IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0968566
(2001-09-29)
|
발명자
/ 주소 |
- Soberunie, David
- Forshey, Randy
|
출원인 / 주소 |
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
10 인용 특허 :
22 |
초록
▼
The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relate to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present
The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relate to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.
대표청구항
▼
The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relate to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present
The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relate to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers. t valve to deliver the liquid chemical(s) resulting from interacting the first and second liquid chemicals. 4. A liquid chemical delivery system, comprising: a main reservoir with a load cell, a plurality of liquid chemical input valves, a liquid chemical output valve, a gas input valve, wherein the load cell generates signals indicating the weight of each of the plurality of liquid chemicals in the main reservoir; and a controller, coupled to the load cell, the plurality of liquid chemical input valves, the liquid chemical output valve, the gas input valve, wherein the controller adjusts the plurality of liquid chemical input valves to admit the plurality of liquid chemicals to the main reservoir, adjusts the gas input valve to supply pressurized gas to the main reservoir, actuates the mixer assembly to mix the plurality of liquid chemicals, and adjusts the liquid chemical output valve to transfer the liquid chemical(s) derived from interaction of the plurality of liquid chemicals from the main reservoir.
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