초록 ▼

There is provided herein an improved rupture panel or disk that consists of a sheet metal top section with a relatively thick polymer foam seal attached thereto. In the preferred arrangement the instant invention does not require a separate support member. The foam sealing component is preferably at

There is provided herein an improved rupture panel or disk that consists of a sheet metal top section with a relatively thick polymer foam seal attached thereto. In the preferred arrangement the instant invention does not require a separate support member. The foam sealing component is preferably attached to the top section by some sort of adhesive to hold it in place and it is installed on the process side of the top section. Additionally, the sealing member is preferably of a thickness which is substantially thicker than would typically be used in a conventional rupture panel arrangement. In another preferred embodiment the sealing member is also designed to function as a gasket, thereby eliminating the need for that separate member.

대표청구항 ▼

There is provided herein an improved rupture panel or disk that consists of a sheet metal top section with a relatively thick polymer foam seal attached thereto. In the preferred arrangement the instant invention does not require a separate support member. The foam sealing component is preferably at

There is provided herein an improved rupture panel or disk that consists of a sheet metal top section with a relatively thick polymer foam seal attached thereto. In the preferred arrangement the instant invention does not require a separate support member. The foam sealing component is preferably attached to the top section by some sort of adhesive to hold it in place and it is installed on the process side of the top section. Additionally, the sealing member is preferably of a thickness which is substantially thicker than would typically be used in a conventional rupture panel arrangement. In another preferred embodiment the sealing member is also designed to function as a gasket, thereby eliminating the need for that separate member. im 1, wherein the vessel comprises a cascade rinser. 19. The system of claim 1, wherein the vessel comprises an overflow rinser. 20. The system of claim 1, wherein the vessel comprises a Marangoni dryer. 21. The system of claim 1, wherein said semiconductor stage is raisable so that said semiconductor structure is drawn through said upper surface of said DI water to said gas. 22. The system of claim 1, wherein said vessel comprises at least one drain to lower said upper surface of said DI water to facilitate exposing said semiconductor structure to said gas.