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[미국특허] Laminated manifold for microvalve 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F15C-001/06
  • B44C-001/22
  • B31D-003/00
출원번호 US-0640132 (2000-08-16)
발명자 / 주소
  • Barron, Richard J.
출원인 / 주소
  • Kelsey-Hayes Company
대리인 / 주소
    MacMillan, Sobanski & Todd, LLC
인용정보 피인용 횟수 : 32  인용 특허 : 78

초록

A manifold for distributing a fluid. The manifold can be used to distribute a fluid to and from a microvalve. The manifold includes a first plate having a groove formed in one face thereof. A second plate is fixed to the first plate so as to cover the groove to form a fluid passage through the groov

대표청구항

1. A method for forming a manifold, comprising the steps of: a) etching a first sheet of material to form a first plate; b) etching a second sheet of material to form a second plate; b1) forming a bond pad on said outer surface of said second plate; b2) disposing a braze material between said

이 특허에 인용된 특허 (78) 인용/피인용 타임라인 분석

  1. Furuhashi Shoji (Shizuoka JPX), Anti-skid control method.
  2. Barth Phillip W. ; Wang Tak Kui ; Alley Rodney L., Asymmetrical thermal actuation in a microactuator.
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  6. Mikkor Mati (Ann Arbor MI), Electrically controllable valve etched from silicon substrates.
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  8. Campau Gregory P. ; Kingston Andrew W.,DEX ; Ferger Robert L.,DEX ; Weigert Thomas,DEX ; Oliveri Salvatore,DEX ; Ganzel Blaise J. ; Luckevich Mark S., Electronic brake management system with manual fail safe.
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  10. Bonne Ulrich (4936 Shady Oak Rd. Hopkins MN 55343) Ohnstein Thomas R. (1944 Hythe St. Roseville MN 55113), Electronic microvalve apparatus and fabrication.
  11. Ohnstein Thomas R. (Roseville MN), Electronic microvalve apparatus and fabrication.
  12. Ohnstein Thomas R. (Roseville MN), Fabrication of an electronic microvalve apparatus.
  13. Watanabe Shunso F. (Livonia MI) Eckert Steven J. (Royal Oak MI) Engelman Gerald H. (Dearborn MI), Fluid control valve.
  14. Barth Phillip W. (Portola Valley CA) Gordon Gary B. (Saratoga CA), High performance micromachined valve orifice and seat.
  15. Watanabe Shunso F. (Livonia MI), Integral anti-lock brake/traction control system.
  16. Wise Kensall D. (Ann Arbor MI) Robertson Janet K. (Ann Arbor MI) Ji Jin (White Plains NY), Integrated microvalve structures with monolithic microflow controller.
  17. Zdeblick Mark (Mountain View CA), Integrated variable focal length lens and its applications.
  18. Zdeblick Mark (Mountain View CA), Integrated, microminiature electric to fluidic valve.
  19. Zdeblick Mark (Los Altos Hills CA), Integrated, microminiature electric to fluidic valve and pressure/flow regulator.
  20. Zdeblick Mark (Los Altos Hills CA), Integrated, microminiature electric-to-fluidic valve and pressure/flow regulator.
  21. Mon George (Silver Spring MD), Laminar proportional amplifier and laminar jet angular rate sensor with rotating splitter for null adjustment.
  22. Gewelber Ytzhak (La Mirada CA), Laminated structural panels and the method of producing them.
  23. Spear Reginald G. (Sacramento CA) Mueggenburg H. Harry (Carmichael CA) Hodge Rex (Sacramento CA), Metal platelet fuel cells production and operation methods.
