초록 ▼

A pressure based mass flow controller includes a flow path for connection to a fluid source, a flow restrictor dividing the flow path into an upstream reservoir and a downstream reservoir, an upstream pressure measurement device connected to the upstream reservoir, and a flow valve connected to the

A pressure based mass flow controller includes a flow path for connection to a fluid source, a flow restrictor dividing the flow path into an upstream reservoir and a downstream reservoir, an upstream pressure measurement device connected to the upstream reservoir, and a flow valve connected to the flow path. The controller also includes a control device programmed to receive a desired flow rate, an indication of upstream pressure from the upstream pressure measurement device, an indication of downstream pressure from a remote downstream pressure measurement device connected to the downstream reservoir.

대표청구항 ▼

A pressure based mass flow controller includes a flow path for connection to a fluid source, a flow restrictor dividing the flow path into an upstream reservoir and a downstream reservoir, an upstream pressure measurement device connected to the upstream reservoir, and a flow valve connected to the

A pressure based mass flow controller includes a flow path for connection to a fluid source, a flow restrictor dividing the flow path into an upstream reservoir and a downstream reservoir, an upstream pressure measurement device connected to the upstream reservoir, and a flow valve connected to the flow path. The controller also includes a control device programmed to receive a desired flow rate, an indication of upstream pressure from the upstream pressure measurement device, an indication of downstream pressure from a remote downstream pressure measurement device connected to the downstream reservoir. on points determiner, the presence or absence of stop detection points data in each of said M×N small regions; and a moving detection points data storage section storing, based on the results of determination of said stop detection points determiner, the presence or absence of moving detection points data in each of the M×N small regions; and wherein said object detection section comprises: a stationary object detector performing arithmetic operations of multiplication and summation of the respective elements of said two-dimensional array representative of the presence or absence of the stop detection points data stored in said stop detection points data storage section while sequentially scanning a mask of a two-dimensional array comprising J×K (J