초록 ▼

The disclosure pertains to a compact integrated fluid control valve useful in controlling process fluids handled as part of a semiconductor processing operation. In the wetted section of the valve, process fluids enter through one or more entrance ports and exit through an annular metallic valve sea

The disclosure pertains to a compact integrated fluid control valve useful in controlling process fluids handled as part of a semiconductor processing operation. In the wetted section of the valve, process fluids enter through one or more entrance ports and exit through an annular metallic valve seat. In the valve's drive section, a sliding cylinder, including an upper horizontal member tied to a lower horizontal member, moves up and down. The lower horizontal member presses a diaphragm against the valve seat to close the valve, and moves away from the valve seat to permit fluid flow through the valve. A spring presses at the top of the upper horizontal member of the sliding cylinder, while a controlled pneumatic pressure is applied at the bottom of the upper horizontal member. The balance between the force of the spring and the force of the pneumatic pressure determines the extent to which the valve is open.

대표청구항 ▼

1. A compact valve for controlling the flow of various process fluids, comprising: a fluid-wetted section, including a lower body section and a diaphragm which, in combination, enclose other elements of said wetted section, wherein a fluid enters said lower body section through one or more inlet p

1. A compact valve for controlling the flow of various process fluids, comprising: a fluid-wetted section, including a lower body section and a diaphragm which, in combination, enclose other elements of said wetted section, wherein a fluid enters said lower body section through one or more inlet ports and exits through at least one exit port present in said lower body section, and wherein said exit port has, formed as part of or upon an inner lip thereof, an annular metallic valve seat, and wherein said valve is closed to flow of said process fluids when said diaphragm is pressed sufficiently tightly against said metallic valve seat; a non-fluid-wetted drive section, including a sliding cylinder which comprises an upper horizontal member which is pressure sealed against a first upper body surface of said valve and a lower horizontal member, which is shorter than said upper horizontal member, which is pressure sealed against a second upper body surface of said valve so that a pneumatic chamber is formed between said upper horizontal member and said lower horizontal member, wherein said upper horizontal member is tied to said lower horizontal member, and wherein said sliding cylinder moves up and down above said diaphragm depending on the pneumatic force in said pneumatic chamber, whereby a surface of said lower horizontal member presses against said diaphragm at least periodically, wherein a spring pushes against a top surface of said upper horizontal member and a controlled pneumatic force is applied in said pneumatic chamber, pushing against a bottom surface of said upper horizontal member, and wherein a balance between said spring and said pneumatic force determines an extent to which said valve is open to fluid flow. 2. A valve in accordance with claim 1, wherein said metal valve seat deformation is substantially elastic when valve is closed.3. A valve in accordance with claim 1, wherein metal bonding in said fluid-wetted section of said valve is diffusion bonded.4. A valve in accordance with claim 1 orclaim 2, wherein metal bonding in said non-fluid-wetted drive section of said valve is bonded by at least one high strength adhesive.5. A valve in accordance with claim 1, wherein said diaphragm is a metallic diaphragm.6. A valve in accordance with claim 5, wherein both said metallic valve seat and said metallic diaphragm are fabricated from at least one corrosion-resistant metal.7. A valve in accordance with claim 1, orclaim 2, orclaim 3, orclaim 5, orclaim 6, wherein said spring comprises at least one conically-shaped disk.8. A valve in accordance with claim 7, wherein said at least one spring is a spring assembly comprising a Belleville spring.9. A valve in accordance with claim 1 orclaim 2 orclaim 3, which is used in the delivery of fluids to semiconductor fabrication apparatus.10. A valve in accordance with claim 1 orclaim 2 orclaim 3, which is formed from layered metal sheet components, where a surface of a metal sheet component was chemically etched to promote bonding to said surface.11. A method of handling gas used in semiconductor processing operations, wherein said gas travels through the valve of claim 1.