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Alternative backing up pump for turbomolecular pumps

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B01D-008/00    F04B-015/08   
미국특허분류(USC) 062/055.5; 417/901
출원번호 US-0941344 (2001-08-29)
발명자 / 주소
출원인 / 주소
인용정보 피인용 횟수 : 0  인용 특허 : 11
초록
▼

As an alternative to the use of a mechanical backing pump in the application of wide range turbomolecular pumps in ultra-high and extra high vacuum applications, palladium oxide is used to convert hydrogen present in the evacuation stream and related volumes to water with the water then being cryo-pumped to a low pressure of below about 1.e-3Torr at 150° K. Cryo-pumping is achieved using a low cost Kleemenco cycle cryocooler, a somewhat more expensive thermoelectric cooler, a Venturi cooler or a similar device to achieve the required minimization of hydr...

대표
청구항
▼

1. A method for obtaining a very low partial pressure of hydrogen in an ultra-high or extreme high vacuum condition in a vacuum system comprising: A) a vacuum chamber connected to a vacuum pumping system comprising: i) a turbomolecular pump connected to; ii) a roughing pump connected to said turbomolecular pump via a first conduit that includes a first cut off valve; and iii) a cryopump connected to said turbomolecular pump via a second conduit that includes a second cut off valve and further including a coating of palladium oxide on at least a si...

이 특허에 인용된 특허 (11)

  1. Bonney Glenn E. (Allentown PA) Longsworth Ralph C. (Allentown PA). Bakeable cryopump. USP1985044514204.
  2. Foster Christopher A. (Rte. 5 ; Box 101-B Clinton TN 37716). Continuous cryopump with a device for regenerating the cryosurface. USP1988024724677.
  3. Muldowney Francis ; Schall Eric Regis. Cryogenic vacuum pump temperature sensor. USP2001076257001.
  4. Boffito Claudio (Milan ITX) Ferrario Bruno (Milan ITX). Device and process for the removal of hydrogen from a vacuum enclosure at cryogenic temperatures and especially high ene. USP1994115365742.
  5. Okumura Katsuya ; Kuriyama Fumio ; Murai Yukio,JPX ; Tsujimura Manabu,JPX ; Sobukawa Hiroshi,JPX. Evacuation apparatus and evacuation method. USP200003RE36610.
  6. deRijke Johan E. (Cupertino CA). Method and apparatus for cryopump regeneration using turbomolecular pump. USP1996055513499.
  7. Peterson John F. (Lynnfield MA) Bartlett Allen J. (Milford MA). Multiport cryopump. USP1984054446702.
  8. Hablanian Marsbed. Self-propelled vacuum pump. USP2001046220824.
  9. Boffito Claudio (Rho ITX) Schiabel Antonio (Garbagnate ITX) Gallitognotta Allessandro (Rho ITX). Thermally insulating jacket and related process. USP1995045408832.
  10. Longsworth Ralph C. (Allentown PA) Lotz Francis T. (Whitehall PA). Throttle cycle cryopumping system for Group I gases. USP1997115687574.
  11. Zhou Jiaxiang. Vacuum chamber bakeout procedure for preventing ion gauge failure. USP2000046054862.

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