초록 ▼

A microelectronic system includes a substrate that is preferably silicon and a microelectronic device supported on the substrate. The microelectronic device may be a light sensor that include a readout integrated circuit formed in the silicon substrate, and a light detector supported on and electric

A microelectronic system includes a substrate that is preferably silicon and a microelectronic device supported on the substrate. The microelectronic device may be a light sensor that include a readout integrated circuit formed in the silicon substrate, and a light detector supported on and electrically interconnected with the readout integrated circuit. A cryocooler formed in and integral with the substrate includes a gas inflow channel formed in the substrate, an expansion nozzle formed in the substrate and receiving a gas flow from the gas inflow channel, and a gas outflow channel that receives the gas flow from the outlet of the expansion nozzle. The gas inflow channel and the gas outflow channel may be countercurrent spirals.

대표청구항 ▼

A microelectronic system includes a substrate that is preferably silicon and a microelectronic device supported on the substrate. The microelectronic device may be a light sensor that include a readout integrated circuit formed in the silicon substrate, and a light detector supported on and electric

A microelectronic system includes a substrate that is preferably silicon and a microelectronic device supported on the substrate. The microelectronic device may be a light sensor that include a readout integrated circuit formed in the silicon substrate, and a light detector supported on and electrically interconnected with the readout integrated circuit. A cryocooler formed in and integral with the substrate includes a gas inflow channel formed in the substrate, an expansion nozzle formed in the substrate and receiving a gas flow from the gas inflow channel, and a gas outflow channel that receives the gas flow from the outlet of the expansion nozzle. The gas inflow channel and the gas outflow channel may be countercurrent spirals. contact with the switch housing; an outer peripheral surface extending from the peripheral edge of the switch button, the outer peripheral surface further having a diameter wider than the aperture in the switch housing, such that when secured to the inner surface of the switch housing, the outer peripheral surface forms a fluid seal; a rigid pressure ring positioned between the switch button and the switch and having a diameter such that when the switch is pressed against the rigid pressure ring, the rigid pressure ring applies pressure to the outer peripheral surface of the switch button; whereby the removable pressure bracket maintains a preselected number of switches in pressure contact with the switch housing when installed, and allows removal of the switches when it is removed. 9. A switch housing assembly, as in claim 8, wherein: a pressure bracket is secured to the switch housing by at least one bracket screw. 10. A switch housing assembly, as in claim 9, further comprising: means to attach at least one switch housing assembly mounting screw to the switch housing assembly such that the switch housing assembly is securable to another device. 11. A switch housing assembly, as in claim 10, further comprising: at least one of the bracket screws securing the pre