초록 ▼

The present invention thus provides a device structure and method for forming fin Field Effect Transistors (FETs) that overcomes many of the disadvantages of the prior art. Specifically, the device structure and method provides the ability to form finFET devices from bulk semiconductor wafers while

The present invention thus provides a device structure and method for forming fin Field Effect Transistors (FETs) that overcomes many of the disadvantages of the prior art. Specifically, the device structure and method provides the ability to form finFET devices from bulk semiconductor wafers while providing improved wafer to wafer device uniformity. Specifically, the method facilitates the formation of finFET devices from bulk semiconductor wafers with improved fin height control. Additionally, the method provides the ability to form finFETs from bulk semiconductor while providing isolation between fins and between the source and drain region of individual finFETs. Finally, the method can also provide for the optimization of fin width. The device structure and methods of the present invention thus provide the advantages of uniform finFET fabrication while using cost effect bulk wafers.

대표청구항 ▼

The present invention thus provides a device structure and method for forming fin Field Effect Transistors (FETs) that overcomes many of the disadvantages of the prior art. Specifically, the device structure and method provides the ability to form finFET devices from bulk semiconductor wafers while

The present invention thus provides a device structure and method for forming fin Field Effect Transistors (FETs) that overcomes many of the disadvantages of the prior art. Specifically, the device structure and method provides the ability to form finFET devices from bulk semiconductor wafers while providing improved wafer to wafer device uniformity. Specifically, the method facilitates the formation of finFET devices from bulk semiconductor wafers with improved fin height control. Additionally, the method provides the ability to form finFETs from bulk semiconductor while providing isolation between fins and between the source and drain region of individual finFETs. Finally, the method can also provide for the optimization of fin width. The device structure and methods of the present invention thus provide the advantages of uniform finFET fabrication while using cost effect bulk wafers. hip with Sjogren's Syndrome," J. Pathol. 163: 351-360 (1991). Deacon, et al., "Frequency of EBV DNA Detection in Sjogren's Syndrome," Am J. Med. 92: 453-454 (1992). *Debrus, et al., "Varicella-zoster virus gene 63 encodes an immediate-early protein that is abundantly expressed during latency," J. Virol. 69: 3240-3245 (1995). *Dedrick, et al., Cancer Treat. Rep. 62: 1-11 (1978). *Deleers, et al., FEBS Lett. 160: 82-86 (1983). Diener, et al., "Specific Immunosuppression by Immunotoxins Containing Daunomycin," Science 231(4734): 148-150 (1986). *Digard, et al., "Functional analysis of the herpes simplex virus UL42 protein," J. Virol. 67: 1159-1168 (1993). *Dittmer, et al., "A cluster of latently expressed genes in Kaposi's sarcoma-associated herpesvirus," J. Virol. 72: 8309-8315 (1998). *Donahue, et al., Arch. Int. Med. 155: 1605-1609 (1995). *Elek, et al., Lancet 1: 1-5 (1974). *Ertl, et al., "Physical and functional interaction of human cytomegalovirus DNA polymerase and its accessory protein (ICP36) expressed in insect cells," J. Virol. 66: 4126-33 (1992). *Ferrel, et al., J. Clin. Invest. 67: 681-687 (1981). Finerty, et al., "Immunization of Cottontop Tamarins and Rabbits with a Candidate Vaccine Against the Epstein-Barr Virus Based on the Major Viral Envelope Glycoprotein gp340 and Alum," Vaccine 12: 1180-1184 (1994). Finerty, et al., "Protective Immunization Against Epstein-Barr Virus-Induced Disease in Cottontop Tamarins Using the Virus Envelope glycoprotein gp340 Produced from a Bovine Papillomavirus Expression Vector," J. Gen. Virol. 73: 449-453 (1992). Fox, "Sjogren's Syndrome," Current Opin. Rheum. 7: 409-416 (1995). Fox, et al., "Detection of Epstein-Barr Virus-Associated Antigens and DNA in Salivary Gland Biopsies from Patients with Sjogren's Syndrome," J. Immunol. 137: 3162-3168 (1986). Fox, et al., "Potential Role of Epstein-Barr Virus in Sjogren's Syndrome and Rheumatoid Arthritis," J. Rheumatol. 19: 18-24 (1992). *Glassy, et al., J. Immunol. Methods 81: 115 (1985). *Goodrich, et al., Ann. Intern. Med. 118:173-178 (1993). Gray, et al., "Cloning, nucleotide sequence, and expression in Escherichia coli of the exotoxin A structural gene of Pseudomonas aeruginosa," Proc. Natl. Acad. Sci. USA 81: 2645-2649 (1984). *Greenwood, et al., Biochem. J. 89: 114-123 (1963). *Griffiths, et al., Cancer Res. 51: 4594-4602 (1991). Gu, et al., "First EBV Vaccine Trial in Humans Using Recombinant Vaccinia Virus Expressing the Major Membrane Antigen," Dev. Biol. Stand. 84: 171-177 (1995). Gutierrez, et al., "Switching Viral Latency to Viral Lysis: A Novel Therapeutic Approach for Epstein-Barr Virus-Associated Neoplasia," Cancer Res. 56: 969-972 (1996). Haahr, et al., "A Putative New Retrovirus Associated with Multiple Sclerosis and the Possible Involvement of Epstein-Barr Virus in This Disease," Ann. N. Y. Acad. Sci. 724: 148-156 (1996). *Halpern, et al., J. Nucl. Med. 29: 1688-1696 (1988). Harley & James, "Epstein-Barr virus infection may be an environmental risk factor for systemic lupus erythematosus in children and teenagers," Arthr. Rheum. 42(8): 1782-1783 (1999). Heslop, et al., "Long-Term Restoration of Immunity Against Epstein-Barr Virus Infection by Adoptive Transfer of Gene-Modified Virus-Specific T Lymphocytes," Nature Med. 2: 551-555 (1996). *Hiskey, Peptides 3: 137 (1981). *Ho, Cytomegalovirus, biology and infection: current topics in infectious disease Plenum Press: New York, pp. 105-118 (1982). Hoch, et al., "Channels formed by botulinum, tetanus, and diphtheria toxins in planar lipid bilayers: relevance to translocation of proteins across membranes," Proc. Natl. Acad. Sci. USA 82: 1692-1696 (1985). *Hwang, et al., Cell 48: 129-136 (1987). Inoue, et al., "Analysis of Antibody Titers to Epstein-Barr Virus Nuclear Antigens in Sera of Patients with Sjogren's Syndrome and with Rheumatoid Arthritis," J. Infect. Dis. 164: 22-28 (1991). Ishii, et al., "Cycloheximide-Induced Apoptosis in Burkitt