  24. Petersen Kurt (San Jose CA) Pourahmadi Farzad (Fremont CA) Craddock Russell (Birmingham GB2), Method and apparatus for thermally actuated self testing of silicon structures.
  25. Giachino Joseph M. (Farmington Hills MI) Kress James W. (Dearborn MI), Method for fabricating a silicon valve.
  26. Mizukoshi Masataka,JPX ; Yamaguchi Ichiro,JPX ; Yoshikawa Masahiro,JPX ; Otake Koki,JPX ; Kasai Junichi,JPX, Method for fabricating bump forming plate member.
  27. Chu Wen-Hua ; Ferrari Mauro, Method for forming a filter.
  28. Mettner Michael (Ludwigsburg MA DEX) Schmidt Martin A. (Reading MA) Lober Theresa (Newton MA) Huff Michael A. (Medford MA), Method of making a microvalve.
  29. Mettner Michael (Ludwigsburg MA DEX) Schmidt Martin A. (Reading MA) Lober Theresa (Newton MA) Huff Michael A. (Medford MA), Method of making a microvalve.
  30. Zdeblick Mark (Mountain View CA), Method of making an integrated, microminiature electric-to-fluidic valve.
  31. Laakaniemi ; Richard N. ; Ploszaj ; Leon C. ; Schultz ; Bruce R., Method of making fluid system circuit board.
  32. Kowanz Bernd (Linkenheim DEX) Schmidt Dirk (Stutensee DEX) Ehrfeld Wolfgang (Karlsruhe DEX), Method of manufacturing microvalves.
  33. Horine David A., Method of manufacturing three dimensional parts using an inert gas.
  34. Madou Marc J. (Palo Alto CA) Tierney Michael J. (San Jose CA), Micro-electrochemical valves and method.
  35. Stevenson Paul E. (Livonia MI) Eagen Charles F. (Ann Arbor MI) Avant Carlton S. (Southfield MI), Micro-valve and method of manufacturing.
  36. Fjelstad Joseph ; Smith John W. ; DiStefano Thomas H. ; Walton A. Christian, Microelectronic connector for engaging bump leads.
  37. Talbot Neil H. ; Evans John ; Lebouitz Kyle S., Microfabricated cantilever ratchet valve, and method for using same.
  38. Sittler Fred C. (Victoria MN) Nelson Cynthia R. (Anoka MN), Micromachined valve with polyimide film diaphragm.
  39. O\Connor James M. (Ellicott City MD), Microminiature semiconductor valve.
  40. Engelsdorf Kurt (Besigheim DEX) Mettner Michael (Ludwigsburg DEX), Microvalve.
  41. Gschwendtner Horst (Esslingen DEX) Marek Jiri (Reutlingen DEX) Mettner Michael (Ludwigsburg DEX) Stokmaier Gerhard (Markgrningen DEX) Grauer Thomas (Stuttgart DEX), Microvalve.
  42. Kowanz Bernd (Linkenheim DEX) Schmidt Dirk (Stutensee DEX) Ehrfeld Wolfgang (Karlsruhe DEX), Microvalve.
  43. Mettner Michael (Ludwigsburg DEX), Microvalve.
  44. Mettner Michael (Ludwigsburg DEX) Grauer Thomas (Stuttgart DEX), Microvalve.
  45. Doering Christian (Stuttgart DEX) Grauer Thomas (Stuttgart DEX) Mettner Michael (Ludwigsburg DEX) Schuelke Armin (Ludwigsburg DEX) Marek Jiri (Reutlingen DEX) Trah Hans-Peter (Reutlingen DEX) Muchow , Microvalve of multilayer silicon construction.
  46. Maluf Nadim I. ; Logan John R. ; Sprakelaar Gertjan van, Miniature gauge pressure sensor using silicon fusion bonding and back etching.
  47. Watanabe Masao (Nagoya JPX), Motor vehicle brake pressure control apparatus wherein brake pressure is controlled based on estimated future wheel spee.
  48. MacDonald Noel C. (Ithaca NY) Yao Jun J. (Ithaca NY), Multi-dimensional precision micro-actuator.
  49. Chow Calvin Y. H., Multi-layer microfluidic devices.
  50. Miremadi Jian ; Schuyler Marc P., Multiple chip assembly.
