Method and apparatus for uniform electropolishing of damascene ic structures by selective agitation
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
B23H-011/00
B23H-003/00
B23H-005/00
출원번호
US-0967075
(2001-09-28)
발명자
/ 주소
Mayer, Steven T.
Contolini, Robert J.
Broadbent, Eliot K.
Drewery, John S.
출원인 / 주소
Novellus Systems, Inc.
대리인 / 주소
Beyer Weaver & Thomas, LLP
인용정보
피인용 횟수 :
16인용 특허 :
17
초록▼
The present invention pertains to apparatus and methods for planarization of metal surfaces having both recessed and raised features, over a large range of feature sizes. The invention accomplishes this by increasing the fluid agitation in raised regions with respect to recessed regions. That is, th
The present invention pertains to apparatus and methods for planarization of metal surfaces having both recessed and raised features, over a large range of feature sizes. The invention accomplishes this by increasing the fluid agitation in raised regions with respect to recessed regions. That is, the agitation of the electropolishing bath fluid is agitated or exchanged as a function of elevation on the metal film profile. The higher the elevation, the greater the movement or exchange rate of bath fluid. In preferred methods of the invention, this agitation is achieved through the use of a microporous electropolishing pad that moves over (either near or in contact with) the surface of the wafer during the electropolishing process. Thus, methods of the invention are electropolishing methods, which in some cases include mechanical polishing elements.
대표청구항▼
The present invention pertains to apparatus and methods for planarization of metal surfaces having both recessed and raised features, over a large range of feature sizes. The invention accomplishes this by increasing the fluid agitation in raised regions with respect to recessed regions. That is, th
The present invention pertains to apparatus and methods for planarization of metal surfaces having both recessed and raised features, over a large range of feature sizes. The invention accomplishes this by increasing the fluid agitation in raised regions with respect to recessed regions. That is, the agitation of the electropolishing bath fluid is agitated or exchanged as a function of elevation on the metal film profile. The higher the elevation, the greater the movement or exchange rate of bath fluid. In preferred methods of the invention, this agitation is achieved through the use of a microporous electropolishing pad that moves over (either near or in contact with) the surface of the wafer during the electropolishing process. Thus, methods of the invention are electropolishing methods, which in some cases include mechanical polishing elements. istory of Calcareous Cements," The Chemistry of Cement and Concrete, 3rd Ed., pp. 1-10, (Date unknown). S. N. Ghosh, "Progress in Cement and Concrete," Cement and Concrete Science & Technology, vol. 1, Part I, New Delhi, pp. 100, 102 (Date unknown). M. Regourd, "Slags and Slag Cements," Instructional Modules in Cement Science, pp. 94-111, (Date unknown). W. A. Klemm, "Cementitious Materials: Historical Notes," Materials Science of Concrete, pp. 1-26 (Date unknown). R. Kondo et al., "Fuel Economized Ferrite Cement Made From Blastfurnace and Converter Slags," U.S. Bureau of Mines and IIT Research Institute, Proceedings of the Fifth Mineral Waste Utilization Symposium, Chicago, pp. 329-340, Apr. 13-14, 1976. N. I. Kogan et al., "The Use of Waste Slag from the Rustavi Metallurgical Plant in Cement Industry," Proceedings of the Institute Intensifying the Process of Calcining Clinker in Rotary Kilns, USSR, Ministry of the Building Materials Industry, No. 88, Moscow, pp. 15-26, (No month) 1986. N. P. Kogan et al., "Intensification of the process of producing cement clinker by calcining a batch consisting of independent starting physicochemical systems,", Doklady adademii nauk SSSR, vol. 238, No. 2, pp. 408-410, (No month) 1978. H. M. Javoronkov et al., "Clinkerization with Low Consumption of Energy During Firing of Mixtures Containing Unground Slag," 8thInternational Congress on the Chemistry of Cement, Rio de Janeiro, vol. 11, pp. 1-3, Sep. 22-27, 1986. R. Kondo et al., "Iron Cement Made from Blastfurnace and Converter Slags," Review of the Twenty-Eighth General Meeting-Technical Session, The Cement Association of Japan, 8th International Congress on the Chemistry of Cement, pp. 66-68, May 1974. W. Baoxun, "Investigation on the Clinker Formation Process, Using Steel Slag as a Raw Material," Proceedings of the 1985 Beijing International Symposium on Cement and Concrete, Chinese Silicate Society in cooperation with China Association for Science and Technology, pp. 248-259, May 14-17, 1985. D.
Mayer Steven T. (Piedmont CA) Contolini Robert J. (Pleasanton CA) Bernhardt Anthony F. (Berkeley CA), Method and apparatus for spatially uniform electropolishing and electrolytic etching.
Viehbeck Aldred (Stormville) Buchwalter Stephen L. (Wappingers Falls) Glenning John J. (Vestal) Goldberg Martin J. (Mahopac NY) Kovac Caroline A. (Ridgefield CT) Matthew Linda C. (Peekskill NY) Pawlo, Method for etching an organic polymeric material.
Adams John A. ; Krulik Gerald A. ; Smith Everett D., Method for simultaneous non-contact electrochemical plating and planarizing of semiconductor wafers using a bipiolar electrode assembly.
Contolini Robert J. (Pleasanton CA) Mayer Steven T. (San Leandro CA) Tarte Lisa A. (Livermore CA), Removal of field and embedded metal by spin spray etching.
Mayer, Steven T.; Stowell, Marshall R.; Drewery, John S.; Hill, Richard S.; Archer, Timothy M.; Kepten, Avishai, Selective electrochemical accelerator removal.
Mayer, Steven T.; Rea, Mark L.; Hill, Richard S.; Kepten, Avishai; Stowell, R. Marshall; Webb, Eric G., Topography reduction and control by selective accelerator removal.
Mayer, Steven T.; Rea, Mark L.; Hill, Richard S.; Kepten, Avishai; Stowell, R. Marshall; Webb, Eric G., Topography reduction and control by selective accelerator removal.
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