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System and method for self-tuning feedback control of a system 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G05B-013/02
출원번호 US-0464658 (1999-12-15)
발명자 / 주소
  • Patel, Nital S.
  • Jenkins, Steven T.
  • Brooks, Clifton E.
  • Hilbun, Stephanie L.
출원인 / 주소
  • Texas Instruments Incorporated
대리인 / 주소
    Garner, Jacqueline J.Brady, III, Wade JamesTelecky, Jr., Frederick J.
인용정보 피인용 횟수 : 42  인용 특허 : 17

초록

A tuned run-to-run controlled system is disclosed that provides tuned run-to-run control of a system. The system includes a controlled system coupled to a tuned run-to-run controller, which contains a feedback controller coupled to a tuner. Tuned run-to-run controller determines a feedback command b

대표청구항

A tuned run-to-run controlled system is disclosed that provides tuned run-to-run control of a system. The system includes a controlled system coupled to a tuned run-to-run controller, which contains a feedback controller coupled to a tuner. Tuned run-to-run controller determines a feedback command b

이 특허에 인용된 특허 (17)

  1. Kiji Junichi (Urayasu JPX) Imasaki Naoki (Urayasu JPX) Endo Tsunekazu (Yokohama JPX), Adaptive control system and method thereof.
  2. Federspiel Clifford C., Adaptive flow controller for use with a flow control system.
  3. Liubakka Michael K. (Livonia MI) Winkelman James R. (Bloomfield MI), Adaptive vehicle suspension system with mechanism for varying controller gains in response to changing road roughness co.
  4. Sato Mikio,JPX, Control apparatus, a stage apparatus and a hard disk servo writer apparatus including a robust stabilizing compensator.
  5. Zou Hehong (Plymouth MN) Hedstrom Kale P. (St. Paul MN) Warrior Jogesh (Chanhassen MN) Hays Coy L. (Chanhassen MN), Field based process control system with auto-tuning.
  6. Hayashi Yutaka,JPX, Manufacturing method for microlithography apparatus.
  7. Gough ; Jr. William Albert Gordon (Aldergrove CAX), Method and apparatus for adaptive control.
  8. Hiroi Kazuo (Tokyo JPX), Method and apparatus for controlling a process having a control loop using feedback control.
  9. Ho Weng K. (Singapore SGX) Hang Chang C. (Singapore SGX) Wojsznis Wilhelm K. (Round Rock TX), Method and apparatus for determining the ultimate gain and ultimate period of a controlled process.
  10. Shinskey Francis G. (Foxboro MA), Method and apparatus for generating an optimal gain of process control equipment.
  11. Pfeiffer Bernd-Markus,DEX, Method and device for controlling a self-regulating, delayed process.
  12. Samad Tariq, Nonlinear-approximator-based automatic tuner.
  13. Seem John E. (Menomonee Falls WI) Haugstad Howard J. (Milwaukee WI), Pattern recognition adaptive controller.
  14. Kraus Thomas W. (Foxboro MA), Pattern-recognizing self-tuning controller.
  15. Hansen Peter D. (Wellesley Hills MA), Self-tuning controller.
  16. Wojsznis Wilhelm K. (Round Rock TX) Blevins Terrence L. (Round Rock TX), System and method for automatically tuning a process controller.
  17. Lloyd Sheldon G. (Austin TX), Tuning arrangement for turning the control parameters of a controller.

이 특허를 인용한 특허 (42)

