초록 ▼

Micro-components having at least one individual layer are produced according to the method, which have functional layers3on the walls of inner structures, for example of flow channels. The micro-components are intended to be suitable for a large number of different applications in chemical reaction

Micro-components having at least one individual layer are produced according to the method, which have functional layers3on the walls of inner structures, for example of flow channels. The micro-components are intended to be suitable for a large number of different applications in chemical reaction technology, for heat exchanging, for mixing substances or for evaporating liquids. In particular, the micro-components are intended to have no problems in respect of leaks in the flow channels. The method has the following method steps: A. producing the at least one individual layer by: a. producing a first metal layer or a metal foil1; b. forming the inner structures in and/or on the first metal layer or metal foil1by suitable etching methods and/or metal deposition methods; and c. forming the functional layers3solely on the walls of the inner structures and thereafter B. stacking up and joining the one individual layer to a segment terminating the inner structures, or a plurality of individual layers to one another and to the terminating segment.

대표청구항 ▼

Micro-components having at least one individual layer are produced according to the method, which have functional layers3on the walls of inner structures, for example of flow channels. The micro-components are intended to be suitable for a large number of different applications in chemical reaction

Micro-components having at least one individual layer are produced according to the method, which have functional layers3on the walls of inner structures, for example of flow channels. The micro-components are intended to be suitable for a large number of different applications in chemical reaction technology, for heat exchanging, for mixing substances or for evaporating liquids. In particular, the micro-components are intended to have no problems in respect of leaks in the flow channels. The method has the following method steps: A. producing the at least one individual layer by: a. producing a first metal layer or a metal foil1; b. forming the inner structures in and/or on the first metal layer or metal foil1by suitable etching methods and/or metal deposition methods; and c. forming the functional layers3solely on the walls of the inner structures and thereafter B. stacking up and joining the one individual layer to a segment terminating the inner structures, or a plurality of individual layers to one another and to the terminating segment. e et al., 015/257.06; US-4804470, 19890200, Calvillo et al., 210/232; US-4946591, 19900800, Mealey, 210/474; US-5059319, 19911000, Welsh, 210/232; US-5283928, 19940200, Linn et al., 015/257.06; US-5368728, 19941100, Reaves, 210/232; US-6149808, 20001100, Johnson et al., 210/242.1; US-6247600, 20010600, Sullivan, Jr., 210/474