초록 ▼

A plasma treatment system wherein workpieces are carried in slots in a magazine. The plasma treatment system has first and second plasma treatment chambers mounted on a common base a base. A queuing station is located on the base for receiving the magazines. A magazine handler moves a magazine to a

A plasma treatment system wherein workpieces are carried in slots in a magazine. The plasma treatment system has first and second plasma treatment chambers mounted on a common base a base. A queuing station is located on the base for receiving the magazines. A magazine handler moves a magazine to a location adjacent one of the first and second plasma treatment chambers. A workpiece handler transfers a workpiece between the magazine and the one of the first and second plasma treatment chambers. The workpiece handler has a workpiece translator with a first surface that contacts a first edge of the workpiece for pushing the workpiece into the plasma treatment chamber. In addition, the workpiece translator has a second surface that contacts an opposite edge of the workpiece for pushing the workpiece out of the plasma treatment chamber. There are various methods relating to the use of multiple plasma treatment chambers on a single base and the automatic handling of workpieces for loading and unloading the multiple plasma treatment chambers.

대표청구항 ▼

A plasma treatment system wherein workpieces are carried in slots in a magazine. The plasma treatment system has first and second plasma treatment chambers mounted on a common base a base. A queuing station is located on the base for receiving the magazines. A magazine handler moves a magazine to a

A plasma treatment system wherein workpieces are carried in slots in a magazine. The plasma treatment system has first and second plasma treatment chambers mounted on a common base a base. A queuing station is located on the base for receiving the magazines. A magazine handler moves a magazine to a location adjacent one of the first and second plasma treatment chambers. A workpiece handler transfers a workpiece between the magazine and the one of the first and second plasma treatment chambers. The workpiece handler has a workpiece translator with a first surface that contacts a first edge of the workpiece for pushing the workpiece into the plasma treatment chamber. In addition, the workpiece translator has a second surface that contacts an opposite edge of the workpiece for pushing the workpiece out of the plasma treatment chamber. There are various methods relating to the use of multiple plasma treatment chambers on a single base and the automatic handling of workpieces for loading and unloading the multiple plasma treatment chambers.