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A process for fabricating an accelerometer, which includes providing a substrate with a layer of electrically conductive material on the substrate, micromachining the substrate to form a central electrical heater, a pair of temperature sensitive elements, and a cavity beneath the heater and the temp

A process for fabricating an accelerometer, which includes providing a substrate with a layer of electrically conductive material on the substrate, micromachining the substrate to form a central electrical heater, a pair of temperature sensitive elements, and a cavity beneath the heater and the temperature sensing elements. Each temperature sensing element is spaced apart from said heater a distance in the range of 75 to 400 microns. The temperature sensing elements are located on opposite sides of the heater, thereby forming an accelerometer.

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A process for fabricating an accelerometer, which includes providing a substrate with a layer of electrically conductive material on the substrate, micromachining the substrate to form a central electrical heater, a pair of temperature sensitive elements, and a cavity beneath the heater and the temp

A process for fabricating an accelerometer, which includes providing a substrate with a layer of electrically conductive material on the substrate, micromachining the substrate to form a central electrical heater, a pair of temperature sensitive elements, and a cavity beneath the heater and the temperature sensing elements. Each temperature sensing element is spaced apart from said heater a distance in the range of 75 to 400 microns. The temperature sensing elements are located on opposite sides of the heater, thereby forming an accelerometer. claimed in claim 9 comprising selecting said metal oxide from the group consisting of copper oxide, zinc oxide and silver oxide. 11. A method as claimed in claim 9 comprising adding said pH-altering substance to said fluid coolant to give said fluid coolant a pH value of approximately 5. 12. A method as claimed in claim 9 comprising circulating water in said fluid coolant circulation as said fluid coolant. 13. A method as claimed in claim 9 comprising selecting said pH altering substance from the group consisting of citric acid, acetic acid and hydrogen peroxide. 14. A method as claimed in claim 9 comprising circulating said fluid coolant in an open fluid coolant circulation.