IPC분류정보
국가/구분 |
United States(US) Patent
등록
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국제특허분류(IPC7판) |
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출원번호 |
US-0162408
(2002-06-04)
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발명자
/ 주소 |
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인용정보 |
피인용 횟수 :
2 인용 특허 :
3 |
초록
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The invention provides a passive two-stage multiwavelength approach for measuring temperature, emissivity and stray-light levels. The first stage comprises the steps of, (1) acquiring spectral intensity measurements over a predetermined spectral width of a thermal radiation source radiating at a tru
The invention provides a passive two-stage multiwavelength approach for measuring temperature, emissivity and stray-light levels. The first stage comprises the steps of, (1) acquiring spectral intensity measurements over a predetermined spectral width of a thermal radiation source radiating at a true effective spectral emissivity and with a true source temperature, (2) forming a composite function that relates said spectral intensity measurements to the true effective spectral emissivity and the true source temperature, (3) providing emissivity estimating means for approximately determining how the true effective emissivity affects the color temperature of the thermal radiation source, (4) substituting an estimated effective spectral emissivity for the true effective spectral emissivity within the composite function such that the estimated emissivity approximately accounts for the effects of the true effective emissivity on the color temperature, (5) substituting a source temperature projection for the true source temperature within the composite function, and (6) utilizing the composite function to provide a best-fit correlation between the spectral intensity measurements, the estimated emissivity, and the projected source temperature such that when the projected source temperature equals the true source temperature the composite function attains an extremum, thereby obtaining an approximation of said source temperature. The second stage comprises the steps of (1) utilizing spectral acquisition means to acquire and measure a set of multiple spectral intensity distributions of a thermal radiation source radiating at multiple source temperatures at an effective spectral emissivity, wherein each of the spectral intensity distributions is associated with a particular source temperature, and (2) forming a first function of at least two of the measured spectral intensity distributions and of a set of temperature variables that represent the temperatures of the spectral intensity distributions used, such that the first function attains an extremum when the temperature variables equal the corresponding source temperatures, thereby calculating the source temperatures.
대표청구항
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The invention provides a passive two-stage multiwavelength approach for measuring temperature, emissivity and stray-light levels. The first stage comprises the steps of, (1) acquiring spectral intensity measurements over a predetermined spectral width of a thermal radiation source radiating at a tru
The invention provides a passive two-stage multiwavelength approach for measuring temperature, emissivity and stray-light levels. The first stage comprises the steps of, (1) acquiring spectral intensity measurements over a predetermined spectral width of a thermal radiation source radiating at a true effective spectral emissivity and with a true source temperature, (2) forming a composite function that relates said spectral intensity measurements to the true effective spectral emissivity and the true source temperature, (3) providing emissivity estimating means for approximately determining how the true effective emissivity affects the color temperature of the thermal radiation source, (4) substituting an estimated effective spectral emissivity for the true effective spectral emissivity within the composite function such that the estimated emissivity approximately accounts for the effects of the true effective emissivity on the color temperature, (5) substituting a source temperature projection for the true source temperature within the composite function, and (6) utilizing the composite function to provide a best-fit correlation between the spectral intensity measurements, the estimated emissivity, and the projected source temperature such that when the projected source temperature equals the true source temperature the composite function attains an extremum, thereby obtaining an approximation of said source temperature. The second stage comprises the steps of (1) utilizing spectral acquisition means to acquire and measure a set of multiple spectral intensity distributions of a thermal radiation source radiating at multiple source temperatures at an effective spectral emissivity, wherein each of the spectral intensity distributions is associated with a particular source temperature, and (2) forming a first function of at least two of the measured spectral intensity distributions and of a set of temperature variables that represent the temperatures of the spectral intensity distributions used, such that the first function attains an extremum when the temperature variables equal the corresponding source temperatures, thereby calculating the source temperatures. rformed with a sensor apparatus having a plurality of detectors, the method comprising the steps of: a) loading a sensor apparatus including electronic devices into the process tool; b) measuring the operating characteristics with the sensor apparatus; c) converting the measured operating characteristics into digital data; d) deriving correction factors for the measurements; and e) applying the correction factors to the measured data so as to generate corrected data; wherein step d comprises solving analytically generated equations representing the behavior of at least a portion of the sensor apparatus. 4. A method according to claim 3 wherein step d includes using the equations and measurements from at least one of the sensors so as to derive the correction factors.5. A method according to claim 3 wherein the sensor apparatus solves the equations.6. A method according to claim 3 wherein the operating characteristics are temperatures.7. A method according to claim 3 wherein the operating characteristics are selected from the group consisting of plasma potential, etch rate, deposition rate, ion density, resistivity, and thermal flux.8. A method according to claim 3 further comprising the step of transmitting the measured operating characteristics to an external information processor for deriving the correction factors and applying the correction factors to the measured operating characteristics.9. An apparatus for generating corrected data for process tools used for processing workpieces, the apparatus comprising: a base; at least one base sensor supported by the base, the sensor being capable of measuring data representing a condition of the base; an electronics module comprising an information processor, the electronics module being supported by the base; at least one electronics module sensor coupled to the electronics module for measuring data representing a condition of the electronics module; and the information processor being connected with the base sensor and the electronics module sensor so as to receive data from the sensors. 10. An apparatus according to claim 9 wherein the electronics module further comprises a transmitter for transmitting data.11. An apparatus according to claim 9 wherein the electronics module further comprises a transmitter for wirelessly transmitting data.12. An apparatus according to claim 9 wherein the base sensor comprises a temperature sensor and the electronics module sensor comprises a temperature sensor.13. An apparatus according to claim 9 wherein the base sensor and the electronics module sensor comprises at least one of resistor temperature dependent sensors, thermistors, defined area probe for measuring plasma potential, defined area probe for measuring ion flux, Van der Paw cross for measuring etch rate, isolated field transistors for measuring plasma potential, current loops for measuring ion flux, and current loops for measuring radio frequency field.14. An apparatus according to claim 9 wherein the information processor is capable of calculating correction factors using at least one characteristic of the electronics module and data from the information processor sensor; the information processor being capable of applying the correction factors to the measured parameters from the base sensor so as to obtain corrected data for the parameters.15. An apparatus according to claim 14 wherein the electronics module further comprises a transmitter for transmitting the corrected data.16. An apparatus according to claim 14 wherein the electronics module further comprises a transmitter for wirelessly transmitting the corrected data.17. An apparatus according to claim 14 wherein the electronics module is capable of at least one of a) storing the corrected data, and b) storing the corrected data and transmitting the corrected data. 18. An apparatus according to claim 14 wherein the base sensor comprises a temperature sensor and the electronics module sensor
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