IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0138519
(2002-05-06)
|
우선권정보 |
DE-0022511 (2001-05-09); WO-PCT/EP01/12469 (2001-10-27) |
발명자
/ 주소 |
- Hegner, Frank
- Rossberg, Andreas
- Schmidt, Elke
- Drewes, Ulfert
- Kirst, Michael
- Walter, Bernhard
|
출원인 / 주소 |
- Endress + Hauser GmbH + Co. KG
|
대리인 / 주소 |
Jones, Tullar & Cooper, P.C.
|
인용정보 |
피인용 횟수 :
9 인용 특허 :
0 |
초록
▼
A chamber in the interior of a housing communicates with the environment of the housing by means of a gas esxchange path, wherein a filter element with a hydrophobic and/or hydrophobicized, nanoporous material is placed in the gas exchange path. The chamber serves, e.g. to accomodate electronic circ
A chamber in the interior of a housing communicates with the environment of the housing by means of a gas esxchange path, wherein a filter element with a hydrophobic and/or hydrophobicized, nanoporous material is placed in the gas exchange path. The chamber serves, e.g. to accomodate electronic circuitry, or it is chamed as a reference pressure chamber of a relative pressure sensor. The relative pressure sensor according to the present invention for capturing a measured pressure with respect to a reference pressure comprises a reference pressure path 23 which extends between a surface which can be exposed to the reference pressure and an opening in a reference pressure chamber 22, a filter element 30 which is arranged in the reference pressure path comprising a hydrophobic or hydrophobicized, nanoporous material. The filter element allows pressure compensation on account of its permeability to N2and O2,while water molecules are selectively blocked. The nanoporous material preferably comprises an inorganic material, in particular Al2O3,TiO2or SiO2. The nanoporous material is preferably hydrophobic and/or can be impregnated with a hydrophobic layer, preferably a silane, in order to optimize the hydrophobic properties.
대표청구항
▼
1. A relative pressure sensor for capturing a measured pressure with respect to a reference pressure, comprising: a sensor element having a base body and a measurement diaphragm which, along its edge region, is connected in a pressure-tight manner to the base body so as to form a reference pre
1. A relative pressure sensor for capturing a measured pressure with respect to a reference pressure, comprising: a sensor element having a base body and a measurement diaphragm which, along its edge region, is connected in a pressure-tight manner to the base body so as to form a reference pressure chamber, the measurement diaphragm having a first diaphragm surface, which faces away from the reference pressure chamber and can be exposed to the measured pressure, and a second diaphragm surface, which faces the reference pressure chamber; a reference pressure path which extends between a surface which can be exposed to the reference pressure and an opening in the reference pressure chamber, with the result that the second diaphragm surface can be exposed to the reference pressure; and a filter element which is arranged in the reference pressure path; wherein the filter element comprises hydrophobic or hydrophobicized, nanoporous material. 2. The relative pressure sensor as claimed in claim 1, in which the nanoporous material is arranged as a layer on a support material or in the matrix of a porous support material. 3. The relative pressure sensor as claimed in claim 1, in which the nanoporous material contains one of the substances Al2O3,TiO2,ZrO2,B2O3,CeO2,mullite, zeolite, silicates (aluminosilicates, aluminum beryllium silicates, apatite, cordierite), phosphates, SiC or Si3N4,carbon, Vycor Glass or mixtures of these substances. 4. The relative pressure sensor as claimed in claim 1, in which the nanoporous material comprises an ormocer or an inorganic polymer, in particular silicone resin, polycarbosilanes or polycarbo-silazanes. 5. The relative pressure sensor as claimed in claim 1, in which the nanoporous material has a mean pore diameter of less than 4 nm, preferably less than 2.5 nm, more preferably between 0.4 and 2 nm, even more preferably between 0.5 and 1.5 nm, and particularly preferably between 0.7 and 1 nm. 6. The relative pressure sensor as claimed in claim 1, in which the nanoporous material is laid with a hydrophobic layer. 7. The relative pressure sensor as claimed in claim 6, in which the hydrophobic layer contains at least one organosilane. 8. A device, comprising a housing (40) which defines a chamber (41) in its interior which comprises at least one aperture (42, 43) through which the chamber is in fluid communication with the environment of the housing (40) by means of a gas exchange path and at least one filter element (44, 45) disposed in the gas exchange path, said filter element comprising a hydrophobic and/or hydrophobicized, nanoporous material. 9. The device of claim 8, wherein the chamber (41) comprises an inlet aperture (42) and an outlet aperture (43), wherein filter elements (44, 45) are disposed in both gas exchange paths, respectively, said filterelements (44, 45) comprising a hydrophobic and/or hydrophobicized, nanoporous material. 10. The device according to claim 9, further comprising a ventilator to effect an air flow through the inlet aperture 44 and the outlet aperture 45.
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