초록 ▼

A flame stabilizing apparatus is disclosed for application to a burner for a flame hydrolysis deposition (FHD) process. In the flame stabilizing apparatus, a co-flow diffusion flame burner emits a flame onto a substrate and a flame stabilizer, installed around the burner coaxially, isolates the emit

A flame stabilizing apparatus is disclosed for application to a burner for a flame hydrolysis deposition (FHD) process. In the flame stabilizing apparatus, a co-flow diffusion flame burner emits a flame onto a substrate and a flame stabilizer, installed around the burner coaxially, isolates the emitted flame from an instable ambient flow to stabilize the flame and a particle flow.

대표청구항 ▼

1. A flame stabilizing apparatus comprising: a co-flow diffusion flame burner for emitting a flame onto a substrate in a flame hydrolysis deposition (FHD) process; and a flame stabilizer juxtaposed to the burner for isolating the emitted flame from an unstable ambient flow by blocking air flow i

1. A flame stabilizing apparatus comprising: a co-flow diffusion flame burner for emitting a flame onto a substrate in a flame hydrolysis deposition (FHD) process; and a flame stabilizer juxtaposed to the burner for isolating the emitted flame from an unstable ambient flow by blocking air flow in a substantially perpendicular direction relative to a direction of the emitted flame to stabilize the emitted flame and a particle flow by emitting an inert gas that is not involved in flame hydrolysis in substantially the same direction of the flame to surround at least a portion of the flame. 2. The flame stabilizing apparatus of claim 1, wherein the flame stabilizer is positioned around the burner coaxially. 3. The flame stabilizing apparatus of claim 2, wherein the flame stabilizer includes a plurality of channels and emits a gas in a fully developed flow around the flame through the channels. 4. The flame stabilizing apparatus of claim 3, wherein the channels are honeycomb tubes. 5. The flame stabilizing apparatus of claim 4, wherein the honeycomb tubes are stacked in at least one layer along the outer circumferential direction. 6. The flame stabilizing apparatus of claim 1, wherein the flame stabilizer is formed of ceramic. 7. The flame stabilizing apparatus of claim 1, wherein the inert gas includes oxygen, nitrogen, argon, and helium having only a velocity component in the same direction as the emitted flame so that the inert gas blocks ambient air flow other than from said flame stabilizer from reaching the emitted flame. 8. The flame stabilizing apparatus of claim 1, wherein the flame stabilizer surrounds the outer circumference of the burner and sprays a gas in the same direction as that in which the flame is emitted. 9. A flame stabilizing apparatus comprising: a co-flow diffusion flame burner for emitting a flame onto a substrate in a flame hydrolysis deposition (FHD) process; and flame stabilizer means for isolating the emitted flame from an unstable ambient flow to stabilize the flame by blocking air flow in a substantially perpendicular direction relative to a direction of the emitted flame and a particle flow by emitting an inert gas that surrounds the emitted flame and that is not involved in flame hydrolysis. 10. A method for stabilizing a flame from an unstable ambient flow and particle flow, said method comprising the steps of: inserting source materials into a center of a co-flow diffusion flame burner; inserting an inert gas by a flame stabilizer that is not involved in a flame hydrolysis through a plurality of channels juxtaposed to the center of the burner; and allowing the inert gas to develop into a flow in the same direction as an emitted flame to blocking air flow in a substantially perpendicular direction relative to a direction of the emitted flame.