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Target and process for its production, and method of forming a film having a high refractive index 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-014/34
  • C23C-004/10
  • B05D-001/02
출원번호 US-0191321 (2002-07-10)
우선권정보 JP-0215074 (1995-08-23)
발명자 / 주소
  • Kida, Otojiro
  • Mitsui, Akira
  • Suzuki, Eri
  • Osaki, Hisashi
  • Hayashi, Atsushi
출원인 / 주소
  • Asahi Glass Ceramics Co., Ltd.
대리인 / 주소
    Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
인용정보 피인용 횟수 : 38  인용 특허 : 3

초록 ▼

A sputtering target comprising a substrate and a target material formed on the substrate, wherein the target material comprises a metal oxide of the chemical formula MOxas the main component, wherein MOxis a metal oxide which is deficient in oxygen as compared with the stoichiometric composition, an

대표청구항 ▼

1. A sputtering target comprising a substrate and a target material formed on the substrate, wherein the target material comprises as a main component an oxygen deficient oxide; and the oxygen deficient oxide comprises a metal oxide of a chemical formula TaO xwhere 2

이 특허에 인용된 특허 (3)

  1. Kida Otojiro (Yokohama JPX) Mitsui Akira (Yokohama JPX) Hayashi Atsushi (Yokohama JPX), Ceramic rotatable magnetron sputtering cathode target and process for its production.
    상세보기
  2. Otojiro Kida JP; Akira Mitsui JP; Eri Suzuki JP; Hisashi Osaki JP; Atsushi Hayashi JP, Target and process for its production, and method for forming a film having a high refractive index.
    상세보기
  3. Kida Otojiro,JPX ; Mitsui Akira,JPX ; Suzuki Eri,JPX ; Osaki Hisashi,JPX ; Hayashi Atsushi,JPX, Target and process for its production, and method for forming a film having a highly refractive index.
    상세보기

이 특허를 인용한 특허 (38)