  1. Drees, Kirk H.; Kummer, James P., Automated fault detection and diagnostics in a building management system.
  2. Drees, Kirk H.; Kummer, James P., Automated fault detection and diagnostics in a building management system.
  3. Noboa, Homero L.; Drees, Kirk H.; Wenzel, Michael, Automated fault detection and diagnostics in a building management system.
  4. Drees, Kirk H., Building management system with fault analysis.
  5. Gao, Zhiqiang; Tian, Gang, Extended active disturbance rejection controller.
  6. Gao, Zhiqiang; Tian, Gang, Extended active disturbance rejection controller.
  7. Gao, Zhiqiang; Tian, Gang, Extended active disturbance rejection controller.
  8. Limaye, Shreyas Subhash; Walker, Andrew Crehan; Workeneh, Yeheyis, Implementing sequential segmented interleaving algorithm for enhanced process control.
  9. Chong, Robert J.; Pasadyn, Alexander J.; Sonderman, Thomas J., Method and apparatus for dynamically monitoring controller tuning parameters.
  10. Yutkowitz, Stephen J., Method and apparatus for tuning compensation parameters.
  11. Tian, Gang, Method for automatically estimating a friction coefficient in a mechanical system.
  12. Tian, Gang, Method for automatically estimating inertia in a mechanical system.
  13. Tian, Gang, Method for automatically estimating inertia, coulomb friction, and viscous friction in a mechanical system.
  14. Patel, Nital S.; Carson, Steven L., Method for consistent updates to automated process control (APC) models with partitioning along multiple components.
  15. Tian, Gang, Motion profile generator.
  16. Gahinet, Pascal; Apkarian, Pierre, Multi-model, multi-objective tuning of control systems.
  17. Kumar,Aditya, Multivariable controller design method for multiple input/outputs systems with multiple input/output constraints.
  18. El-Shaer, Ahmed; Tian, Gang; Yajurvedi, Girish, Optimized parameterization of active disturbance rejection control.
  19. Stanton,Stuart T., Projection electron beam lithography apparatus and method employing an estimator.
  20. Stanton,Stuart T., Projection electron beam lithography apparatus and method employing an estimator.
  21. Wojsznis, Wilhelm K.; Mehta, Ashish; Thiele, Dirk, Robust process model identification in model based control techniques.
  22. Gao, Zhiqiang, Scaling and parameterizing a controller.
  23. Gao, Zhiqiang, Scaling and parameterizing a controller.
  24. Gao, Zhiqiang, Scaling and parameterizing a controller.
  25. Gao, Zhiqiang, Scaling and parameterizing a controller.
  26. Gao, Zhiqiang, Scaling and parameterizing a controller.
  27. Markle,Richard J.; Sonderman,Thomas J., Secondary process controller for supplementing a primary process controller.
  28. Nesler, Clay G.; Drees, Kirk H.; Kummer, James P.; Supple, Derek; Andraca, Marc D.; Ruiz, John I.; Rode, Paul Harrison, Smart building manager.
  29. Nesler, Clay G.; Drees, Kirk H.; Kummer, James P.; Supple, Derek; Andraca, Marc D.; Ruiz, John I.; Rode, Paul Harrison, Smart building manager.
  30. Tsen, Andy; Wang, Jo Fei; Tsai, Po-Feng; Fan, Ming-Yu; Wang, Jill; Mou, Jong-I; Wu, Sunny, System and method for implementing a wafer acceptance test (“WAT”) advanced process control (“APC”) with novel sampling policy and architecture.
  31. Boettcher, Andrew J.; Vitullo, Steven R.; Drees, Kirk H.; Wenzel, Michael J., Systems and methods for adaptively updating equipment models.
  32. Drees, Kirk H.; Kummer, James P.; Wenzel, Michael J., Systems and methods for detecting changes in energy usage in a building.
  33. Drees, Kirk H.; Wenzel, Michael J., Systems and methods for detecting changes in energy usage in a building.
  34. Drees, Kirk H.; Wenzel, Michael J., Systems and methods for detecting changes in energy usage in a building.
  35. Drees, Kirk H.; Kummer, James P.; Wenzel, Michael J., Systems and methods for generating an energy usage model for a building.
  36. Drees, Kirk H.; Wenzel, Michael J., Systems and methods for measuring and verifying energy savings in buildings.
  37. Drees, Kirk H.; Wenzel, Michael J., Systems and methods for measuring and verifying energy savings in buildings.
  38. Drees, Kirk H.; Kummer, James P.; Wenzel, Michael J., Systems and methods for measuring and verifying energy usage in a building.
  39. Drees, Kirk H.; Kummer, James P., Systems and methods for statistical control and fault detection in a building management system.
  40. Drees, Kirk H.; Kummer, James P., Systems and methods for statistical control and fault detection in a building management system.
  41. Drees, Kirk H.; Boettcher, Andrew J.; Kummer, James P., Systems and methods for using rule-based fault detection in a building management system.
  42. Drees, Kirk H.; Boettcher, Andrew J.; Kummer, James P., Systems and methods for using rule-based fault detection in a building management system.
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