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A rigid structural foil and a method for forming a rigid structural foil is provided. The structural foil includes at least two layers of metal sheets, valley areas and spacers. The metal sheet layers include metal foil having a thickness of 0.006 in. The valley areas are disposed between compressed

A rigid structural foil and a method for forming a rigid structural foil is provided. The structural foil includes at least two layers of metal sheets, valley areas and spacers. The metal sheet layers include metal foil having a thickness of 0.006 in. The valley areas are disposed between compressed and uncompressed portions of the structural foil formed during compression of portions of the structural foil. In addition to the valley areas, the structural foil includes spacers. The spacers within the metal sheet layers provide spacing between portions of the metal layers such that the structural foil functions as both a heat shield and an acoustic shield.

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A rigid structural foil and a method for forming a rigid structural foil is provided. The structural foil includes at least two layers of metal sheets, valley areas and spacers. The metal sheet layers include metal foil having a thickness of 0.006 in. The valley areas are disposed between compressed

A rigid structural foil and a method for forming a rigid structural foil is provided. The structural foil includes at least two layers of metal sheets, valley areas and spacers. The metal sheet layers include metal foil having a thickness of 0.006 in. The valley areas are disposed between compressed and uncompressed portions of the structural foil formed during compression of portions of the structural foil. In addition to the valley areas, the structural foil includes spacers. The spacers within the metal sheet layers provide spacing between portions of the metal layers such that the structural foil functions as both a heat shield and an acoustic shield. from the liquid output nozzle; and a liquid collection portion arranged below the gas blow-out portion to sandwich the output liquid with the gas blow-out portion, said liquid collection portion collecting the liquid to which the gas is blown out. 8. The apparatus according to claim 4 wherein said liquid shutter comprises: a light emitting portion emitting light; a gas blow-out portion having a gas generating material for generating a gas upon receipt of light emitted by the light emitting portion and blowing out the gas generated to a side of the liquid output from the liquid output nozzle; and a liquid collection portion arranged below the gas blow-out portion to sandwich the output liquid with the gas blow-out portion, said liquid collection portion collecting the liquid to which the gas is blown out. 9. The apparatus according to claim 4 wherein said liquid shutter comprises: a shut-out plate arranged between the liquid output nozzle and the substrate, said shut-out plate changing a flow of the liquid output from the liquid output nozzle; a shut-out plate driving portion loading and unloading the shut-out plate across the flow of the liquid output from the liquid output nozzle; and a liquid collection portion collecting the liquid whose flowing direction is changed by the shut-out plate. 10. An apparatus for forming a film comprising: a liquid output nozzle continuously outputting a liquid to a surface of a substrate having projections and depressions; a detector detecting a ratio of projections to depressions in a predetermined region of the surface of the substrate; a driver moving the liquid output nozzle and the substrate relatively to each other; and a supply controller controlling an amount of liquid to be supplied to the predetermined region of the surface depending upon the detected ratio of projections to depressions while the driver is moving the liquid output nozzle and the substrate relatively to each other by the driver, wherein said supply controller controls liquid output from the liquid output nozzle at a constant amount and said driver varies a relative moving speed of the liquid output nozzle to the substrate. 11. An apparatus for forming a film comprising: a liquid output nozzle continuously outputting a liquid to a surface of a substrate having projections and depressions; a detector detecting a ratio of projections to depressions in a predetermined region of the surface of the substrate; a driver moving the liquid output nozzle and the substrate relatively to each other; and a supply controller controlling an amount of liquid to be supplied to the predetermined region of the surface depending upon the detected ratio of projections to depressions while the driver is moving the liquid output nozzle and the substrate I relatively to each other by the driver, wherein said supply controller changes the amount of liquid output from the liquid output nozzle. 12. An apparatus for forming a film comprising: a liquid output nozzle continuously outputting a liquid to a surface of a substrate having projections and depressions; a detector detecting a ratio of projections to depressions in a predetermined region of the surface of the substrate; a driver moving the liquid output nozzle and the substrate relatively to each other; and a supply controller controlling an amount of liquid to be supplied to the predetermined region of the surface depending upon the detected ratio of projections to depressions while the driver is moving the liquid output nozzle and the substrate relatively to each other by the driver, wherein said detector detects the ratio of projections and depressions in a mined region on the basis of the patterning data to be formed on the substrate. 13. An apparatus for forming a film comprising: a liquid output nozzle continuously outputting a liquid to a surface of a substrate having projections and depressions; a detector detecting a ratio of projecti ons to depressions in a predetermined region of the surface of the substrate; a driver moving the liquid output nozzle and the substrate relatively to each other; and a supply controller controlling an amount of liquid to be supplied to the predetermined region of the surface depending upon the detected ratio of projections to depressions while the driver is moving the liquid output nozzle and the substrate relatively to each other by the driver, wherein any one of an antireflection material, a resist material, a low dielectric material, an insulating material, and a wiring material added to a solvent is used as the liquid.