초록 ▼

An epitaxial cleaning apparatus has a blower controller module and controller module code. The blower controller module is connected between a blower of an epitaxial deposition device having a reaction chamber, a blower and a plurality of plenum chambers for delivering cooling air from the blower to

An epitaxial cleaning apparatus has a blower controller module and controller module code. The blower controller module is connected between a blower of an epitaxial deposition device having a reaction chamber, a blower and a plurality of plenum chambers for delivering cooling air from the blower to the reaction chamber, and a blower power source for controlling the speed of the blower. The controller module code for controlling the blower controller module is installed within a control module connected to the epitaxial deposition device for controlling the operation of the epitaxial deposition device

대표청구항 ▼

An epitaxial cleaning apparatus has a blower controller module and controller module code. The blower controller module is connected between a blower of an epitaxial deposition device having a reaction chamber, a blower and a plurality of plenum chambers for delivering cooling air from the blower to

An epitaxial cleaning apparatus has a blower controller module and controller module code. The blower controller module is connected between a blower of an epitaxial deposition device having a reaction chamber, a blower and a plurality of plenum chambers for delivering cooling air from the blower to the reaction chamber, and a blower power source for controlling the speed of the blower. The controller module code for controlling the blower controller module is installed within a control module connected to the epitaxial deposition device for controlling the operation of the epitaxial deposition device ed to the core; a second cache coupled to the first cache; and a power supply coupled to the core and separately coupled to the on-die logic circuit; the on-die logic circuit includes a snoop request monitor coupled to a bus, and a snooping memory circuit. 18. The system of claim 17, further comprising a bypass clock circuit coupled to the clock circuit and coupled to the on-die logic circuit.19. The system of claim 18, further comprising an external bus clock coupled to the clock circuit and to the bypass clock circuit.20. The system of claim 19, wherein the clock circuit comprises a phase locked loop circuit coupled to the external bus clock and to the core.21. The system of claim 20, wherein the core comprises: a core logic circuit coupled to the phase locked loop circuit and coupled to the electrically separate core power supply. 22. The system of claim 18, wherein the bypass clock circuit comprises a frequency doubler coupled to the on-die logic circuit.23. The system of claim 17, further comprising an external memory coupled to the on-die logic circuit.