) Wilder Donald L. (South Hero VT), Probe for wafer burn-in test system.
    상세보기
  11. Eager George (Cambridge MA) Selverstone Pater (Cambridge MA), Temperature control for device under test.
    상세보기
  12. Hamilton Harold E., Temperature control for high power burn-in for integrated circuits.
    상세보기
  13. Tustaniwskyj Jerry Ihor ; Babcock James Wittman, Temperature control system for an electronic device which achieves a quick response by interposing a heater between the.
    상세보기
  14. Jones Elmer R. (North Reading MA), Thermal control system for a semi-conductor burn-in.
    상세보기
  15. Kufis James C. (Sunnyvale CA) Semken Robert S. (Sunnyvale CA), Thermal fixture for testing integrated circuits.
    상세보기

이 특허를 인용한 특허 (70)

  1. Reitinger, Klemens, Apparatus for conditioning semiconductor chips and test method using the apparatus.
    상세보기
  2. Di Stefano, Thomas H., Apparatus to control device temperature utilizing multiple thermal paths.
    상세보기
  3. Di Stefano, Thomas H., Apparatus to control device temperature utilizing multiple thermal paths.
    상세보기
  4. Malinoski, Mark F.; Jones, Thomas P.; Annis, Brian; Turner, Jonathan E., Apparatus, method and system of liquid-based, wide range, fast response temperature control of electric devices.
    상세보기
  5. Itakura,Katsuhiro; Natsuhara,Masuhiro; Nakata,Hirohiko, Body for keeping a wafer, heater unit and wafer prober.
    상세보기
  6. Dunklee, John, Chuck for holding a device under test.
    상세보기
  7. Dunklee, John, Chuck for holding a device under test.
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  8. Dunklee, John, Chuck for holding a device under test.
    상세보기
  9. Dunklee,John, Chuck for holding a device under test.
    상세보기
  10. Dunklee,John, Chuck for holding a device under test.
    상세보기
  11. Dunklee,John, Chuck for holding a device under test.
    상세보기
  12. Stewart, Craig; Lord, Anthony; Spencer, Jeff; Burcham, Terry; McCann, Peter; Jones, Rod; Dunklee, John; Lesher, Tim; Newton, David, Chuck for holding a device under test.
    상세보기
  13. Stewart,Craig; Lord,Anthony; Spencer,Jeff; Burcham,Terry; McCann,Peter; Jones,Rod; Dunklee,John; Lesher,Tim; Newton,David, Chuck for holding a device under test.
    상세보기
  14. Andrews, Peter; Froemke, Brad; Dunklee, John, Chuck with integrated wafer support.
    상세보기
  15. Andrews,Peter; Froemke,Brad; Dunklee,John, Chuck with integrated wafer support.
    상세보기
  16. Andrews,Peter; Froemke,Brad; Dunklee,John, Chuck with integrated wafer support.
    상세보기
  17. Ho, Shun-Bon, Device and method for controlling IC temperature.
    상세보기
  18. Kinsley, Tom, Electronic apparatus having IC temperature control.
    상세보기
  19. Kinsley, Tom, Electronic apparatus having IC temperature control.
    상세보기
  20. Dunklee, John; Norgden, Greg; Cowan, C. Eugene, Guarded tub enclosure.
    상세보기
  21. Dunklee,John; Norgden,Greg; Cowan,C. Eugene, Guarded tub enclosure.
    상세보기
  22. Andrews, Peter; Hess, David; New, Robert, Interface for testing semiconductors.
    상세보기
  23. McFadden,Bruce, Localizing a temperature of a device for testing.
    상세보기
  24. Tervo,Paul A.; Smith,Kenneth R.; Cowan,Clarence E.; Dauphinais,Mike P.; Koxxy,Martin J., Membrane probing system.
    상세보기
  25. Di Stefano, Thomas H., Method and apparatus for controlling temperature.
    상세보기
  26. Di Stefano, Peter T.; Di Stefano, Thomas H., Method and apparatus for setting and controlling temperature.
    상세보기
  27. Aube, Francois; Curtin, Timothy M.; Grady, Matthew S.; Scanlon, Thomas P.; Smith, Eric N., Method for monitoring thermal control.
    상세보기
  28. Haji-Sheikh, Michael J.; Biard, James R.; Rabinovich, Simon; Guenter, James K.; Hawkins, Bobby M., Methods of conducting wafer level burn-in of electronic devices.
    상세보기
  29. Harris,Daniel L.; McCann,Peter R., Optical testing device.
    상세보기
  30. Jeserer, Gunther; Varol, Efe, Plunger for holding and moving electrical components.
    상세보기
  31. Schaule, Max; Thiel, Stefan; Pichl, Franz; Jeserer, Günther; Wiesböck, Andreas; Bauer, Alexander, Plunger for holding and moving electronic components in particular ICS.
    상세보기
  32. Kinsley, Tom, Power sink for IC temperature control.
    상세보기
  33. Nordgren, Greg; Dunklee, John, Probe station.
    상세보기
  34. Nordgren, Greg; Dunklee, John, Probe station.
    상세보기
  35. Peters, Ron A.; Hayden, Leonard A.; Hawkins, Jeffrey A.; Dougherty, R. Mark, Probe station having multiple enclosures.
    상세보기
  36. Peters,Ron A.; Hayden,Leonard A.; Hawkins,Jeffrey A.; Dougherty,R. Mark, Probe station having multiple enclosures.
