초록 ▼

A microbolometer unit cell (10) includes a substantially planar upper-level incident radiation absorption and detection structure (24), a substantially planar middle-level radiation reflection structure (26) spaced apart from the upper-level incident radiation absorption and detection structure for

A microbolometer unit cell (10) includes a substantially planar upper-level incident radiation absorption and detection structure (24), a substantially planar middle-level radiation reflection structure (26) spaced apart from the upper-level incident radiation absorption and detection structure for defining an optical resonant cavity (36) there between, and a substantially planar lower-level thermal isolation leg structure (20) spaced apart from the middle-level radiation reflection structure and electrically coupled to the upper-level incident radiation absorption and detection structure and to an underlying readout circuit. The lower-level thermal isolation leg structure is electrically coupled to the upper-level incident radiation absorption and detection structure through a leg (44) that passes through an aperture (48) within the middle-level radiation reflection structure, the leg also functioning as a structural support member. The lower-level thermal isolation leg structure is electrically coupled to the readout circuit through another leg (18) that terminates on an electrical contact (16) disposed on an underlying readout integrated circuit (12), and the middle-level radiation reflection structure is supported by an extension of the leg (18A).

대표청구항 ▼

A microbolometer unit cell (10) includes a substantially planar upper-level incident radiation absorption and detection structure (24), a substantially planar middle-level radiation reflection structure (26) spaced apart from the upper-level incident radiation absorption and detection structure for

A microbolometer unit cell (10) includes a substantially planar upper-level incident radiation absorption and detection structure (24), a substantially planar middle-level radiation reflection structure (26) spaced apart from the upper-level incident radiation absorption and detection structure for defining an optical resonant cavity (36) there between, and a substantially planar lower-level thermal isolation leg structure (20) spaced apart from the middle-level radiation reflection structure and electrically coupled to the upper-level incident radiation absorption and detection structure and to an underlying readout circuit. The lower-level thermal isolation leg structure is electrically coupled to the upper-level incident radiation absorption and detection structure through a leg (44) that passes through an aperture (48) within the middle-level radiation reflection structure, the leg also functioning as a structural support member. The lower-level thermal isolation leg structure is electrically coupled to the readout circuit through another leg (18) that terminates on an electrical contact (16) disposed on an underlying readout integrated circuit (12), and the middle-level radiation reflection structure is supported by an extension of the leg (18A). film covering the piezoelectric resistor, and a conductive film formed over the insulating film. 7. A microprobe according to claim 6; wherein the piezoelectric resistor of the heating means comprises the piezoresistive element formed in the first lever portion. 8. A microprobe according to claim 1; wherein the first stylus is sharper than the second stylus. 9. A microprobe comprising: a support portion; a first lever portion supported by the support portion; a second lever portion supported by the support portion adjacent to and spaced from the first lever portion; a first bending portion connected to and separate from the first lever portion; a second bending portion connected to and separate from the second lever portion and adjacent to and spaced from the first bending portion; a movable portion connected to the first bending portion and the second portion so as to be flexibly supported by the support portion; a first stylus and a second stylus provided on the movable portion; and a heater for heating the first lever portion to cause it to bend so that one of the first stylus and the second stylus is retracted with respect to the other stylus for conducting sample inspection with the other stylus in close proximity to a sample surface unobstructed by the one stylus. 10. A microprobe according to claim 9; wherein the styluses are arranged on the movable portion such that a line segment connecting the styluses is inclined by a predetermined angle with respect to a shortest line segment connecting the first and second bending portions.