초록 ▼

The present invention relates to a method of manufacturing a piezoelectric device of high sensitivity using direct bonded quartz plate. To achieve this object, the invented method comprises the steps of covalently bonding a plurality of quartz plates, dry etching the bonded quartz plates with plasma

The present invention relates to a method of manufacturing a piezoelectric device of high sensitivity using direct bonded quartz plate. To achieve this object, the invented method comprises the steps of covalently bonding a plurality of quartz plates, dry etching the bonded quartz plates with plasma from one side of its surfaces down to a bonded plane, and dry etching with plasma thereafter from the other side of the surfaces.

대표청구항 ▼

The present invention relates to a method of manufacturing a piezoelectric device of high sensitivity using direct bonded quartz plate. To achieve this object, the invented method comprises the steps of covalently bonding a plurality of quartz plates, dry etching the bonded quartz plates with plasma

The present invention relates to a method of manufacturing a piezoelectric device of high sensitivity using direct bonded quartz plate. To achieve this object, the invented method comprises the steps of covalently bonding a plurality of quartz plates, dry etching the bonded quartz plates with plasma from one side of its surfaces down to a bonded plane, and dry etching with plasma thereafter from the other side of the surfaces. es at least one opening and a semi-permeable membrane material, the semi-permeable membrane material being positioned within or superposed over said opening. 11. A fluid-filtration receptacle capable of containing a liquid when placed in a predetermined range of operative positions, wherein: (a) the receptacle comprises a user-fillable liquid-containable internal area defined by an at least partially-enclosing liquid-impermeable solid material, the liquid-impermeable solid material having a semi-permeable drain disposed therethrough and a seal component releasably-sealing said semi-permeable drain; and (b) the semi-permeable drain comprises a plurality of discrete semi-permeable openings and the seal component comprises a corresponding plurality of independently removable seals, each of said openings capable of being individually and completely unsealed by a user by removal of one of said corresponding plurality of independently removable seals, whereby the semipermeable drain is capable of being variably unsealed to allow draining of corresponding predetermined volumes of said liquid from said internal area when said receptacle is placed in at least one of said predetermined operative positions. 12. A centrifugal filter unit kit comprising the fluid-filtration receptacle of claim 11 and a filtrate collection vial, the fluid-filtration receptacle at least partially fittable within the filtrate collection vial whereby liquid drained from said internal area of said fluid-filtration receptacle collects in said filtrate collection vial.