IPC분류정보
| 국가/구분 |
United States(US) Patent
등록
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| 국제특허분류(IPC7판) |
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| 출원번호 |
US-0843293
(2001-04-24)
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발명자
/ 주소 |
- Sharples, Judson R.
- Zacharias, Kenneth F.
- Hudson, Guy F.
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| 출원인 / 주소 |
|
| 대리인 / 주소 |
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| 인용정보 |
피인용 횟수 :
2 인용 특허 :
45 |
초록
▼
A method and apparatus for processing a microelectronic substrate. In one embodiment, the method can include planarizing the microelectronic substrate with a planarizing liquid and rinsing the substrate with a rinsing liquid having a pH approximately the same as a pH of the planarizing liquid. The r
A method and apparatus for processing a microelectronic substrate. In one embodiment, the method can include planarizing the microelectronic substrate with a planarizing liquid and rinsing the substrate with a rinsing liquid having a pH approximately the same as a pH of the planarizing liquid. The rinsing step can be completed while the substrate remains on a polishing pad of the apparatus, or, alternatively, the substrate can be removed to a rinsing chamber for rinsing. In another embodiment, the method can include conditioning the polishing pad by removing polishing pad material from the polishing pad and then cleaning the microelectronic substrate by engaging the substrate with the same polishing pad and moving at least one of the polishing pad and the substrate relative to the other of the polishing pad and the substrate after conditioning the polishing pad.
대표청구항
▼
A method and apparatus for processing a microelectronic substrate. In one embodiment, the method can include planarizing the microelectronic substrate with a planarizing liquid and rinsing the substrate with a rinsing liquid having a pH approximately the same as a pH of the planarizing liquid. The r
A method and apparatus for processing a microelectronic substrate. In one embodiment, the method can include planarizing the microelectronic substrate with a planarizing liquid and rinsing the substrate with a rinsing liquid having a pH approximately the same as a pH of the planarizing liquid. The rinsing step can be completed while the substrate remains on a polishing pad of the apparatus, or, alternatively, the substrate can be removed to a rinsing chamber for rinsing. In another embodiment, the method can include conditioning the polishing pad by removing polishing pad material from the polishing pad and then cleaning the microelectronic substrate by engaging the substrate with the same polishing pad and moving at least one of the polishing pad and the substrate relative to the other of the polishing pad and the substrate after conditioning the polishing pad. further comprising a bolt inserted through said bolt insertion hole and into said threaded bolt hole, said bolt including a thread portion formed at a leading end portion thereof, said thread portion being threaded in said threaded bolt hole to couple said output shaft to the crankshaft. 6. The output shaft structure of a personal watercraft according to claim 5, wherein the crankshaft includes a stepped portion formed thereon, said output shaft including a flange portion formed thereon, and said connection pipe is slightly clamped between said stepped portion and said flange portion. 7. The output shaft structure of a personal watercraft according to claim 1, wherein the crankshaft includes a stepped portion formed thereon, said output shaft including a flange portion formed thereon, and said connection pipe is slightly clamped between said stepped portion and said flange portion. 8. A personal watercraft, comprising: a watercraft body; an engine mounted on said watercraft body with a crankshaft of said engine extending in the longitudinal direction of said watercraft body, said crankshaft being supported by an engine case via plain metal; an output shaft, said output shaft being provided separately from said crankshaft and coupled to a rear end of said crankshaft, said output shaft being supported by said engine case via a rolling bearing immovable in a thrust direction; a propulsion device, a shaft of said propulsion device being coupled to a rear end of said crankshaft in such a manner as to be disposed on an extension of said crankshaft, said shaft of said propulsion device being coupled to a rear end of said output shaft; and a first spline being formed on or in the rear end of said crankshaft; a second spline being formed on or in a front end of said output shaft; and a third spline engaging with said first and second splines and being formed in or on an inner surface of a connection pipe, and the rear end of said crankshaft is coupled to the front end of said output shaft via said connecting pipe. 9. The personal watercraft according to claim 8, wherein a gap is formed between opposed faces of the rear end of said crankshaft and the front end of said output shaft. 10. The personal watercraft according to claim 9, wherein said crankshaft includes a stepped portion formed thereon, said output shaft including a flange portion formed thereon, and said connection pipe is slightly clamped between said stepped portion and said flange portion. 11. The personal watercraft according to claim 8, wherein said output shaft includes a bolt insertion hole formed therein, the rear end of said crank shaft includes a threaded bolt hole formed therein, said personal watercraft further comprising a bolt inserted through said bolt insertion hole and into said threaded bolt hole, said bolt including a thread portion formed at a leading end portion thereof, said thread portion being threaded in said threaded bolt hole to couple said output shaft to said crankshaft. 12. The personal watercraft according to claim 8, wherein said output shaft includes a bolt insertion hole formed therein, the rear end of said crank shaft includes a threaded bolt hole formed therein, said personal watercraft further comprising a bolt inserted through said bolt insertion hole and into said threaded bolt hole, said bolt including a thread portion formed at a leading end portion thereof, said thread portion being threaded in said threaded bolt hole to couple said output shaft to said crankshaft. 13. The personal watercraft according to claim 12, wherein said crankshaft includes a stepped portion formed thereon, said output shaft including a flange portion formed thereon, and said connection pipe is slightly clamped between said stepped portion and said flange portion. 14. The personal watercraft according to claim 8, wherein said crankshaft includes a stepped portion formed thereon, said output shaft including a flange portion formed thereon, and said co nnection pipe is slightly clamped between said stepped portion and said flange portion.
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