IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0800471
(2001-03-08)
|
발명자
/ 주소 |
- Teraoka, Atsuo
- Tsuda, Fumiaki
- Ohyabu, Hideo
|
출원인 / 주소 |
- The Japan Steel Works, Ltd.
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
2 인용 특허 :
7 |
초록
▼
The present invention relates to the step of plasticizing a thermoplastic resin material by rotatably driving a screw (20). Also included in the method is the step of injecting an inert gas into a screw cylinder (1) to permeate the melted resin and injecting the melted resin into a mold by driving t
The present invention relates to the step of plasticizing a thermoplastic resin material by rotatably driving a screw (20). Also included in the method is the step of injecting an inert gas into a screw cylinder (1) to permeate the melted resin and injecting the melted resin into a mold by driving the screw (20) in the direction of injection. Here, the inert gas has a pressure, at least in pressure, equal to or greater than a supercritical pressure or is under a supercritical state. To provide a thermoplastic resin foam by the method, electric servomotors (31, 32) are employed to drive the screw (20). After the step of plasticizing the resin material has been completed, brakes are applied to the electric servomotors (31, 32) to prevent the screw (20) from retreating. Alternatively, even after the step of plasticizing the resin material has been completed, the screw (20) is driven at low speeds in the direction of plasticization until immediately before the step of injecting the melted resin is initiated. This allows foaming inside the screw cylinder (1).
대표청구항
▼
The present invention relates to the step of plasticizing a thermoplastic resin material by rotatably driving a screw (20). Also included in the method is the step of injecting an inert gas into a screw cylinder (1) to permeate the melted resin and injecting the melted resin into a mold by driving t
The present invention relates to the step of plasticizing a thermoplastic resin material by rotatably driving a screw (20). Also included in the method is the step of injecting an inert gas into a screw cylinder (1) to permeate the melted resin and injecting the melted resin into a mold by driving the screw (20) in the direction of injection. Here, the inert gas has a pressure, at least in pressure, equal to or greater than a supercritical pressure or is under a supercritical state. To provide a thermoplastic resin foam by the method, electric servomotors (31, 32) are employed to drive the screw (20). After the step of plasticizing the resin material has been completed, brakes are applied to the electric servomotors (31, 32) to prevent the screw (20) from retreating. Alternatively, even after the step of plasticizing the resin material has been completed, the screw (20) is driven at low speeds in the direction of plasticization until immediately before the step of injecting the melted resin is initiated. This allows foaming inside the screw cylinder (1). a substrate support; anda mounting ring coupled at a first end to a second end of the cylindrical body and having a second end extending radially outwards from the outer surface, the second end bifurcated into a first flange and a parallel second flange.2. The inner shield of claim 1, wherein the mounting ring is orientated substantially perpendicular to the cylindrical body.3. The inner shield of claim 1, wherein the first flange is disposed closer to the first end of the cylindrical body than the second flange.4. The inner shield of claim 1, wherein the first flange further comprises a plurality holes formed therethrough.5. The inner shield of claim 4, wherein each of the holes has an axis orientated parallel to an axis of the cylindrical body.6. The inner shield of claim 5, wherein the first flange further comprises a second plurality holes formed therethrough, each of the second holes having a counter bore formed on a side of the first flange facing the second end of the cylindrical body.7. The inner shield of claim 1, wherein the first flange and second flange are adapted to receive a member having a threaded hole for securing the inner shield to a processing chamber by a fastener disposed through the first flange and engaging the threaded hole of the member.8. An inner shield for a processing chamber, comprising: a tubular body having an inner cylindrical surface and an outer cylindrical surface, a portion of the outer cylindrical surface proximate a first end of the tubular body adapted to define a radially inward wall of a labyrinth gap with a lower shield coupled to a substrate support;a first mounting flange extending radially outwards from a second end of the tubular body and orientated parallel to a central axis of the tubular body; anda second mounting flange extending radially outwards from the tubular body in a parallel spaced-apart relation to the first mounting flange and having a plurality of holes formed therethrough, each hole having an axis parallel to a central axis of the tubular body, where a channel defined between the mounting flanges is adapted to receive a member having a threaded mounting hole that aligns with the holes disposed in the first mounting flange.9. The inner shield of claim 8, wherein the second mounting flange is orientated substantially perpendicular to the tubular body.10. The inner shield of claim 8, wherein the second mounting flange further comprises a second plurality holes formed therethrough, each of the second holes having a counter bore formed on a side of the first mounting flange facing the second end of the tubular body.11. A process kit for a processing chamber, comprising: a) a conductive, annular upper shield comprising:a cylindrical body having an inner surface and an outer surface, a portion of the outer surface proximate a first end of the cylindrical body adapted to define a labyrinth gap with a lower shield coupled to a substrate support; anda mounting ring coupled at a first end to a second end of the cylindrical body and having a second end extending radially outwards from the outer surface, the second end bifurcated into a first flange and a parallel second flange; andb) a conductive lower shield comprising:a center portion having a first surface and a second surface opposite the first surface;a lip projecting from the first surface of a portion of the center portion and having a diameter greater than a diameter of the end of the cylindrical portion of the shield, the lip configured to maintain a spaced-apart relation from the substrate support member.12. The kit of claim 11, wherein the mounting ring of the upper shield is disposed substantially perpendicular to the cylindrical body.13. The kit of claim 11, wherein the first flange of the upper shield is disposed closer to the first end of the cylindrical body than the second flange.14. The kit
※ AI-Helper는 부적절한 답변을 할 수 있습니다.