초록 ▼

A microbolometer is provided that includes an absorber element having material properties to change temperature in response to absorbing infrared radiation. An amorphous silicon detector is thermally coupled to the absorber element and is suspended above a silicon substrate at a height of one-quarte

A microbolometer is provided that includes an absorber element having material properties to change temperature in response to absorbing infrared radiation. An amorphous silicon detector is thermally coupled to the absorber element and is suspended above a silicon substrate at a height of one-quarter wavelength of the infrared radiation to be detected. The amorphous silicon detector changes electrical resistance in response to the absorber element changing temperature. The microbolometer also includes electrode arms coupled to the silicon substrate to provide structural support for the amorphous silicon detector above the surface of the silicon substrate. The electrode arms further provide electrical connectivity for the microbolometer.

대표청구항 ▼

A microbolometer is provided that includes an absorber element having material properties to change temperature in response to absorbing infrared radiation. An amorphous silicon detector is thermally coupled to the absorber element and is suspended above a silicon substrate at a height of one-quarte

A microbolometer is provided that includes an absorber element having material properties to change temperature in response to absorbing infrared radiation. An amorphous silicon detector is thermally coupled to the absorber element and is suspended above a silicon substrate at a height of one-quarter wavelength of the infrared radiation to be detected. The amorphous silicon detector changes electrical resistance in response to the absorber element changing temperature. The microbolometer also includes electrode arms coupled to the silicon substrate to provide structural support for the amorphous silicon detector above the surface of the silicon substrate. The electrode arms further provide electrical connectivity for the microbolometer. e elements and said restoring springs of said spring-equipped cover are received in said recess of said base; and said fixed contacts are embedded in a part of said bottom plate such as, for example, a quarter region thereof defined at an upper left portion thereof in a circuit-like pattern and each having a terminal arranged so as to outwardly extend from said bottom plate; said bottom plate being formed on a part thereof such as, for example, at quarter regions thereof defined at upper right and lower left portions thereof with guide grooves in which said slide elements are fitted. 4. A slide switch as defined in claim 1, wherein said slider includes a plate made of a dielectric material and cut out at four corners thereof; said square plate having an operation section defined at a central portion thereof; said plate being formed with an operation projection and a fit hole for an operation gripper; said plate being mounted with said movable contact spring on a portion of a lower surface thereof facing said fixed contacts of said base; and said movable contact spring includes two contact spring elements; said plate being formed with guide grooves for said slide elements on a portion of said lower surface thereof facing guide grooves of said base while being perpendicular thereto. 5. A slide switch as defined in claim 1, wherein said slide elements each are formed of two plate members of a rectangular shape connected to each other in a crossed manner and slidably fitted in guide grooves of said base and slider; said plate members each being made of a dielectric material; and said slider is moved in longitudinal and lateral directions, in oblique longitudinal or lateral directions, in a circular pattern, in a curved pattern or in any suitable pattern or direction while keeping each of said slide elements fitted in said guide grooves of said base and slider. 6. A slide switch as defined in claim 1, wherein said restoring spring-equipped cover includes a spring plate made of a dielectric metal plate; said spring plate being formed at a central portion thereof with a circular bole through which an operation section of said slider is inserted;