    상세보기
  37. Peters,Ron A.; Hayden,Leonard A.; Hawkins,Jeffrey A.; Dougherty,R. Mark, Probe station having multiple enclosures.
    상세보기
  38. Cowan, Clarence E.; Tervo, Paul A.; Dunklee, John L., Probe station thermal chuck with shielding for capacitive current.
    상세보기
  39. Cowan,Clarence E.; Tervo,Paul A.; Dunklee,John L., Probe station thermal chuck with shielding for capacitive current.
    상세보기
  40. Dunklee,John; Cowan,Clarence E., Probe station with low inductance path.
    상세보기
  41. Dunklee,John; Cowan,Clarence E., Probe station with low inductance path.
    상세보기
  42. Lesher, Timothy; Miller, Brad; Cowan, Clarence E.; Simmons, Michael; Gray, Frank; McDonald, Cynthia L., Probe station with low noise characteristics.
    상세보기
  43. Lesher,Timothy; Miller,Brad; Cowan,Clarence E.; Simmons,Michael; Gray,Frank; McDonald,Cynthia L., Probe station with low noise characteristics.
    상세보기
  44. Navratil,Peter; Froemke,Brad; Stewart,Craig; Lord,Anthony; Spencer,Jeff; Runbaugh,Scott; Fisher,Gavin; McCann,Pete; Jones,Rod, Probe station with two platens.
    상세보기
  45. Lesher, Timothy E., Probe testing structure.
    상세보기
  46. Lesher,Timothy E., Probe testing structure.
    상세보기
  47. Sugiyama,Masahiko; Inoue,Yoshinori, Prober and probe testing method for temperature-controlling object to be tested.
    상세보기
  48. Sugiyama,Masahiko; Inoue,Yoshinori, Prober and probe testing method for temperature-controlling object to be tested.
    상세보기
  49. Haji-Sheikh, Michael J.; Biard, James R.; Guenter, James K.; Hawkins, Bobby M., Providing current control over wafer borne semiconductor devices using overlayer patterns.
    상세보기
  50. Haji-Sheikh, Michael J.; Biard, James R.; Guenter, James K.; Hawkins, Bobby M., Providing current control over wafer borne semiconductor devices using trenches.
    상세보기
  51. Haji-Sheikh, Michael J.; Biard, James R.; Guenter, James K.; Hawkins, Bobby M., Providing photonic control over wafer borne semiconductor devices.
    상세보기
  52. Dunklee,John, Switched suspended conductor and connection.
    상세보기
  53. Dunklee,John, Switched suspended conductor and connection.
    상세보기
  54. Strid,Eric W.; Schappacher,Jerry B.; Carlton,Dale E.; Gleason,K. Reed, System for evaluating probing networks.
    상세보기
  55. Andrews, Peter; Hess, David, System for testing semiconductors.
    상세보기
  56. Haji Sheikh,Michael J.; Biard,James R.; Rabinovich,Simon; Guenter,James K.; Hawkins,Bobby M., Systems for wafer level burn-in of electronic devices.
    상세보기
  57. Ando, Masakazu; Takahashi, Hiroyuki; Yamashita, Tsuyoshi; Hashimoto, Takashi, Temperature control device and temperature control method.
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  58. Ando, Masakazu; Takahashi, Hiroyuki; Yamashita, Tsuyoshi; Hashimoto, Takashi, Temperature control device and temperature control method.
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  59. Jones, Thomas P.; Turner, Jonathan E.; Malinoski, Mark F., Temperature control of electronic devices using power following feedback.
    상세보기
  60. Luebs, Richard J., Temperature-controlled rework system.
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  61. Stone, William M., Temperature-controlled thermal platform for automated testing.
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  62. Stone, William M., Temperature-controlled thermal platform for automated testing.
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  63. Negishi, Kazuki; Hansen, Mark, Test apparatus for measuring a characteristic of a device under test.
    상세보기
  64. Rumbaugh,Scott, Thermal optical chuck.
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  65. Rumbaugh,Scott, Thermal optical chuck.
    상세보기
  66. Schwindt, Randy J.; Harwood, Warren K.; Tervo, Paul A.; Smith, Kenneth R.; Warner, Richard H., Wafer probe station having a skirting component.
    상세보기
  67. Schwindt,Randy J.; Harwood,Warren K.; Tervo,Paul A.; Smith,Kenneth R.; Warner,Richard H., Wafer probe station having a skirting component.
    상세보기
  68. Schwindt,Randy J.; Harwood,Warren K.; Tervo,Paul A.; Smith,Kenneth R.; Warner,Richard H., Wafer probe station having a skirting component.
    상세보기
  69. Harwood, Warren K.; Tervo, Paul A.; Koxxy, Martin J., Wafer probe station having environment control enclosure.
    상세보기
  70. Harwood,Warren K.; Tervo,Paul A.; Koxxy,Martin J., Wafer probe station having environment control enclosure.
    상세보기

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