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A recipe management system is provided including a processor configured to receive a first job file for a processing tool through a network, said first job file including a master job file for said processing tool. The processor also receives a second job file through the network from a host process

A recipe management system is provided including a processor configured to receive a first job file for a processing tool through a network, said first job file including a master job file for said processing tool. The processor also receives a second job file through the network from a host processor associated with the processing tool. The processor compares the first and second job files, wherein the processor determines whether the first and second job files differ. A semiconductor manufacturing method is also provided. A first job file including a master job file for a processing tool is received through a network. A second job file is also received through the network from a host processor associate with the processing tool The job files are then compared to determine whether the first and second job files differ.

대표청구항 ▼

A recipe management system is provided including a processor configured to receive a first job file for a processing tool through a network, said first job file including a master job file for said processing tool. The processor also receives a second job file through the network from a host process

A recipe management system is provided including a processor configured to receive a first job file for a processing tool through a network, said first job file including a master job file for said processing tool. The processor also receives a second job file through the network from a host processor associated with the processing tool. The processor compares the first and second job files, wherein the processor determines whether the first and second job files differ. A semiconductor manufacturing method is also provided. A first job file including a master job file for a processing tool is received through a network. A second job file is also received through the network from a host processor associate with the processing tool The job files are then compared to determine whether the first and second job files differ. having a weight average molecular weight (Mw) in a range from 8000 to 18000 and a ratio (Mw/Mn) of the weight average molecular weight (Mw) to a number average molecular weight (Mn) of the binder resin (A) from 2 to 4, the binder resin (B) having a weight average molecular weight (Mw) in a range from 20,000 to 40,000, and a ratio (Mw/Mn) of the weight average molecular weight (Mw) to a number average molecular weight (Mn) from 3 to 5.3. The toner for developing an electrostatic latent image according to claim 1, wherein the wax has a melting point in a range from 70 to 100° C.4. The toner for developing an electrostatic latent image according to claim 3, wherein the wax has a melting viscosity from 1 to 200 mPa·s at 110° C.5. The toner for developing an electrostatic latent image according to claim 1, wherein the toner further contains inorganic fine particles in the inside thereof in an amount of from 1 to 10% by weight to the toner.6. The toner for developing an electrostatic latent image according to claim 1, wherein the molecular weight by GPC of the THF dissolved components of the toner is distributed in the range of not larger than 1×106, the value of the differential molecular weight distribution of the molecular weight of 5×103is not larger than 0.55%, and the value of the differential molecular weight distribution of the molecular distribution of the molecular weight of 1×105is not larger than 0.15%.7. A two-component developer comprising a carrier and a toner, wherein the toner is the toner described in claim 1.8. An image forming process comprising a step of forming an electrostatic latent image on a latent image holding member, a step of forming a toner image by developing the electrostatic latent image with a toner, a step of transferring the toner image onto a transfer material to form a transfer image, and a step of fixing the transferred image using a fixing apparatus comprising a heat roller and a pressure roll, wherein the toner is the electrostatic latent developing toner described in claim 1, and wherein a surface layer of the heat roller and the pressure roller comprises a releasing resin, and a releasing liquid is not substantially supplied to the surface layer of said beat roller and said pressure roller.9. The image forming process according to claim 8, wherein when an amount of the toner image formed on the transfer material before fixing is 0.50 mg/cm2, the toner image has a glossiness after fixing (75 degree gloss) of from 40 to 60.10. The image forming process according to claim 8, wherein, the heat roller has a surface temperature of from 150 to 180° C.11. The image forming process according to claim 8, wherein, the heat roller and the pressure roller each have a peripheral transferring speed of from 70 to 120 mm/second.12. The image forming process according to claim 8, wherein the heat roller and the pressure roller, have a pressing force therebetween from 392 to 638N.13. The image forming process according to claim 8, wherein each of the heat roller and the pressure roller have an elastic layer and the surface layer on a core surface in this order.14. A toner for developing an electrostatic latent image comprising a binder resin, a colorant, and a wax, wherein the molecular weight by GPC of the THF dissolved components of the toner is distributed in a range of not larger than 1×10 6, the value of the differential molecular weight distribution of the molecular weight 5×103is not larger than 0.55%, and the value of the differential molecular weight of the molecular weight 1×105is not larger than 0.15%.15. The toner for developing an electrostatic latent image according to claim 14, wherein the binder resin comprises at least a binder resin (A) and a binder resin (B), the binder resin (A) having a weight average molecular weight (Mw) in a range from 8000 to 18000, and a ratio (Mw/Mn) of the weight average molecular weight (Mw) to a number average molecular weight (Mn) from 2 to 4, the bi