  1. Butz, Jochen; Blacker, Richard; Kriltz, Uwe; Dietrich, Anton, Coated article with IR reflecting layer and method of making same.
    상세보기
  2. Lao, Jingyu; Lingle, Philip J.; Boyce, Brent; Disteldorf, Bernd; Blacker, Richard, Coated article with IR reflecting layer and method of making same.
    상세보기
  3. Lao, Jingyu; Lingle, Philip J.; Boyce, Brent; Disteldorf, Bernd; Blacker, Richard, Coated article with IR reflecting layer and method of making same.
    상세보기
  4. Lao, Jingyu; Lingle, Philip J.; Boyce, Brent; Disteldorf, Bernd; Blacker, Richard, Coated article with IR reflecting layer and method of making same.
    상세보기
  5. Lao, Jingyu; Lingle, Philip J.; Boyce, Brent; Disteldorf, Bernd; Blacker, Richard, Coated article with IR reflecting layer and method of making same.
    상세보기
  6. Lao, Jingyu; Lingle, Philip J.; Boyce, Brent; Disteldorf, Bernd; Blacker, Richard, Coated article with IR reflecting layer and method of making same.
    상세보기
  7. Lao, Jingyu; Lingle, Philip J.; Boyce, Brent; Disteldorft, Bernd; Blacker, Richard, Coated article with IR reflecting layer and method of making same.
    상세보기
  8. Miller, Steven A.; Gaydos, Mark; Shekhter, Leonid N.; Gulsoy, Gokce, Dynamic dehydriding of refractory metal powders.
    상세보기
  9. Miller, Steven A.; Gaydos, Mark; Shekhter, Leonid N.; Gulsoy, Gokce, Dynamic dehydriding of refractory metal powders.
    상세보기
  10. Miller, Steven A.; Gaydos, Mark; Shekhter, Leonid N.; Gulsoy, Gokce, Dynamic dehydriding of refractory metal powders.
    상세보기
  11. Miller, Steven A.; Kumar, Prabhat; Wu, Richard; Sun, Shuwei; Zimmermann, Stefan; Schmidt-Park, Olaf, Fine grained, non banded, refractory metal sputtering targets with a uniformly random crystallographic orientation, method for making such film, and thin film based devices and products made therefrom.
    상세보기
  12. Dary, Francois-Charles; Gaydos, Mark; Loewenthal, William; Miller, Steven A.; Rozak, Gary; Volchko, Scott Jeffrey; Zimmermann, Stefan; Stawovy, Michael Thomas, Large-area sputtering targets.
    상세보기
  13. Myli, Kari B.; Krisko, Annette J.; German, John R.; Hartig, Klaus, Low-maintenance coating technology.
    상세보기
  14. Myli, Kari B.; Krisko, Annette J.; German, John; Hartig, Klaus, Low-maintenance coating technology.
    상세보기
  15. Krisko, Annette J.; Myli, Kari B.; Pfaff, Gary L.; Brownlee, James E., Low-maintenance coatings.
    상세보기
  16. Krisko, Annette J.; Myli, Kari B.; Pfaff, Gary L.; Brownlee, James E., Low-maintenance coatings.
    상세보기
  17. Myli, Kari B.; Krisko, Annette J.; Brownlee, James E.; Pfaff, Gary L., Low-maintenance coatings, and methods for producing low-maintenance coatings.
    상세보기
  18. Myli, Kari B.; Krisko, Annette J.; Brownlee, James Eugene; Pfaff, Gary L., Low-maintenance coatings, and methods for producing low-maintenance coatings.
    상세보기
  19. Zimmermann, Stefan; Papp, Uwe; Kreye, Heinrich; Schmidt, Tobias, Method for coating a substrate surface and coated product.
    상세보기
  20. Lu, Yiwei; Seder, Thomas A., Method of making low-E coating using ceramic zinc inclusive target, and target used in same.
    상세보기
  21. Miller, Steven A.; Schmidt-Park, Olaf; Kumar, Prabhat; Wu, Richard; Sun, Shuwei; Zimmermann, Stefan, Methods of forming sputtering targets.
    상세보기
  22. Miller, Steven A.; Shekhter, Leonid N.; Zimmerman, Stefan, Methods of joining metallic protective layers.
    상세보기
  23. Miller, Steven A.; Shekhter, Leonid N.; Zimmermann, Stefan, Methods of joining metallic protective layers.
    상세보기
  24. Miller, Steven A.; Shekhter, Leonid N.; Zimmermann, Stefan, Methods of joining metallic protective layers.
    상세보기
  25. Volchko, Scott Jeffrey; Zimmermann, Stefan; Miller, Steven A.; Stawovy, Michael Thomas, Methods of manufacturing high-strength large-area sputtering targets.
    상세보기
  26. Loewenthal, William; Miller, Steven Alfred, Methods of manufacturing large-area sputtering targets.
    상세보기
  27. Miller, Steven A.; Dary, Francois-Charles; Gaydos, Mark; Rozak, Gary, Methods of manufacturing large-area sputtering targets by cold spray.
    상세보기
  28. Volchko, Scott Jeffrey; Loewenthal, William; Zimmermann, Stefan; Gaydos, Mark; Miller, Steven Alfred, Methods of manufacturing large-area sputtering targets using interlocking joints.
    상세보기
  29. Volchko, Scott Jeffrey; Loewenthal, William; Zimmermann, Stefan; Gaydos, Mark; Miller, Steven Alfred, Methods of manufacturing large-area sputtering targets using interlocking joints.
    상세보기
  30. Miller, Steven A.; Kumar, Prabhat; Wu, Rong-chein Richard; Sun, Shuwei; Zimmermann, Stefan; Schmidt-Park, Olaf, Methods of rejuvenating sputtering targets.
    상세보기
  31. Miller, Steven A.; Schmidt-Park, Olaf; Kumar, Prabhat; Wu, Richard; Sun, Shuwei; Zimmerman, Stefan, Methods of rejuvenating sputtering targets.
    상세보기
  32. Krisko, Annette J.; Myli, Kari B.; Burrows, Keith J., Photocatalytic coatings having improved low-maintenance properties.
    상세보기
  33. Lu, Yiwei, Silicon titanium oxide coating, coated article including silicon titanium oxide coating, and method of making the same.
    상세보기
  34. Lu, Yiwei, Silicon titanium oxide coating, coated article including silicon titanium oxide coating, and method of making the same.
    상세보기
  35. Brabender, Dennis M; Kokoschke, Jeffrey L, Sputtering apparatus including target mounting and control.
    상세보기
  36. Watanabe, Koichi; Suzuki, Yukinobu; Ishigami, Takashi, Sputtering target and process for producing si oxide film therewith.
    상세보기
  37. Madocks, John; George, Mark A., Sputtering target temperature control utilizing layers having predetermined emissivity coefficients.
    상세보기
  38. Mayer, Raymond M.; Lu, Yiwei, Sputtering target with bonding layer of varying thickness under target material.
    상세보기

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