  51. Watanabe Shunso F. (Livonia MI) Eckert Steven J. (Royal Oak MI) Engelman Gerald H. (Dearborn MI) Dionesotes Neil T. (Acton MA) Collins Steven R. (Lexington MA) Bernstein Steven D. (Brookline MA), Piezoelectric fluid control valve.
  52. Smits Johannes G. (22 Farrell St. Quincy MA 02169), Piezoelectric micropump with microvalves.
  53. Watanabe Shunso F. (Livonia MI), Piezoelectric pressure control valve.
  54. Spear ; Jr. Reginald G. ; Franklin Jerrold E. ; Hayes William A. ; Janke David E., Plastic platelet fuel cells employing integrated fluid management.
  55. Jerman John H. (Palo Alto CA), Semiconductor microactuator.
  56. Gademann Lothar (Rottenburg DEX) Tschepella Johann (Reutlingen DEX), Semiconductor structure and method of its manufacture.
  57. Jerman John H. (Palo Alto CA), Semiconductor transducer or actuator utilizing corrugated supports.
  58. Jerman John H. (Palo Alto CA), Semiconductor transducer or actuator utilizing corrugated supports.
  59. Jerman John H. (Palo Alto CA), Semiconductor transducer or actuator utilizing corrugated supports.
  60. Dantlgraber Jrg (Lohr-Sackenbach DEX), Servo valve having a piezoelectric element as a control motor.
  61. Jacobsen Stephen C. (Salt Lake City UT) Iversen Edwin K. (Salt Lake City UT) Knutti David F. (Salt Lake City UT) Davis Clark C. (Salt Lake City UT), Servovalve apparatus for use in fluid systems.
  62. Johnson A. David (San Leandro CA) Ray Curtis A. (Alamo CA), Shape memory alloy film actuated microvalve.
  63. Busch John D. (Berkeley CA) Johnson Alfred D. (Berkeley CA), Shape-memory alloy micro-actuator.
  64. Gardner Robert C. (Taylor MI) Horn William F. (Plymouth MI) Rhoades Mark K. (Ferndale MI) Wells Marvin D. (Redford MI) Yockey Steve J. (Farmington Hills MI), Silicon micromachined compound nozzle.
  65. Giachino Joseph M. (Farmington Hills MI) Kress James W. (Dearborn MI), Silicon valve.
  66. Garcia Juan Alfonso, Simultaneous diffusion bonding of an array of like parts.
  67. Wood Robert L. ; Dhuler Vijayakumar R., Thermal arched beam microelectromechanical actuators.
  68. Dhuler Vijayakumar R. ; Wood Robert L. ; Mahadevan Ramaswamy, Thermal arched beam microelectromechanical devices and associated fabrication methods.
  69. Dhuler Vijayakumar R. ; Wood Robert L. ; Mahadevan Ramaswamy, Thermal arched beam microelectromechanical structure.
  70. Dhuler Vijayakumar R. ; Wood Robert L. ; Mahadevan Ramaswamy, Thermal arched beam microelectromechanical switching array.
  71. Dhuler Vijayakumar R. ; Wood Robert L. ; Mahadevan Ramaswamy, Thermal arched beam microelectromechanical valve.
  72. Tsai Ming-Jye,TWX, Thermally buckling control microvalve.
  73. Gordon Gary B. (Saratoga CA) Barth Phillip W. (Palo Alto CA), Thermally-actuated microminiature valve.
  74. Albarda Scato (Gross Schenkenberg DEX) Thoren Werner (Lubeck DEX) Kahning Stefan (Steinburg DEX) Vehrens Peter (Sulfeld DEX), Valve arrangement of microstructured components.
  75. Albarda Scato (Gross Schenkenberg DEX) Thoren Werner (Lubeck DEX) Kahning Stefan (Steinburg DEX) Vehrens Peter (Sulfeld DEX), Valve arrangement of microstructured components.
  76. Perera Guruge E. L. (Wembley GB2), Valve devices.
  77. Wetzel Gerhard (Korntal DEX), Vehicle brake system with anti-skid apparatus.
  78. Barron Richard J. ; Fuller Edward N. ; Sivulka Gerald M. ; Campau Gregory P. ; Darnell Charles, Vehicle hydraulic braking systems incorporating micro-machined technology.

