초록 ▼

A method for determining the relative motion of a surface with respect to a measurement device including placing a partially transmitting object, which is part of the measuring device, adjacent to the surface; illuminating the surface with incident illumination, which does not constitute an interfer

A method for determining the relative motion of a surface with respect to a measurement device including placing a partially transmitting object, which is part of the measuring device, adjacent to the surface; illuminating the surface with incident illumination, which does not constitute an interference pattern, such that the illumination is reflected from portions of the surface, wherein at least part of at least one of the incident and reflected illumination passes through the object; detecting the illumination reflected from the surface, and generating a detected signal; and determining the relative motion of the surface parallel to the surface, from the detected signal.

대표청구항 ▼

1. A method for determining the relative motion of a surface with respect to a measurement device comprising: placing a partially transmitting object, which is part of the measuring device, adjacent to the surface; illuminating the surface with incident illumination, which does not constitute a

1. A method for determining the relative motion of a surface with respect to a measurement device comprising: placing a partially transmitting object, which is part of the measuring device, adjacent to the surface; illuminating the surface with incident illumination, which does not constitute an interference pattern, such that the illumination is reflected from portions of the surface, wherein at least part of at least one of the incident and reflected illumination passes through the object; detecting the illumination reflected from the surface, and generating a detected signal; and determining the relative motion of the surface parallel to the surface, from the detected signal. 2. A method according to claim 1 and comprising: varying the phase between illumination reflected from or diffracted by the object and at least a portion of the illumination reflected from the surface. 3. A method according to claim 2 wherein the direction is determined based on said varied phase.4. A method according to claim 1 and including determining motion in a direction perpendicular to the surface.5. A method according to claim 1 wherein varying the phase comprises periodically varying the phase.6. A method according to claim 5, wherein determining the direction of relative motion comprises determining the direction of relative motion based on a characteristic of the signal caused by said periodically varying relative phase.7. A method according to claim 2 wherein varying the phase comprises: causing the object to move periodically substantially in the direction of the motion being measured. 8. A method according to claim 2 wherein varying the phase comprises: causing the object to move periodically substantially perpendicularly to the direction of the motion being measured. 9. A method according to claim 2 wherein varying the phase comprises: providing a transparent material between the object and the surface; and electrifying the material such that its optical length in the direction of the illumination varies. 10. A method according to claim 9 wherein the transparent material is a piezoelectric material.11. A method according to claim 1 and including determining both the magnitude and direction of the translation utilizing a single detector.12. A method according to claim 2, wherein varying the phase comprises, introducing a static phase change and wherein determining the direction of relative motion comprises determining the direction of relative motion based on a characteristic of the signal caused by said phase change.13. A method according to claim 2 and including: dividing at least part of the illumination that is reflected from the surface into at least a first illumination having a first phase and a second illumination having a second phase. 14. A method according to claim 13 wherein said first and second illuminations have different polarizations.15. A method according to claim 14 wherein dividing comprises passing the illumination incident on the surface through a birefringent material.16. A method according to claim 14 and including passing the illumination reflected from the surface through a birefringent material.17. A method according to claim 15 and including placing the birefringent material between the object and the surface.18. A method according to claim 1 and including determining the magnitude and direction of the translation utilizing two detectors which produce different detected signals depending on the direction of the translation.19. A method according to claim 18 and including determining the direction of translation from the sign of a phase difference between the different detected signals.20. A method according claim 1 wherein the illumination is perpendicularly incident on the surface.