Within a damascene method for forming a microelectronic fabrication, there is employed an etch stop layer comprising a comparatively low dielectric constant dielectric material sub-layer having formed thereupon a comparatively high dielectric constant dielectric material sub-layer. Within the method
Within a damascene method for forming a microelectronic fabrication, there is employed an etch stop layer comprising a comparatively low dielectric constant dielectric material sub-layer having formed thereupon a comparatively high dielectric constant dielectric material sub-layer. Within the method there is also simultaneously etched: (1) an anti-reflective coating layer from an inter-metal dielectric layer; and (2) the etch stop layer from a contact region. The microelectronic fabrication is formed with enhanced performance and enhanced reliability.
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Within a damascene method for forming a microelectronic fabrication, there is employed an etch stop layer comprising a comparatively low dielectric constant dielectric material sub-layer having formed thereupon a comparatively high dielectric constant dielectric material sub-layer. Within the method
Within a damascene method for forming a microelectronic fabrication, there is employed an etch stop layer comprising a comparatively low dielectric constant dielectric material sub-layer having formed thereupon a comparatively high dielectric constant dielectric material sub-layer. Within the method there is also simultaneously etched: (1) an anti-reflective coating layer from an inter-metal dielectric layer; and (2) the etch stop layer from a contact region. The microelectronic fabrication is formed with enhanced performance and enhanced reliability. ally replaced with a linear or branched alkyl group having 1-10 carbon atoms; and which said alkylene group includes a hydrogen atom optionally replaced with a fluorine atom; and CyN denotes a cyclic group containing a nitrogen atom connected to M and optionally having a substituent selected from the group consisting of a halogen atom; a nitro group; a phenyl group; a trialkylsilyl group having 1-8 carbon atoms; and a linear or branched alkyl group having 1-20 carbon atoms in which one methylene group or at least two non-neighboring methylene groups can optionally be replaced with —O—, —S—, —C(O)—, —C(O)—O—, —O—C(O)—, —CH═CH— or C≡C—, and which said alkyl group includes a hydrogen atom optionally replaced with a fluorine atom. 2. A compound according to claim 1, wherein CyN in the formula (1) is a cyclic group having a ring structure selected from the group consisting of pyridine, quinoline, imidazole, pyrazole, benzothiazole, benzoxazole, and benzimidazole, and optionally having said substituent.3. A compound according to claim 1 or2, wherein M in the formula (1) is Ir.4. An electrical device, comprising: a substrate, a first electrode disposed on the substrate, an organic compound layer disposed on the first electrode, and a second electrode disposed on the organic compound layer, the organic compound layer comprising a metal coordination compound represented by the following formula (1): wherein M denotes Ir, Pt, Rh or Pd; n is 2 or 3; Y denotes an alkylene group having 2-6 carbon atoms in which one methylene group or at least two non-neighboring methylene groups can optionally be replaced with —O—, —S—, —C(O)—, —C(O)—O— or —O—C(O)—; and which said alkylene group includes a hydrogen atom optionally replaced with a linear or branched alkyl group having 1-10 carbon atoms; and which said alkylene group includes a hydrogen atom optionally replaced with a fluorine atom; and CyN denotes a cyclic group containing a nitrogen atom connected to M and optionally having a substituent selected from the group consisting of a halogen atom; a nitro group; a phenyl group; a trialkylsilyl group having 1-8 carbon atoms; and a linear or branched alkyl group having 1-20 carbon atoms in which one methylene group or at least two non-neighboring methylene groups can optionally be replaced with —O—, —S—, —C(O)—, —C(O)—O—, —O—C(O)—, —CH═CH— or —C≡C—, and which said alkyl group includes a hydrogen atom optionally replaced with a fluorine atom. 5. A device according to claim 4, wherein CyN in the formula (1) is a cyclic group having a ring structure selected from the group consisting of pyridine, quinoline, imidazole, pyrazole, benzothiazole, benzoxazole, and benzimidazole, and optionally having said substituent.6. A device according to claim 4, wherein M in the formula (1) is Ir.7. A device according to any one of claims 4-6, wherein the organic compound layer luminesces when a voltage is applied between the first and second electrodes.8. A display apparatus, comprising: an electrical device according to claim 7 and voltage application means for applying a voltage to the electrical device.
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