이 특허를 인용한 특허 (32) 인용/피인용 타임라인 분석

  1. Alsaleem, Fadi; Rao, Arvind, Adaptive predictive functional controller.
  2. Burkhart, Christopher William; Lee, Andrew C., Additively manufactured gas distribution manifold.
  3. Burkhart, Christopher William; Lee, Andrew C.; Hemker, David J., Additively manufactured gas distribution manifold.
  4. Taskar, Mark; Shareef, Iqbal, Configuration independent gas delivery system.
  5. Gurley, Gengxun Kara; Fuller, Edward Nelson; Arunasalam, Parthiban, Control element and check valve assembly.
  6. Harris, James M.; Michael, Selser J., Fluid delivery system and mounting panel therefor.
  7. Hunnicutt, Harry A.; Best, Christiaan S., Fluid flow control assembly.
  8. Shareef, Iqbal A.; Taskar, Mark, Fluid mixing hub for semiconductor processing tool.
  9. Kwok, Kleo, Manufacture filtration elements.
  10. Price, Andrew R.; Kaina, Rachid; Garnett, Mark C., Method and structure for optimizing heat exchanger performance.
  11. Arunasalam, Parthiban; Bhopte, Siddharth; Ojeda, Sr., Joe Albert, Method for making a solder joint.
  12. Fuller,Edward Nelson; Lowman,Clark, Method of controlling microvalve actuator.
  13. Arunasalam, Parthiban; Long, Wayne C., Method of sensing superheat.
  14. Hunnicutt, Harry, Microvalve device.
  15. Luckevich, Mark S., Microvalve device.
  16. Fuller,Edward Nelson; Davies,Brady Reuben; Uibel,Jeffrey Ross; Booth,Steven Brent; Chance,Jeffrey Oliver, Microvalve device suitable for controlling a variable displacement compressor.
  17. Hunnicutt, Harry A., Microvalve device with improved fluid routing.
  18. Hunnicutt, Harry A., Microvalve device with pilot operated spool valve and pilot microvalve.
  19. Burns, Mark A.; Rhee, Minsoung; Langelier, Sean M.; Johnson, Brian N., Modular microfluidic assembly block and system including the same.
  20. Nemazi, John E.; Manuel, Mark; Lowney, Matthew T., Mold insert for improved heat transfer.
  21. Nemazi, John E.; Manuel, Mark; Lowney, Matthew T., Mold insert for improved heat transfer.
  22. Kellogg, Michael C.; Lee, Andrew C.; Pena, Christopher J., Monolithic manifold mask and substrate concepts.
  23. Kuo, Yuan-Fong; Yao, Nan-Kuang; Wu, Jhy-Wen; Shia, Tim; Parng, Shaw-Hwa, Partially closed microfluidic system and microfluidic driving method.
  24. Hunnicutt, Harry A., Pilot operated spool valve.
  25. Hunnicutt, Harry A., Pilot-operated spool valve.
  26. Arunasalam, Parthiban, Process and structure for high temperature selective fusion bonding.
  27. Arunasalam, Parthiban, Process for reconditioning semiconductor surface to facilitate bonding.
  28. Davies, Brady Reuben, Selective bonding for forming a microvalve.
  29. Jaeb, Jonathan Paul; Hatfield, Stuart, Singulation of valves.
  30. Arunasalam, Parthiban; Long, Wayne C, Superheat sensor.
  31. Arunasalam, Parthiban; Long, Wayne C., Superheat sensor having external temperature sensor.
  32. Fuller, Edward Nelson; Hunnicutt, Harry A., Thermally actuated microvalve with multiple fluid ports.

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