초록 ▼

Since many valves are used, pressure loss is large, resulting in low reliability of a pump. Even when the period of increasing and decreasing the volume of a pump chamber is long, and a piezoelectric element is used as an actuator that drives a diaphragm, a driving operation cannot be performed at a

Since many valves are used, pressure loss is large, resulting in low reliability of a pump. Even when the period of increasing and decreasing the volume of a pump chamber is long, and a piezoelectric element is used as an actuator that drives a diaphragm, a driving operation cannot be performed at a high frequency, or a proper flow rate cannot be realized under a high load pressure. In accordance with the invention, the combined inertance value of an entrance passage used to make working fluid flow into a pump chamber is smaller than the combined inertance value of an exit passage used to make the working fluid flow out from the pump chamber. A fluid resistance member is provided at the entrance passage in which fluid resistance when the working fluid flows into the pump chamber is smaller than fluid resistance when the working fluid flows out of the pump chamber.

대표청구항 ▼

1. A pump for use with a working fluid, comprising: a member including a piston and a diaphragm; a pump chamber whose volume is changeable by the member; an entrance passage through which the working fluid flows into the pump chamber; an exit passage through which the working fluid flows out f

1. A pump for use with a working fluid, comprising: a member including a piston and a diaphragm; a pump chamber whose volume is changeable by the member; an entrance passage through which the working fluid flows into the pump chamber; an exit passage through which the working fluid flows out from the pump chamber, a combined inertance value of the entrance passage being smaller than a combined inertance value of the exit passage; and a fluid resistance member provided at the entrance passage such that fluid resistance when the working fluid flows into the pump chamber is smaller than fluid resistance when the working fluid flows out of the pump chamber, wherein the member including the piston and the diaphragm is driven so that the pressure in the pump chamber is decreased to zero atmospheres in absolute pressure. 2. The pump according to claim 1, further including a pulsation absorbing device that absorbs pulsation of the working fluid, the pulsation absorbing device being connected to a working fluid entrance side of the entrance passage. 3. The pump according to claim 1, further including a plurality of the pump chambers, the entrance passage usable to make working fluid flow into the plurality of pump chambers merges at a working fluid entrance side, and a driving device that performs a driving operation by shifting a timing at which volumes of the plurality of pump chambers are changed. 4. The pump according to claim 3, the exit passage usable to make the working fluid flow out from the plurality of pump chambers merging at a working fluid exit side. 5. The pump according to claim 1, further including a pulsation absorbing device that absorbs pulsation of the working fluid is connected to a working fluid exit side of the exit passage. 6. The pump according to claim 1, the fluid resistance member being a check valve. 7. The pump according to claim 2, the pulsation absorbing device including a resilient wall chamber which has at least a portion thereof formed by a resilient wall, and having an amount of change in volume per unit pressure that is greater than the working fluid. 8. The pump according to claim 1, an entrance side of the entrance passage having at least one protrusion forming a throat, the protrusion being at least one of chamfered and rounded. 9. The pump according to claim 2, further including a plurality of the pump chambers, the entrance passage usable to make working fluid flow into the plurality of pump chambers merges at a working fluid entrance side, and a driving device that performs a driving operation by shifting a timing at which volumes of the plurality of pump chambers are changed. 10. The pump according to claim 9, the fluid resistance member being a check valve. 11. The pump according to claim 2, further including a pulsation absorbing device that absorbs pulsation of the working fluid is connected to a working fluid exit side of the exit passage. 12. The pump according to claim 11, the fluid resistance member being a check valve. 13. The pump according to claim 2, the fluid resistance member being a check valve. 14. The pump according to claim 3, further including a pulsation absorbing device that absorbs pulsation of the working fluid is connected to a working fluid exit side of the exit passage. 15. The pump according to claim 14, the fluid resistance member being a check valve. 16. The pump according to claim 3, the fluid resistance member being a check valve. 17. The pump according to claim 1, wherein the exit passage has an entrance side that forms an axial cross-section that is at least one of chamfered and rounded. 18. The pump according to claim 1, wherein the piston is actuated by a piezoelectric element.