IPC분류정보
국가/구분 |
United States(US) Patent
등록
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국제특허분류(IPC7판) |
|
출원번호 |
US-0141586
(2002-05-08)
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발명자
/ 주소 |
- Blalock, Guy T.
- Tang, Sanh D.
- Huang, Zhaohui
|
출원인 / 주소 |
|
대리인 / 주소 |
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인용정보 |
피인용 횟수 :
3 인용 특허 :
20 |
초록
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A method for fabricating field emitters from a conductive or semiconductive substrate. A layer of low work function material may be formed on the substrate. Emission tips that include such a low work function material may have improved performance. An etch mask appropriate for forming emission tips
A method for fabricating field emitters from a conductive or semiconductive substrate. A layer of low work function material may be formed on the substrate. Emission tips that include such a low work function material may have improved performance. An etch mask appropriate for forming emission tips is patterned at desired locations over the substrate and any low work function material thereover. An anisotropic etch of at least the substrate is conducted to form vertical columns therefrom. A sacrificial layer may then be formed over the vertical columns. A facet etch of each vertical column forms an emission tip of the desired shape. If a sacrificial layer was formed over the vertical columns prior to formation of emission tips therefrom, the remaining material of the sacrificial layer may be utilized to facilitate the removal of any redeposition materials formed during the facet etch.
대표청구항
▼
A method for fabricating field emitters from a conductive or semiconductive substrate. A layer of low work function material may be formed on the substrate. Emission tips that include such a low work function material may have improved performance. An etch mask appropriate for forming emission tips
A method for fabricating field emitters from a conductive or semiconductive substrate. A layer of low work function material may be formed on the substrate. Emission tips that include such a low work function material may have improved performance. An etch mask appropriate for forming emission tips is patterned at desired locations over the substrate and any low work function material thereover. An anisotropic etch of at least the substrate is conducted to form vertical columns therefrom. A sacrificial layer may then be formed over the vertical columns. A facet etch of each vertical column forms an emission tip of the desired shape. If a sacrificial layer was formed over the vertical columns prior to formation of emission tips therefrom, the remaining material of the sacrificial layer may be utilized to facilitate the removal of any redeposition materials formed during the facet etch. That Forms an Inactivating Dimer with Bcl-xL", Molecular and Cellular Biology, vol. 17, No. 12, pp. 7040-7046 (Dec. 1997). Sato et al., "Interactions Among Members of the Bcl-2 Protein Family Analyzed with a Yeast Two-Hybrid System", Proc. Natl. Acad. Sci. USA--Cell Biology, vol. 91, pp. 9238-9242 (Sep. 1994). Craig B. Thompson, "Apoptosis in the Pathogenesis and Treatment of Disease", Science, vol. 267 pp. 1456-1462 (Mar. 10, 1995). Chittenden et al., "A Conserved Domain in Bak, Distinct From BH1 and BH2, Mediates Cell Death and Protein Binding Functions", EMBO J, 14(22):5589-96 (Nov. 15, 1995). Boyd et al., "Bik, A Novel Death-Inducing Protein Shares a Distinct Sequence Motif with Bcl-2 Family Proteins and Interacts with Viral and Cellular Survival-Promoting Proteins", Oncogene, 11(9):1921-8 (Nov. 2, 1995). J.C. Reed, "Bcl-2 and the Regulation of Programmed Cell Death", J Cell Biol., 124(1-2):1-6 (Jan. 1994). E. Yang and S.J. Korsmeyer, "Molecular Thanatopsis: A Disclosure on the BCL2 Family and Cell Death", Blood, 88(2):386-401 (Jul. 15, 1996). S.W. Muchmore, et al., "X-Ray and NMR Structure of Human Bcl-xL, an Inhibitor of Programmed Cell Death", Nature, 381(6580)335-41 (May 23, 1996). Yoo, et al., "Apoptosis in Human Leukemic Cells Induced by lactoferricin, a Bovine Milk Protein-Derived Peptide: Involvement of Reactive Oxygen Species," Biochemical and Biophysical Research Communications, vol. 237, No. 3, 1997, pp. 624-628. Resnicoff, et al., "A Novel Class of Peptides That Induce Apoptosis and Abrogate Tumorigenesis in Vivo," Biochemical and Biophysical Research Communications, vol. 240, No. 1, 1997, pp. 208-212. Welsh, et al., "Role of Apoptosis in the Regulation of Virus-Induced T Cell Responses, Immune Suppression, and Memory," Journal of Cellular Biochemistry, vol. 59, 1995, pp. 135-142. Lee, et al., "Involvment of oxidation of LDL-induced collagen gene regulation in mesangial cells," Kidney International, vol. 50, 1996, pp. 1582-1590. Zhu, et al., "Preparation of Vitamin B6-Peptide-Oligonucleotide Conjugates," Bioconjugate Chem, vol. 5, No. 4, 1994, pp. 312-315. Toth, et al., "Oral absorption of lipidic amino acid conjugates," International Journal of Pharmaceutics, vol. 102, 1994, pp. 223-230. Swaan, et al., "Enhanced Transepithelial Transport of Peptides by Conjugation to Cholic Acid," Bioconjugate Chem., vol. 8, No. 4, 1997, pp. 520-525. Hussain, et al., "Synthesis and Structure Elucidation of γ-Aminobutyric Acid Conjugates with Lipidic Acids, Lipidic Amino Acids and Lipidic Peptides," Liebigs Ann. Chem., 1991, pp. 963-966. Gastman, et al., "Caspase-mediated Degradation of T-Cell Receptor ζ-Chain," Cancer Research, vol. 59,, Apr. 1, 1999, pp. 1422-1427. Klehntopf, et al., "Cell-Permeable Peptides Covering the NIP-Recognition Site of BCL-2 and BCL-2 Specific Hammerhead Ribozymes Restore Sensisitivy of Multiple Myeloma Cells to Glucocorticoid-Induced Apoptosis," Exp. Hematology, vol. 23, No. 8, 1995, p. 905, Abstract #573. Klehntopf, et al., "Resistance of Multiple Myeloma Cells to Glucocorticoid-Induced Apoptosis is Restored by Cell-Permeable Peptides targeting Functional Domains of BCL-2," Onkologic, vol. 18, Suppl. 2, 1995, p. 65, Abstract #195. Liu, et al., "Thymic Peptides Induce Apoptosis in Undifferentiated Cancer Cells," FASEB, vol. 8, No. 4-5, 1994, pp. A773, Abstract #4482. MPSEARCH, Oxford Molecular LTD., 1993-1998 for SEQ ID No. 1-26, SEQ ID No. 38-33 and SEQ ID No. 35-54.
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