A corrosion sensor for use within a fluid flow path includes a sensing element and circuitry coupled to the sensing element for detecting corrosion of the sensing element. Another embodiment of a corrosion sensor for use within a fluid flow path comprises a hermetic housing, a sensing element attach
A corrosion sensor for use within a fluid flow path includes a sensing element and circuitry coupled to the sensing element for detecting corrosion of the sensing element. Another embodiment of a corrosion sensor for use within a fluid flow path comprises a hermetic housing, a sensing element attached to an external portion of the housing for exposure to the fluid flow path, and circuitry disposed within said hermetic housing, which circuitry is coupled to the sensing element for detecting corrosion of the sensing element.
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A corrosion sensor for use within a fluid flow path includes a sensing element and circuitry coupled to the sensing element for detecting corrosion of the sensing element. Another embodiment of a corrosion sensor for use within a fluid flow path comprises a hermetic housing, a sensing element attach
A corrosion sensor for use within a fluid flow path includes a sensing element and circuitry coupled to the sensing element for detecting corrosion of the sensing element. Another embodiment of a corrosion sensor for use within a fluid flow path comprises a hermetic housing, a sensing element attached to an external portion of the housing for exposure to the fluid flow path, and circuitry disposed within said hermetic housing, which circuitry is coupled to the sensing element for detecting corrosion of the sensing element. Han, Noel C. MacDonald, "Multiple Depth, Single Crystal Silicon MicroActuators For Large Displacement Fabricated by Deep Reactive Ion Etching", Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, Jun. 8-11, 1998, p. 45-50. William C. Tang, Martin G. Lim, Roger T. Howe, "Electrostatic Comb Drive Levitation and Control Method", Journal of Microelectromechanical Systems, vol. 1, No. 4, 12/92, p. 170-178. Timothy J. Broshnihan, James M. Bustillo, Albert P. Pisano & Roger T. Howe, "Embedded Interconnect & Electrical Isolation for High-Aspect-Ratio, SOI Inertial Instruments," Berkeley Sensor & Actuator Sensor, pp. 637-640, Transducers '97, 1997 International Conference on Solid-State Sensors and Actuators (Chicago, Jun. 16-19, 1997) (Jun. 16-19, 1997). Wolfgang Kuehnel and Steven Sherman, "A Surface Micromachined Silicon Acclerometer with On-Chip Detection Circuitry," Sensors and Actuators A 45, pp. 7-16 (1994). Howard K. Rockstad, et al., "A Miniature High-Sensitivity Broadband Accelerometer Based on Electron Tunneling Transducers," Sensors and Actuators A 43, pp. 107-114 (1994). Lynn Michelle Roylance and James B. Angell, "A Batch-Fabricated Silicon Accelerometer," IEEE Transactions on Electron Devices, vol. Ed-26, No. 12, pp. 1911-1917 (Dec. 1979). Toshiki Hirano, et al., "Design, Fabrication, and Operation of Submicron Gap Comb-Drive Microactuators," J. of Microelectromechanical Systems, vol. 1, No. 1, pp. 52-59, (Mar. 1992). V.P. Jaecklin. et al., "Comb Actuators for xy-microstages," Sensors and Actuators, A, 39, pp. 83-89 (1993). Susanne C. Arney and Noel C. MacDonald, et al., "Formation of Submicron Silicon-On-Insulator Sructures by Lateral Oxidation of Substrate-Silicon Islands," J. Vac. Sci. Technol. B vol. 6 No. 1, pp. 341-345, (Jan./Feb. 1988). Diederick W. de Bruin, et al., "Second-Order Effects in Self-Testable Accelerometers," IC Sensors, IEEE, pp. 149-152 (1990). Russell Y. Webb, Scott G. Adams, and Noel C. MacDonald, "Suspended Thermal Oxide Trench Isolation for SCS MEMS." SPIE vol. 3519, Boston, MA, pp. 196-199, (Nov. 1998). Leslie A. Field, Diane L. Burriesci, Peter R. Robrish, and Richard C. Ruby, "Micromachines 1×2 Optical-Fiber Switch." Sensors and Actuators A, 53, pp. 311-315, (1996). Miha
Waterman David K. (Chino CA) Powell Steven W. (Houston TX) Sweetman Budd (Fontana CA) Maciejewski Walter J. (Newport Beach CA), Corrosion monitoring tool.
Ansuini Frank J. (29 Kennedy Blvd. Lincoln RI 02865) Howe Robert E. (Londonderry NH), Corrosion sensor for measuring the corrosion loss and the instantaneous corrosion rate.
Moore Clifford G. (Arcadia CA) Silverman Herbert P. (Seattle WA) Bredow James R. (La Habra CA), Plated sensor for monitoring corrosion or electroplating.
Laurent,Nicolas; Buczkowski,Andrzej; Hummel,Steven G.; Walker,Tom; Shachaf,Amit, Differential wavelength photoluminescence for non-contact measuring of contaminants and defects located below the surface of a wafer or other workpiece.
Douglas, Dennis G.; Maresca, Jr., Joseph W.; Smith, Christopher M.; Ohl, Phillip C., Method and apparatus for remotely monitoring corrosion using corrosion coupons.
Hummel,Steven G.; Walker,Tom, Photoluminescence imaging with preferential detection of photoluminescence signals emitted from a specified material layer of a wafer or other workpiece.
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