초록 ▼

A method of processing a wafer or other articles by horizontally transporting vertically oriented wafers into one or more process cells. A carrier is rotated from a substantially horizontal orientation to a substantially vertical orientation. A cathode assembly secures the wafer onto the carrier and

A method of processing a wafer or other articles by horizontally transporting vertically oriented wafers into one or more process cells. A carrier is rotated from a substantially horizontal orientation to a substantially vertical orientation. A cathode assembly secures the wafer onto the carrier and electrically couples the wafer to a power supply.

대표청구항 ▼

A method of processing a wafer or other articles by horizontally transporting vertically oriented wafers into one or more process cells. A carrier is rotated from a substantially horizontal orientation to a substantially vertical orientation. A cathode assembly secures the wafer onto the carrier and

A method of processing a wafer or other articles by horizontally transporting vertically oriented wafers into one or more process cells. A carrier is rotated from a substantially horizontal orientation to a substantially vertical orientation. A cathode assembly secures the wafer onto the carrier and electrically couples the wafer to a power supply. Rha et al.; US-5593503, 19970100, Shi et al.; US-5629416, 19970500, Neigel et al.; US-5643627, 19970700, Huang et al.; US-5695804, 19971200, Hnat et al.; US-5718770, 19980200, Shah et al.; US-5720822, 19980200, Jeffcoat et al.; US-5725676, 19980300, Chiu et al.; US-5747092, 19980500, Carey et al., 426/560; US-5846786, 19981200, Senkeleski et al.; US-5902410, 19990500, Chiu et al.; US-5904940, 19990500, Senkeleski et al.; US-5932017, 19990800, Chiu et al.; US-5954883, 19990900, Nagle et al.; US-6010574, 20000100, Jeffcoat et al.; US-6022574, 20000200, Lanner et al., 426/808; US-6054302, 20000400, Shi et al.